{"title":"Gas Mixing Systems","description":"","products":[{"product_id":"lvd-f1","title":"Compact Liquid Vaporization Systems with Temperature and Pressure Control for CVD \u0026 DLCVD - LVD-F1","description":"LVD-F1 is a precision \u0026amp; cost-effective liquid evaporating delivery system for lab scale CVD or DLCVD, which can carry all types of liquids, such as ETOH, SnCl4, TiCl4r, SiHCl3, and Zn(C2H5)2, etc., without worrying about corrosion. It is an ideal tool for the CVD processing of nanowire and film in material research. SPECIFICATIONS Product Structure Power Input 220V 50Hz 2200 W Power consumption 110V is available with a transformer Liquid Flow Control Flow rate range: 1 - 82 ± 1ml\/minute adjustable (min. rate: 1 ml\/min) Heater \u0026amp; Temperature controller SS316 evaporating chamber, up to 550ºC Heating gas line, up to 200ºC) to prevent liquid condensation. Single point temperature controller for the evaporator and heating line. Gas flow control Carrying gas (inert gas) is controlled by a precision float flow-meter (200 - 2000 mL\/min adjustable). The optional digital mass flow controller is available at extra cost. Pressure gauge built in front panel Two SS needle valves are installed to control gas in and out Vapor Gas outlet tube fitting size: 1\/4\"OD Note: 1\/4'' PTFE tube, 1\/4'' SS tube, and beaker are not included, customers need to prepare them according to the experimental needs. The inert gas tank is required to deliver vapor Application Note This system can fit with all MTI tube furnaces and CVD furnaces, click the picture below to see how, and choose a furnace at \" CVD Furnace System \" Compliance CE Certified NRTL or CSA certification is available upon request\u003cbr\u003e\u003cbr\u003e\u003ctable border=\"1\" cellpadding=\"1\" cellspacing=\"0\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct Structure\u003c\/td\u003e\n\u003ctd\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/CVD-LVD-F1FrontDis.jpg\"\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/CVD-LVD-F1FrontDis_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/div\u003e\n\u003c\/a\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePower Input\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e220V 50Hz\u003c\/li\u003e\n\u003cli\u003e2200 W Power consumption\u003c\/li\u003e\n\u003cli\u003e110V is available with a transformer\u003cstrong\u003e\u003cbr\u003e\u003c\/strong\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cbr\u003eLiquid Flow Control\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eFlow rate range: 1 - 82 ± 1ml\/minute adjustable (min. rate: 1 ml\/min)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeater \u0026amp; Temperature controller\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eSS316 evaporating chamber, up to 550ºC\u003c\/li\u003e\n\u003cli\u003eHeating gas line, up to 200ºC) to prevent liquid condensation.\u003c\/li\u003e\n\u003cli\u003eSingle point temperature controller for the evaporator and heating line. \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eGas flow control\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eCarrying gas (inert gas) is controlled by a precision float flow-meter (200 - 2000 mL\/min adjustable). The optional digital mass flow controller is available at extra cost.\u003c\/li\u003e\n\u003cli\u003ePressure gauge built in front panel\u003c\/li\u003e\n\u003cli\u003eTwo SS needle valves are installed to control gas in and out\u003c\/li\u003e\n\u003cli\u003eVapor Gas outlet tube fitting size: 1\/4\"OD\u003c\/li\u003e\n\u003cli style=\"color: rgb(255, 42, 0);\"\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eNote: 1\/4'' PTFE tube, 1\/4'' SS tube, and beaker are not included, customers need to prepare them according to the experimental needs.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli style=\"color: rgb(255, 42, 0);\"\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eThe inert gas tank is required to deliver vapor \u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eApplication Note\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eThis system can fit with all MTI tube furnaces and CVD furnaces, click the picture below to see how, and choose a furnace at \" \u003cstrong\u003e\u003ca href=\"https:\/\/mtiecommerce.myshopify.com\/search?q=CVD+Furnace+System\u0026amp;options%5Bprefix%5D=last\" rel=\"noopener\" target=\"_blank\"\u003eCVD Furnace System\u003c\/a\u003e\"\u003c\/strong\u003e \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCompliance\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eCE Certified\u003c\/li\u003e\n\u003cli\u003eNRTL or CSA certification is available upon request\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44984809980043,"sku":"LVDF1","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/LVD-F1_Main_86f3fdf7-2c0c-4e15-ba0a-1e51a3d38ec0.jpg?v=1764850844"},{"product_id":"gsl-2z-lcd-s","title":"Compact 2 Channel MFC Gas Delivery System with PLC Touch Panel Control- GSL-2Z-LCD-S","description":"GSL-2Z-LCD-S is a compact two-channel gas mixer that is designed for the control of 2 types of gasses flowing through vacuum-sealed tube furnaces at a low cost. SPECIFICATIONS Mass Flow Controller inside Note: Other range MFC can be customized at extra cost upon request. Two Precision Mass Flow Controller ( MFC) inside ) Working Temp. : 5~45 ºC Max. Pressure: 3x10 6 Pa Accuracy: ±1.5% FS Liner: ±0.5-1.5%F.S. Duplicate accuracy: ±0.2%F.S. Controlling Range: Controller 1: 1~ 99 SCCM Controller 2: 1~199 SCCM Power Voltage: AC 208 - 240V Single phase 50\/60Hz Power: 100 W in total May order a 100W transformer to operate at 110VAC ( Click Pic below to order ) PLC Touch Screen 6\" color touchscreen control panel to make parameter setting easy. Touchscreen Control and PC remote switchable, RS485 Port and a supplied software are included for remote operation by PC, not compatible with LabVIEW for now. Mechanical Pressure Gauge Measurement Range : -0.1~0.15 MPa (0.01 MPa\/grid) Needle Valve 316 Stainless Steel Gas Pipeline One stainless steel gas mixing tank is built-in Internal pipeline: 1\/4\" O.D stainless steel External pipeline: 1\/4\" O.D PTFE Gas Mixing Tank: Φ 80X120mm Stop Valve \u0026amp; Fittings 316 stainless steel needle valve, Φ 1\/4” Swagelok Tube Fitting Compliance All components are CE certified NRTL (UL61010) or CSA certification is available at extra cost. Oxygen Monitoring ( Optional) An Optional oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture left to learn more: Related Products CVD \u0026amp; PECVD Furnace Click pictures below to order bubbler or evaporator for CVD\u003cbr\u003e\u003cbr\u003e\u003ctable border=\"1\" cellpadding=\"1\" cellspacing=\"0\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003eMass Flow Controller inside\u003ca href=\"http:\/\/www.mtixtl.com\/ManualAdjustableDigitalDispalyMassFlowControllerEQ-MFC-7B.aspx\"\u003e\u003cbr\u003e\u003c\/a\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\u003ca href=\"mfc-7b\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/D07_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003cbr\u003e\u003ca href=\"mfc-7b\" target=\"_blank\"\u003eNote: Other range MFC can be customized at extra cost upon request. \u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003eTwo Precision Mass Flow Controller ( MFC) inside )\u003c\/li\u003e\n\u003cli\u003eWorking Temp. : 5~45 ºC\u003c\/li\u003e\n\u003cli\u003eMax. Pressure: 3x10\u003csup\u003e6 \u003c\/sup\u003ePa\u003c\/li\u003e\n\u003cli\u003eAccuracy: ±1.5% FS\u003c\/li\u003e\n\u003cli\u003eLiner: ±0.5-1.5%F.S.\u003c\/li\u003e\n\u003cli\u003eDuplicate accuracy: ±0.2%F.S.\u003c\/li\u003e\n\u003cli\u003eControlling Range:\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eController 1: 1~ 99 SCCM\u003c\/li\u003e\n\u003cli\u003eController 2: 1~199 SCCM\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003e\n\u003cp\u003ePower\u003c\/p\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\u003ca href=\"tf-220110-100-ld\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQTF220110100LD_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003eVoltage: AC 208 - 240V Single phase 50\/60Hz\u003c\/li\u003e\n\u003cli\u003ePower: 100 W in total\u003c\/li\u003e\n\u003cli\u003eMay order a 100W transformer to operate at 110VAC ( Click Pic below to order )\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003e\n\u003cp\u003ePLC Touch Screen \u003cbr\u003e\u003c\/p\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GSL2ZLCDS2.jpg?v=1706210609\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GSL2ZLCDS2_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003e6\" color touchscreen control panel to make parameter setting easy.\u003c\/li\u003e\n\u003cli\u003eTouchscreen Control and \u003cstrong\u003ePC remote\u003c\/strong\u003e switchable, RS485 Port and a supplied software are included for remote operation by PC, not compatible with LabVIEW for now. \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003eMechanical Pressure Gauge\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003e\n\u003cspan lang=\"EN-US\"\u003e Measurement\u003c\/span\u003e\u003cspan lang=\"EN-US\"\u003e Range\u003c\/span\u003e\u003cspan lang=\"EN-US\"\u003e:\u003c\/span\u003e-0.1~0.15 MPa (0.01 MPa\/grid)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003eNeedle Valve\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003e316 Stainless Steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003eGas Pipeline\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GSL2ZLCDS3.jpg\" rel=\"lightbox\"\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GSL2ZLCDS3_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/div\u003e\n\u003c\/a\u003e\u003cbr\u003e\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003eOne stainless steel gas mixing tank is built-in\u003c\/li\u003e\n\u003cli\u003eInternal pipeline: 1\/4\" O.D stainless steel\u003c\/li\u003e\n\u003cli\u003eExternal pipeline: 1\/4\" O.D PTFE\u003c\/li\u003e\n\u003cli\u003eGas Mixing Tank: Φ\u003cspan lang=\"EN-US\"\u003e80X120mm\u003c\/span\u003e\n\u003c\/li\u003e\n\u003cli\u003e\u003cspan lang=\"EN-US\"\u003eStop Valve \u0026amp; Fittings \u003c\/span\u003e\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan lang=\"EN-US\"\u003e316 stainless steel needle valve, \u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\n\u003cspan lang=\"EN-US\"\u003eΦ\u003cspan lang=\"EN-US\"\u003e1\/4” Swagelok\u003c\/span\u003e\u003c\/span\u003e Tube Fitting\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003e\n\u003cdiv\u003eCompliance\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003eAll components are CE certified\u003c\/li\u003e\n\u003cli\u003eNRTL (UL61010) or CSA certification is available at extra cost.\u003cstrong\u003e \u003c\/strong\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cstrong\u003e\u003cstrong\u003e\u003c\/strong\u003e\u003c\/strong\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003e\n\u003cdiv style=\"text-align: start;\"\u003eOxygen Monitoring ( Optional)\u003cbr\u003e\u003ca href=\"w1000\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQW1000FT_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003eAn Optional oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture left to learn more:\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003e\n\u003cdiv\u003eRelated Products\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003e\n\u003ca href=\"https:\/\/mtixtl.com\/search?q=Tube+Furnaces+%281-+7+Zones%29+%3E+CVD+%26+PECVD+MIST-CVD+Furnaces\u0026amp;options%5Bprefix%5D=last\" rel=\"noopener\" target=\"_blank\"\u003eCVD \u0026amp; PECVD     \u003c\/a\u003e                         Furnace Click pictures below to order bubbler or evaporator for CVD \u003cbr\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\n\u003ca href=\"https:\/\/mtixtl.com\/search?q=Tube+Furnaces+%281-+7+Zones%29+%3E+CVD+%26+PECVD+MIST-CVD+Furnaces\u0026amp;options%5Bprefix%5D=last\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/TF_CATA_PECVD_100x100.jpg?v=1706135238\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e                                                             \u003cstrong style=\"font-size: 0.875rem;\"\u003e\u003cstrong\u003e     \u003ca href=\"lvd-f1\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg border=\"0\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/LVD4_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\" title=\"\"\u003e\u003c\/a\u003e\u003c\/strong\u003e\u003c\/strong\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44984812044427,"sku":"GSL-2Z-LCD-S","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/GSL2ZLCDS.jpg?v=1764850850"},{"product_id":"gslald4","title":"2 Channel ALD Control Unit with 4 Channel MFC Gas Delivery System - GSLALD4","description":"\u003cp\u003eALD-GSL-4 is a two channels precision ALD precursor delivery unit with four channels MFC gas mixing and delivery system, which is designed for DIY an ALD coating system with any furnace or chamber for thin film growth and powder surface coating. The LCD touch screen provides easy control for ALD puls time and gas flow for each channel.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eSPECIFICATIONS  \u003c\/strong\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003e\n\u003cp\u003eWorking Voltage\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003eAC 220V Single phase 50\/60Hz\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003e\n\u003cp\u003ePower\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003e100 W\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003e\n\u003cp\u003ePLC Touch Screen \u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ALDSystem.jpg?v=1706209761\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ALDSystem_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003eAll parameters of ALD vapor pulse time and Gas flow are controlled by PLC via a 6\" touchscreen panel in a mobile cart \u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eControl Two ALD valves with pulse duration time and cycling with microsecond precision\u003c\/li\u003e\n\u003cli\u003eControl For channels gas delivery with ±0.2%F.S via MFC\u003c\/li\u003e\n\u003cli\u003eDisplay vacuum pressure \u003c\/li\u003e\n\u003cli\u003eOther parameters upon request of the customer\u003c\/li\u003e\n\u003cli\u003ePlease click the picture left to see the control interface\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003e RS485 Port and supplied software are included for remote operation by PC.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003e\n\u003cp\u003e ALD Valves\u003cbr\u003e\u003c\/p\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\u003ca href=\"6lvv-ald3fr4-p-c-ld\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/6LVVALD3TFR4PCV.1_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003eTwo ALD valves are inlcuded to deliver drying gas or liquid-vapor precursor vapor.\u003c\/li\u003e\n\u003cli\u003eThe numbers of ALD channels can be customized upon request\u003c\/li\u003e\n\u003cli\u003eMax. frequency on\/off: 283 HZ\u003c\/li\u003e\n\u003cli\u003eMin. Pulse time: \u003cspan style=\"color: rgb(255, 42, 0);\"\u003e10 ms\u003c\/span\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003e \u003cbr\u003e\u003cbr\u003eMass Flow Controller\u003cbr\u003e\u003cbr\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\u003ca href=\"mfc-7b\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/D07_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003e Four MFC is included to deliver 4 types of carrying gases independently or by mixing \u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eControlling Range:\u003c\/li\u003e\n\u003cli\u003eController 1: 0~100 SCCM\u003c\/li\u003e\n\u003cli\u003eController 2: 1~199 SCCM\u003c\/li\u003e\n\u003cli\u003eController 3: 1~199 SCCM\u003c\/li\u003e\n\u003cli\u003eController 4: 1~499 SCCM\u003c\/li\u003e\n\u003cli\u003eNote: Other range\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"mfc-7b\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003e MFC\u003c\/a\u003e\u003c\/span\u003e can be customized at extra cost upon request. ]\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eWorking Temperature: 5~45 ºC\u003c\/li\u003e\n\u003cli\u003eMax. Pressure: 3x10\u003csup\u003e6 \u003c\/sup\u003ePa\u003c\/li\u003e\n\u003cli\u003eAccuracy: ±1.5% FS\u003c\/li\u003e\n\u003cli\u003eLiner: ±0.5-1.5%F.S.\u003c\/li\u003e\n\u003cli\u003eDuplicate accuracy: ±0.2%F.S.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003eGas Pipeline\u003cbr\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/DSC_0167.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/DSC_0167_50x50.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e      \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ALDControl.1.jpg?v=1706209761\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ALDControl.1_50x50.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003eOne stainless steel gas mixing tank is built-in\u003c\/li\u003e\n\u003cli\u003eInternal pipeline: 1\/4\" O.D stainless steel\u003c\/li\u003e\n\u003cli\u003eExternal pipeline: 1\/4\" O.D PTFE\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003eGas Mixing Tank\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003eΦ\u003cspan lang=\"EN-US\"\u003e80X120mm\u003c\/span\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003e\n\u003cbr\u003eStop Valve \u0026amp; Fittings\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003e4 needle valves made of 316 Stainless Steel are included\u003c\/li\u003e\n\u003cli\u003eΦ\u003cspan lang=\"EN-US\"\u003e1\/4” Swagelok Tube Fitting\u003c\/span\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003e\n\u003cdiv\u003eCompliance\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003eAll components are CE certified\u003c\/li\u003e\n\u003cli\u003eThe unit can pass TUV(UL61010) or CSA certification at extra cost.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd colspan=\"2\"\u003e\n\u003cdiv\u003e Optional\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003eYou may consider ordering a bubbler or vapor delivery system by clicking picture below\u003c\/li\u003e\n\u003cli\u003eWe can help you to connect the ALD control unit with the MTI tube furnace at extra cost\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cdiv style=\"text-align: start;\"\u003e   \u003ca href=\"lvd-f1\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/LVD4_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e    \u003cstrong style=\"font-size: 0.875rem;\"\u003e\u003ca href=\"ALD-1200X-4\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" border=\"0\" height=\"52\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ALD.1.jpg\" title=\"\" width=\"82\"\u003e\u003c\/a\u003e     \u003ca href=\"ald-1200x-r-4\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" border=\"0\" height=\"57\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/RotationALD.jpg\" title=\"\" width=\"90\"\u003e\u003c\/a\u003e\u003c\/strong\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44984812109963,"sku":"GSLALD4","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/EQ-ALD-GSL-42_30130101-6a66-44e4-ab3c-11b2062b4aab.jpg?v=1764850850"},{"product_id":"gsl-lcd","title":"2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software - GSL-LCD","description":"\u003cp\u003eGSL-LCD gas mixing station is designed for the control of 1-9 types of gasses flowing through vacuum-sealed tube furnaces at a low cost. It is installed in a heavy-duty mobile cart where the tube furnace can be placed on the top. LCD touch screen is integrated to provide easy control of the gas flow rate of each independent channel. Such a system is suitable for using with CVD furnaces to study the gas environmental influence on various materials.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eSPECIFICATIONS \u003c\/strong\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003ctable style=\"font-size: 0.875rem; width: 102.857%;\" cellspacing=\"0\" cellpadding=\"1\" border=\"1\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003e\n\u003cp\u003e\u003cspan lang=\"EN-US\"\u003e\u003cspan lang=\"EN-US\"\u003eFunction\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 18.4669%;\"\u003e\n\u003cp\u003eTwo Channels\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 24.9129%;\"\u003e\n\u003cp\u003eThree Channels\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 18.4669%;\"\u003e\n\u003cp\u003e\u003cspan lang=\"EN-US\"\u003eFour Channels\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 21.777%;\"\u003e\n\u003cp\u003eCustomized Four to Nine Channels\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003e\n\u003cp\u003eComputerized \u003cbr\u003eMass Flow Controller\u003ca href=\"http:\/\/www.mtixtl.com\/ManualAdjustableDigitalDispalyMassFlowControllerEQ-MFC-7B.aspx\"\u003e\u003cbr\u003e\u003c\/a\u003e\u003ca rel=\"noopener\" href=\"EQ-MFC-7B\" target=\"_blank\"\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003cdiv\u003e\u003ca rel=\"noopener\" href=\"https:\/\/mtixtl.com\/products\/mfc-7b?_pos=1\u0026amp;_sid=c7caa82b5\u0026amp;_ss=r\" target=\"_blank\"\u003e\u003cimg style=\"float: none;\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/D07_a0558c6b-c6c6-4a2a-8292-086520ef4c40_100x100.jpg?v=1736277387\" alt=\"\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003cp\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca rel=\"noopener\" href=\"https:\/\/mtixtl.com\/products\/mfc-7b?_pos=1\u0026amp;_sid=c7caa82b5\u0026amp;_ss=r\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eNote: Other range MFC can be customized at extra cost upon request\u003c\/a\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 18.4669%;\"\u003eControlling Range:\u003cbr\u003e\n\u003cul\u003e\n\u003cli\u003eController 1: 1~199 SCCM\u003c\/li\u003e\n\u003cli\u003eController 2: 1~499 SCCM\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 24.9129%;\"\u003eControlling Range:\u003cbr\u003e\n\u003cul\u003e\n\u003cli\u003eController 1: 0~100 SCCM\u003c\/li\u003e\n\u003cli\u003eController 2: 1~199 SCCM \u003c\/li\u003e\n\u003cli\u003eController 3: 1~499 SCCM \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 18.4669%;\"\u003eControlling Range:\u003cbr\u003e\n\u003cul\u003e\n\u003cli\u003eController 1: 0~100 SCCM\u003c\/li\u003e\n\u003cli\u003eController 2: 1~199 SCCM\u003c\/li\u003e\n\u003cli\u003eController 3: 1~199 SCCM\u003c\/li\u003e\n\u003cli\u003eController 4: 1~499 SCCM\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 21.777%;\"\u003eSelect Range from below to make Customized 4 \u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca rel=\"noopener\" href=\"https:\/\/mtixtl.com\/products\/mfc-7b?_pos=1\u0026amp;_sid=c7caa82b5\u0026amp;_ss=r\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eto 9 Channels\u003c\/a\u003e:\u003c\/span\u003e\u003cbr\u003e\n\u003cul\u003e\n\u003cli\u003e0~100 SCCM\u003c\/li\u003e\n\u003cli\u003e1~200 SCCM\u003c\/li\u003e\n\u003cli\u003e1~500 SCCM\u003c\/li\u003e\n\u003cli\u003e1~1000 SCCM\u003c\/li\u003e\n\u003cli\u003e1~2000 SCCM\u003c\/li\u003e\n\u003cli\u003e1~5000 SCCM\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003eAccuracy, linearity, and repeatability\u003c\/td\u003e\n\u003ctd style=\"width: 83.6237%;\" colspan=\"4\"\u003eAccuracy: ±1.5%FS\u003cbr\u003eLinearity: ±1%FS\u003cbr\u003eRepeatability: ±0.2%FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003eWorking Temp and Pressure\u003c\/td\u003e\n\u003ctd style=\"width: 83.6237%;\" colspan=\"4\"\u003eWorking Temp. : 5~45 ºC \u003cbr\u003eMax. Pressure: 3x10\u003csup\u003e6 \u003c\/sup\u003ePa \u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003e\n\u003cp\u003eWorking Voltage\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 83.6237%;\" colspan=\"4\"\u003eAC 110 - 240V Single phase 50\/60Hz\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003e\n\u003cp\u003ePower\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 83.6237%;\" colspan=\"4\"\u003e23W\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003e\n\u003cp\u003e\u003cbr\u003ePLC Touch Screen\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 83.6237%;\" colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003e6\" color touch screen control panel to make parameter setting at easy.\u003c\/li\u003e\n\u003cli\u003eTouchscreen Control and \u003cstrong\u003ePC remote\u003c\/strong\u003e switchable, RS485 Port and a supplied software are included for remote operation by PC, not compatible with LabVIEW for now. \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003eMechanical Pressure Gauge\u003c\/td\u003e\n\u003ctd style=\"width: 83.6237%;\" colspan=\"4\"\u003e\n\u003cspan lang=\"EN-US\"\u003e Measurement\u003c\/span\u003e\u003cspan lang=\"EN-US\"\u003e Range: -\u003c\/span\u003e0.1~0.15 MPa \u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003eNeedle Valve\u003c\/td\u003e\n\u003ctd style=\"width: 83.6237%;\" colspan=\"4\"\u003e316 Stainless Steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003eGas Pipeline\n\u003cdiv\u003e\u003ca rel=\"noopener\" href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/DSC_0167.jpg?v=1706220025\" target=\"_blank\"\u003e\u003cimg style=\"margin-bottom: 16px; float: none;\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/DSC_0167_100x100.jpg?v=1706220025\" alt=\"\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 83.6237%;\" colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003eOne stainless steel gas mixing tank is built-in\u003c\/li\u003e\n\u003cli\u003eInternal pipeline: 1\/4\" O.D stainless steel and 1\/4\" O.D PTFE\u003c\/li\u003e\n\u003cli\u003eExternal pipeline: 1\/4\" O.D PTFE\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003eGas Mixing Tank\u003c\/td\u003e\n\u003ctd style=\"width: 83.6237%;\" colspan=\"4\"\u003eΦ\u003cspan lang=\"EN-US\"\u003e80X120mm\u003c\/span\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003e\n\u003cbr\u003eStop Valve \u0026amp; Fittings\u003c\/td\u003e\n\u003ctd style=\"width: 83.6237%;\" colspan=\"4\"\u003e316 stainless steel needle valve, \u003cbr\u003eΦ\u003cspan lang=\"EN-US\"\u003e1\/4” Swagelok Tube Fitting\u003c\/span\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003eDimensions\u003c\/td\u003e\n\u003ctd style=\"width: 83.6237%;\" colspan=\"4\"\u003e600mm(L) x 855mm(W) x 700mm(H)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003e\n\u003cdiv\u003eCompliance\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 83.6237%;\" colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003eAll components are CE certified\u003c\/li\u003e\n\u003cli\u003eThe unit can pass TUV(UL61010) or CSA certification at extra cost.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cstrong\u003e\u003cstrong\u003e\u003c\/strong\u003e\u003c\/strong\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003e\n\u003cdiv\u003eWarranty\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 83.6237%;\" colspan=\"4\"\u003eOne year limited with lifetime support\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003e\n\u003cdiv\u003eOxygen Monitoring\u003cbr\u003e\n\u003c\/div\u003e\n\u003cdiv\u003e\u003ca rel=\"noopener\" href=\"https:\/\/mtixtl.com\/products\/EQ-W1000-LD\" target=\"_blank\"\u003e\u003cimg style=\"margin-bottom: 16px; float: none;\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/W1000OxygenAnalyzer_181dd68a-d217-42a8-aa0c-93f18bf7c3e4_100x100.jpg?v=1736277748\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 83.6237%;\" colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003eAn Optional oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003e\n\u003cdiv\u003eApplication Note\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 83.6237%;\" colspan=\"4\"\u003e\n\u003cul\u003e\n\u003cli\u003eWaiting for 15 minutes to warm up the gas mixer and start your gas supply to charge.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 16.6911%;\" colspan=\"2\"\u003e\n\u003cdiv\u003eRelated Products\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 83.6237%;\" colspan=\"4\"\u003e\n\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca rel=\"noopener\" href=\"https:\/\/mtiecommerce.myshopify.com\/collections\/cvd-2\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eCVD \u0026amp; PECVD \u003c\/a\u003e\u003ca rel=\"noopener\" href=\"https:\/\/mtiecommerce.myshopify.com\/collections\/cvd-2\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eFurnace\u003c\/a\u003e\u003c\/span\u003e                          Click picture below to order bubbler or evaporator for CVD \u003cbr\u003e\n\u003cdiv\u003e\n\u003ca rel=\"noopener\" href=\"https:\/\/mtixtl.com\/collections\/cvd-2\" target=\"_blank\"\u003e\u003cimg style=\"margin-bottom: 16px; float: none;\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/TF_CATA_PECVD_100x100.jpg?v=1706135238\" alt=\"\"\u003e\u003c\/a\u003e       \u003cspan style=\"font-size: 0.875rem;\"\u003e \u003c\/span\u003e\u003cstrong style=\"font-size: 0.875rem;\"\u003e\u003cstrong\u003e           \u003ca rel=\"noopener\" href=\"https:\/\/mtimalaysia.com\/products\/BL-SS\" target=\"_blank\"\u003e\u003cimg height=\"43\" width=\"64\" alt=\"Stainless Steel Bubbler for CVD Liquid Precursors (150, 300, 600 or 1000ml) - BLSS\" src=\"https:\/\/mtimalaysia.com\/cdn\/shop\/files\/blss600main_00f8dab7-6e98-44c7-a626-94d9e9a1bd98.jpg?v=1764850602\u0026amp;width=3840\"\u003e\u003c\/a\u003e\u003c\/strong\u003e\u003c\/strong\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e         \u003ca rel=\"noopener\" href=\"https:\/\/mtimalaysia.com\/products\/LVD-F1\" target=\"_blank\"\u003e\u003cimg height=\"49\" width=\"73\" alt=\"Compact Liquid Vaporization Systems with Temperature and Pressure Control for CVD \u0026amp; DLCVD - LVD-F1\" src=\"https:\/\/mtimalaysia.com\/cdn\/shop\/files\/LVD-F1_Main_86f3fdf7-2c0c-4e15-ba0a-1e51a3d38ec0.jpg?v=1764850844\u0026amp;width=3840\"\u003e\u003c\/a\u003e\u003c\/span\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Two Channels","offer_id":44984812306571,"sku":"GSL2Z","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Three Channels","offer_id":44984812339339,"sku":"GSL3Z","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Four Channels","offer_id":44984812372107,"sku":"GSL4Z","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Five Channels","offer_id":44984812404875,"sku":"GSL5Z","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Six Channels","offer_id":44984812437643,"sku":"GSL6Z","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Seven Channels","offer_id":44984812470411,"sku":"GSL7Z","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Eight Channels","offer_id":44984812503179,"sku":"GSL8Z","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Nine Channels","offer_id":44984812535947,"sku":"GSL9Z","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/plcmfc.jpg?v=1764850851"},{"product_id":"gsl-3f-ss","title":"Gas Mixing Station with Three Channel Float Flowmeters and Valves - GSL-3F-SS","description":"The GSL-3F-SS is designed to mix and deliver 3 different gases to the MTI CVD system at a low cost. The system is installed in a heavy-duty mobile cart where a tube furnace can be placed on top of it. The flow rates are adjustable via three float flow meters. SPECIFICATIONS Flow rate A: 10 - 100 mL\/min B: 16 - 160 mL\/min C: 25 - 250 mL\/min Accuracy 4% F.S.) Diaphragm Pressure Gauge - 0.1 - 0.15 MPa (for gas mixing tank) Gas Mixing Tank SS304 Gas Schematics Three needle valves for three gas inlets One valve for a gas outlet Gas Inlets and Outlets 1\/4\" compression tube fittings 12' length 1\/4\" PTFE pipe is included for immediate use Dimenstions 600 mm (L) x 600 mm (W) x 650 mm ( H) Optionals CVD \u0026amp; PECVD Furnace Bubbler or evaporator for CVD Load limit 400 lbs\u003cbr\u003e\u003cbr\u003e\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eFlow rate\u003cbr\u003e\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eA: 10 - 100 mL\/min\u003c\/li\u003e\n\u003cli\u003eB: \u003ca href=\"eq-fm-160cc-rtp\" rel=\"noopener\" target=\"_blank\"\u003e16 - 160 mL\/min\u003c\/a\u003e\n\u003c\/li\u003e\n\u003cli\u003eC: 25 - 250 mL\/min\u003c\/li\u003e\n\u003cli\u003eAccuracy 4% F.S.)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDiaphragm Pressure Gauge \u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e-\u003cspan lang=\"ZH-CN\"\u003e0.1 \u003c\/span\u003e\u003cspan lang=\"ZH-CN\"\u003e- \u003c\/span\u003e\u003cspan lang=\"ZH-CN\"\u003e0.15 MPa (for gas mixing tank)\u003c\/span\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eGas Mixing Tank\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eSS304\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eGas Schematics\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eThree needle valves for three gas inlets\u003c\/li\u003e\n\u003cli\u003eOne valve for a gas outlet\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eGas Inlets and Outlets\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e1\/4\" compression tube fittings\u003c\/li\u003e\n\u003cli\u003e12' length 1\/4\" PTFE pipe is included for immediate use\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDimenstions\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e 600 mm (L) x 600 mm (W) x 650 mm ( H)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cbr\u003eOptionals\u003c\/td\u003e\n\u003ctd\u003e\n\u003ca href=\"https:\/\/mtixtl.com\/search?q=Tube+Furnaces+%281-+7+Zones%29+%3E+CVD+%26+PECVD+MIST-CVD+Furnaces\u0026amp;options%5Bprefix%5D=last\" rel=\"noopener\" target=\"_blank\"\u003eCVD \u0026amp; PECVD Furnace\u003c\/a\u003e Bubbler or evaporator for CVD \u003cbr\u003e\u003ca href=\"https:\/\/mtixtl.com\/search?q=Tube+Furnaces+%281-+7+Zones%29+%3E+CVD+%26+PECVD+MIST-CVD+Furnaces\u0026amp;options%5Bprefix%5D=last\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"52\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/TF_CATA_PECVD.jpg\" width=\"205\"\u003e\u003c\/a\u003e \u003cstrong\u003e        \u003ca href=\"lvd-f1\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" border=\"0\" height=\"53\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/LVD4.jpg\" title=\"\" width=\"72\"\u003e\u003c\/a\u003e\u003c\/strong\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLoad limit\u003c\/td\u003e\n\u003ctd\u003e400 lbs\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44984812765323,"sku":"GSL3F-SS","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/station.jpg?v=1764850852"},{"product_id":"cgm-2f","title":"Compact Two Channel Trace Gas Mixer (16 -160 ml\/m Flowmeter) - CGM-2F","description":"CGM-2F is a compact two-channel trace gas mixer for inert gas control in small tube furnaces, glove boxes, plasma cleaner, small PECVD system. This mixer regulates both line pressure and flow rate, and assures that you get the precise mixture at a lower cost and compact design. You can easily adapt this unit to most operations in atmospheric chambers. SPECIFICATIONS Floating Flow-meter Two Floating Flow-meter with flow rate range from 16 to 160 mL\/min Mix Tank One stainless steel mix tank built in for better gas mixing Mechanical Pressure Gauge (mixing tank) 0 - 1.0 MPa, ( 0.02 MPa\/ gri t) Fittings \u0026amp; Valves Three Pipe fittings for 1\/4\" pipe (nylon or stainless steel) Three vacuum needle valves made of SS304 Click the picture below-left to see the details of Mini CVD Tube Furnace with 2 channels Gas Mix System OTF-1200X-S50-2F\u003cbr\u003e\u003cbr\u003e\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eFloating Flow-meter\u003c\/td\u003e\n\u003ctd\u003eTwo Floating Flow-meter with flow rate range from 16 to 160 mL\/min\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMix Tank\u003c\/td\u003e\n\u003ctd\u003eOne stainless steel mix tank built in for better gas mixing\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMechanical Pressure Gauge (mixing tank)\u003c\/td\u003e\n\u003ctd\u003e0\u003cspan lang=\"ZH-CN\"\u003e -\u003c\/span\u003e\u003cspan lang=\"ZH-CN\"\u003e 1.0 MPa, \u003c\/span\u003e(\u003cspan lang=\"ZH-CN\"\u003e0.02 MPa\/\u003cspan lang=\"ZH-CN\"\u003egri\u003c\/span\u003e\u003c\/span\u003et)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFittings \u0026amp; Valves\u003c\/td\u003e\n\u003ctd\u003eThree Pipe fittings for 1\/4\" pipe (nylon or stainless steel)\u003cbr\u003eThree vacuum needle valves made of SS304\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/SAM_9714.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/SAM_9714_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\" title=\"Click to enlarge\"\u003e\u003c\/a\u003e    \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/tracemixerback.jpg\" rel=\"prettyPhoto[products]\" title=\"\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/tracemixerback_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\" title=\"Click to enlarge\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cbr\u003e\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"otf1200xsf2\" rel=\"noopener\" target=\"_blank\"\u003eClick the picture below-left to see the details of Mini CVD Tube Furnace with 2 channels Gas Mix System OTF-1200X-S50-2F\u003c\/a\u003e\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44984812961931,"sku":"CGM2F","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/SAM_9705_c1580782-5bf6-40d6-abd3-2bd4c527fab6.jpg?v=1764850852"},{"product_id":"gsl-3f-ptfe","title":"Anti-Corrosion Three Channel Gas Mixing Control Station Made of PTFE Parts - GSL-3F-PTFE","description":"GSL-3F-PTFE is a three-channel anti-corrosion gas mixing \u0026amp; delivery system. All parts coming in contact with gas are made of PTFE (e.g. valve, pipe, mixing tank, and flow meter). It is designed for delivering corrosive gases, such as hydrogen sulfide (H2S) and hydrogen selenide ( H2Se) for CVD processing.\u003cbr\u003e\u003cbr\u003e\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eFloating meter\u003c\/td\u003e\n\u003ctd\u003e\n\u003cp\u003e\u003cstrong\u003eThree anti-corrosive Floating Flow-meter made of PTFE material with s flowing rates of \u003c\/strong\u003e\u003cstrong\u003e10 - 1000 mL\/min.\u003cbr\u003e\u003c\/strong\u003e\u003c\/p\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PTFEflowmeter.jpg?v=1706240136\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PTFEflowmeter_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e  \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PTFEflowmeterBK.1.jpg?v=1706240136\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PTFEflowmeterBK.1_100x100.jpg\" style=\"float: none;\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eValves\u003c\/td\u003e\n\u003ctd\u003e Three needle valves made of PTFE material control gas outlet on the front panel\u003cbr\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/PolyfluortetraethylenePTFENeedleValve-EQ-NV-14NPSG-PTFE.aspx\"\u003e\u003c\/a\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\n\u003ca href=\"NV-14BSP-PTFE\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PTFE14NPSSwagelok.1_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e   \u003ca href=\"nv-14bsp-ptfe\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PTFENV14NPS_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e  \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-GSL-3F-PTFE_FrontPanel.jpg?v=1710899297\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-GSL-3F-PTFE_FrontPanel_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eGas Mixing Tank\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/mixerdrawingGSL3FPTFE.jpg\"\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/mixerdrawingGSL3FPTFE_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/div\u003e\n\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e 1000 mL gas tank made of PTFE\u003c\/li\u003e\n\u003cli\u003e Each channel gas will flow into the tank for mixing before flow-out\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePipe fitting\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cp\u003ePipe fitting made of PTFE and accepts 1\/4\" pipe (nylon or stainless steel)\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PTFETPiece.2.jpg?v=1706240136\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg border=\"0\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PTFETPiece.2_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\" title=\"\"\u003e\u003c\/a\u003e   \u003ca href=\"fit-14-ptfe\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg border=\"0\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PTFESwagelok_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\" title=\"\"\u003e\u003c\/a\u003e    \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-GSL-3F-PTFE_back.jpg\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-GSL-3F-PTFE_back_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003cbr\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003eThree Gas Inlet fittings (from gas tanks) are Installed on the right side of the cart\u003c\/li\u003e\n\u003cli\u003eTwo-channel gases flow into a gas mixer container and one gas channel-independent (please review manual for drawing)\u003c\/li\u003e\n\u003cli\u003eTwo gas outlet fittings (to tube furnace) are installed on the left side of the cart (one for mixing gas and one independent)\u003c\/li\u003e\n\u003cli\u003e12' length 1\/4\" PTFE pipe is included for immediate use\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMobile Station\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cdiv\u003eHeavy-duty Mobile Cart with four wheels and brake, where MTI small furnace can be put on the top\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-GSL-3F-PTFE_Dimension.jpg\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-GSL-3F-PTFE_Dimension_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003cbr\u003e\u003c\/a\u003eSize600 mm (L) x 600 mm (W) x 650 mm ( H)\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003eNet Weight: 160 Lb\u003c\/li\u003e\n\u003cli\u003eMax. loading weight: 500 Lb\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOxygen Monitoring\u003c\/td\u003e\n\u003ctd\u003eAn Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:\u003cbr\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\u003ca href=\"w1000\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQW1000FT_160x160.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eApplication Notes\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eIf your CVD processing involves corrosive gas, such as H2S, please consider using PTFE flange on your tube furnace\u003c\/li\u003e\n\u003cli\u003eAlso, please choose the anti-corrosion dry vacuum pump instead of an oil vacuum pump\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\n\u003ca href=\"fl60-ptfe\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PTFEFlangeFull_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e   \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PTFEfurnace.jpg?v=1706240137\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PTFEfurnace_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e    \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/AntiCorros1.jpg?v=1706209763\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/AntiCorros1_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e    \u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44984813748363,"sku":"GSL3F-PTFE","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/EQGSL3FPTFE_main_ad000616-760f-4da8-b875-935192d5dc9c.jpg?v=1764850853"},{"product_id":"cgm-3f-ptfe","title":"Three Channel Compact Anti-Corrosion Gas Mixer Made of PTFE (100 -1000 mL\/min) - CGM-3F-PTFE","description":"CGM-3F-PTFE is a compact three channel anti-corrosion gas mixing \u0026amp; delivery system, which can be put in a small fume-hood together with a tube furnace and be safer. All parts wetted with gas are made of PTFE (e.g. valve, pipe, mixing tank and flow-meter). It is designed for delivering corrosive gases, such as hydrogen sulfide (H2S) and hydrogen selenide ( H2Se) for CVD processing. SPECIFICATIONS Floating meter Three anti-corrosive Floating Flow-meter made of PTFE material with flow rates of 100 - 1000 mL\/min (0.1 - 1.0 L\/min) One Mechanical Pressure Gauge (mixing tank): 0 - 0.05 MPa, ( 0.02 MPa\/ gri t) Valve Three needle valves made of PTFE material which controls gas outlet on the front panel Gas Tank 500 mL gas tank made of PTFE A built-in gas mixing tank combines and mixes gases from three inlet channels. Pipe fitting Pipe fitting made of PTFE and accept 1\/4\" pipe (nylon or stainless steel) Three gas inlets with an independent gas flow meter for each channel. 20' length 1\/4\" PTFE pipe is included for immediate use Dimension Compact size: 340Lx300Dx 180H, mm ( 13.4\"x12\"x7\"). Net Weight: 16 Lb Shipping Shipping dimension: TBD Shipping weight: 50 lbs Warranty Two years limited with lifetime support Related Products CVD \u0026amp; PECVD Furnace Click picture below to order bubbler or evaporator for CVD Oxygen Monitoring An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more: Application Note If your CVD processing involves corrosive gas, such as H2S, please consider using PTFE flange on your tube furnace Also, please choose an anti-corrosion dry vacuum pump instead of an oil vacuum pump\u003cbr\u003e\u003cbr\u003e\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eFloating meter\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cstrong\u003eThree anti-corrosive Floating Flow-meter made of PTFE material with flow rates of 100 - 1000 mL\/min (0.1 - 1.0 L\/min)\u003cbr\u003e\u003c\/strong\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cul\u003e\n\u003cli\u003eOne Mechanical Pressure Gauge (mixing tank): 0\u003cspan lang=\"ZH-CN\"\u003e -\u003c\/span\u003e\u003cspan lang=\"ZH-CN\"\u003e 0.05 MPa, \u003c\/span\u003e(\u003cspan lang=\"ZH-CN\"\u003e0.02 MPa\/\u003cspan lang=\"ZH-CN\"\u003egri\u003c\/span\u003e\u003c\/span\u003et)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eValve\u003c\/td\u003e\n\u003ctd\u003e Three needle valves made of PTFE material which controls gas outlet on the front panel\u003cbr\u003e\u003cbr\u003e\u003ca href=\"nv-14bsp-ptfe\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg border=\"0\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PTFE14NPSSwagelok.1_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\" title=\"\"\u003e\u003c\/a\u003e     \u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eGas Tank\u003c\/td\u003e\n\u003ctd\u003e 500 mL gas tank made of PTFE\u003cbr\u003e A built-in gas mixing tank combines and mixes gases from three inlet channels.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePipe fitting\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cdiv\u003e\n\u003cp\u003ePipe fitting made of PTFE and accept 1\/4\" pipe (nylon or stainless steel)\u003c\/p\u003e\n\u003c\/div\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003ca href=\"fit-14-ptfe\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg border=\"0\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PTFESwagelok_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\" title=\"\"\u003e\u003c\/a\u003e      \u003ca href=\"tp1-ptfe\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg border=\"0\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PTFETPiece.2_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\" title=\"\"\u003e\u003c\/a\u003e\u003cbr\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003eThree gas inlets with an independent gas flow meter for each channel.\u003c\/li\u003e\n\u003cli\u003e20' length 1\/4\" PTFE pipe is included for immediate use\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDimension\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cdiv\u003eCompact size: 340Lx300Dx 180H, mm ( 13.4\"x12\"x7\").\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003eNet Weight: 16 Lb\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eShipping\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eShipping dimension: TBD\u003c\/li\u003e\n\u003cli\u003e\n\u003cdiv\u003eShipping weight: 50 lbs\u003c\/div\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eWarranty\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cp\u003eTwo years limited with lifetime support\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eRelated Products\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/mtixtl.com\/search?q=Tube+Furnaces+%281-+7+Zones%29+%3E+CVD+%26+PECVD+MIST-CVD+Furnaces\u0026amp;options%5Bprefix%5D=last\" rel=\"noopener\" target=\"_blank\"\u003eCVD \u0026amp; PECVD Furnace\u003c\/a\u003e\u003ca href=\"http:\/\/mtixtl.com\/tubefurnaceswithvacuumandgascontrolsystems.aspx\"\u003e\u003c\/a\u003e                     Click picture below to order bubbler or evaporator for CVD\u003cbr\u003e\u003cbr\u003e\u003ca href=\"https:\/\/mtixtl.com\/search?q=Tube+Furnaces+%281-+7+Zones%29+%3E+CVD+%26+PECVD+MIST-CVD+Furnaces\u0026amp;options%5Bprefix%5D=last\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/TF_CATA_PECVD_160x160.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e \u003cstrong\u003e                                                    \u003ca href=\"lvd-f1\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg border=\"0\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/LVD4_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\" title=\"\"\u003e\u003c\/a\u003e\u003c\/strong\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOxygen Monitoring\u003c\/td\u003e\n\u003ctd\u003eAn Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:\u003cbr\u003e\u003ca href=\"w1000\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQW1000FT_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eApplication Note\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eIf your CVD processing involves corrosive gas, such as H2S, please consider using PTFE flange on your tube furnace\u003c\/li\u003e\n\u003cli\u003eAlso, please choose an anti-corrosion dry vacuum pump instead of an oil vacuum pump\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\n\u003ca href=\"fl60-ptfe\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg border=\"0\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PTFEFlangeFull_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\" title=\"\"\u003e\u003c\/a\u003e        \u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44984814502027,"sku":"CGM3F-PTFE","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/3CPTFE_754e08d9-3425-4ec7-9093-2efa6146c00e.jpg?v=1764850854"},{"product_id":"mfc-com","title":"Computerized Mass Flow Controller (Max. 1000 SCCM) - MFC-COM","description":"MFC-A is a digital mass flow controller for MTI's CVD\/PECVD\/Graphene furnace to control the gas flowing rate for different research purposes. This product did not have a display, it must be controlled by the computer using manufacturer software. Digital Mass Flow Controller for Gas Control Systems Cost effective, High accuracy and fast response, Multi-gas, Auto-zero, Compatible interfaces. Used for accurately controlling and measuring the gas flow rate of high pressure. Ideal for CVD and other gas mixture applications. International standard DB15 pin fitting; connects to MTI Furnaces with Swagelok1\/4 fitting. Specification Full scale range (N 2 ) ( 0100,200,500,1000)SCCM Other range can be customized at extra cost, please email to info@mtixtl.com Accuracy ±1.0% S.P. (≥35% F.S.) ±0.35% F.S.(35% F.S.) Repeatability ±0.2% FS Linearity ±0.5% FS Response Time ≤1sec Valve Rest Position Normally Closed or Normally Open Temperature Coefficient Zero: ≤±0.05% F.S.\/ Span: ≤±0.1% F.S.≤30 SLM Span: ≤±0.2% F.S.30 SLM Zero Drift 0.6%F.S. per year without autozero Surface Finish(Ra) 25Ra Operation Temperature 545 Communication Interface for input Signal Digital: RS485 DeviceNet TM Analog:(05)VDC or (420)mA Communication Interface for Output Signal Digital: RS485 DeviceNet TM Analog:(05)VDC or (420)mA Power Supply ±11 ~ ±16 VDC or +11 ~ +28 VDC(400mA) Electronic Connector D-sub 9 pins male, D-sub 15 pins male, DeviceNet TM male Differential Pressure (0.050.35) Mpa≤ 10000SCCM (0.10.35) Mpa20000SCCM,30000SCCM (0.20.45) Mpa50000SCCM Max Pressure 3MPa Leak integrity 1×10 -9 atm·cc \/ sec He1×10 -10 Pa·m 3 \/ sec He Seals Materials Viton ; Neoprene Surface Chemistry (EP only) —— Fittings Swagelok1\/4” Weight 1kg\u003cbr\u003e\u003cbr\u003e\u003ctable align=\"left\" border=\"1\" cellpadding=\"0\" cellspacing=\"0\" class=\"MsoNormalTable\" style=\"border-width: medium; border-style: none; margin: auto 6.75pt; width: 754px; border-collapse: collapse; height: 562px;\"\u003e\u003ctbody\u003e\n\u003ctr style=\"height: 13.15pt;\"\u003e\n\u003ctd nowrap rowspan=\"1\" style=\"border-width: 1px; border-style: solid; border-color: windowtext; padding: 0cm 5.4pt; white-space: nowrap; letter-spacing: 0pt; word-spacing: 0pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan lang=\"EN-US\" style=\"color: black; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eFull scale range (N\u003csub\u003e2\u003c\/sub\u003e)\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: 1px; border-style: solid; border-color: #000000; padding: 0cm 5.4pt; white-space: nowrap; letter-spacing: 0pt; word-spacing: 0pt;\" width=\"382\"\u003e\n\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e( 0100,200,500,1000)SCCM\u003c\/span\u003e\u003c\/p\u003e\n\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eOther range can be customized at extra cost, please email to info@mtixtl.com\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 14.35pt;\"\u003e\n\u003ctd nowrap rowspan=\"2\" style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 14.35pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan lang=\"EN-US\" style=\"color: black; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eAccuracy\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 14.35pt;\" width=\"382\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e±1.0% S.P. (≥35% F.S.)\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 11.35pt;\"\u003e\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 11.35pt;\" width=\"382\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e±0.35% F.S.(35% F.S.)\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\u003c\/tr\u003e\n\u003ctr style=\"height: 15.55pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 15.55pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan lang=\"EN-US\" style=\"color: black; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eRepeatability\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 15.55pt;\" width=\"382\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e±0.2% FS\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 14.35pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 14.35pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan lang=\"EN-US\" style=\"color: black; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eLinearity\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 14.35pt;\" width=\"382\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e±0.5% FS\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 14.35pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 14.35pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan lang=\"EN-US\" style=\"color: black; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eResponse Time\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 14.35pt;\" width=\"382\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e≤1sec\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 13.15pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 13.15pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan lang=\"EN-US\" style=\"color: black; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eValve Rest Position\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 13.15pt;\" width=\"382\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eNormally Closed or Normally Open\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 13.15pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 13.15pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan lang=\"EN-US\" style=\"color: black; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eTemperature Coefficient\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 13.15pt;\" width=\"382\"\u003e\n\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eZero: ≤±0.05% F.S.\/\u003cspan lang=\"EN-US\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eSpan: ≤±0.1% F.S.≤30 SLM\u003cspan lang=\"EN-US\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eSpan: ≤±0.2% F.S.30 SLM\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 11.95pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 11.95pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan lang=\"EN-US\" style=\"color: black; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eZero Drift\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 11.95pt;\" width=\"382\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e0.6%F.S. per year without autozero\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 11.95pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 11.95pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan lang=\"EN-US\" style=\"color: black; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eSurface Finish(Ra)\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 11.95pt;\" width=\"382\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e25Ra\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 11.35pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 11.35pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eOperation Temperature\u003cspan lang=\"EN-US\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 11.35pt;\" width=\"382\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e545\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 10.75pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 10.75pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eCommunication Interface for input Signal\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 10.75pt;\" width=\"382\"\u003e\n\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eDigital: RS485\u003c\/span\u003e\u003c\/p\u003e\n\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eDeviceNet\u003csup\u003eTM\u003c\/sup\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eAnalog:(05)VDC or (420)mA\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 10.15pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 10.15pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eCommunication Interface for Output Signal\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 10.15pt;\" width=\"382\"\u003e\n\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eDigital: RS485\u003c\/span\u003e\u003c\/p\u003e\n\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eDeviceNet\u003csup\u003eTM\u003c\/sup\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eAnalog:(05)VDC or (420)mA\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 9.55pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 9.55pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003ePower Supply\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 9.55pt;\" width=\"382\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e±11 ~ ±16 VDC or +11 ~ +28 VDC(400mA)\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 8.95pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 8.95pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eElectronic Connector\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 8.95pt;\" width=\"382\"\u003e\n\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eD-sub 9 pins male, D-sub 15 pins male,\u003c\/span\u003e\u003c\/p\u003e\n\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eDeviceNet\u003csup\u003eTM\u003c\/sup\u003e male\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 24.55pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 24.55pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan lang=\"EN-US\" style=\"color: black; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eDifferential Pressure\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 24.55pt;\" width=\"382\"\u003e\n\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e(0.050.35) Mpa≤\u003cspan lang=\"EN-US\"\u003e10000SCCM\u003c\/span\u003e\u003cspan lang=\"EN-US\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e(0.10.35) Mpa20000SCCM,30000SCCM\u003cspan lang=\"EN-US\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e(0.20.45) Mpa50000SCCM\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 15.55pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 15.55pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eMax Pressure\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 15.55pt;\" width=\"382\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e3MPa\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 15.55pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 15.55pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan lang=\"EN-US\" style=\"color: black; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eLeak integrity\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 15.55pt;\" width=\"382\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e1×10\u003csup\u003e-9\u003c\/sup\u003e atm·cc \/ sec He1×10\u003csup\u003e-10\u003c\/sup\u003e Pa·m\u003csup\u003e3\u003c\/sup\u003e \/ sec He\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 14.35pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 14.35pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan lang=\"EN-US\" style=\"color: black; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eSeals Materials\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 14.35pt;\" width=\"382\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eViton\u003cspan lang=\"EN-US\"\u003e; Neoprene\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 13.15pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 13.15pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan lang=\"EN-US\" style=\"color: black; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eSurface Chemistry (EP only)\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 13.15pt;\" width=\"382\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e——\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 13.15pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 13.15pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan lang=\"EN-US\" style=\"color: black; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eFittings\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 13.15pt;\" width=\"382\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eSwagelok1\/4”\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 12.65pt;\"\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt; border-style: none solid solid; border-color: #ebe9ed windowtext windowtext; padding: 0cm 5.4pt; background-color: transparent; width: 132.95pt; height: 12.65pt;\" width=\"177\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan lang=\"EN-US\" style=\"color: black; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eWeight\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003ctd nowrap style=\"border-width: medium 1pt 1pt medium; border-style: none solid solid none; border-color: #ebe9ed windowtext windowtext #ebe9ed; padding: 0cm 5.4pt; background-color: transparent; width: 286.45pt; height: 12.65pt;\" width=\"382\"\u003e\u003cp align=\"center\" class=\"MsoNormal\" style=\"text-align: center; margin: 0cm 0cm 0pt;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e1kg\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\u003c\/table\u003e","brand":"MTI","offers":[{"title":"0-100 SCCM","offer_id":44984815288459,"sku":"EQ-MFC100A","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"0-200 SCCM","offer_id":44984815321227,"sku":"EQ-MFC200A","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"0-500 SCCM","offer_id":44984815353995,"sku":"EQ-MFC500A","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"0-1000 SCCM","offer_id":44984815386763,"sku":"EQ-MFC1000A","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/Untitled1.3_f053ba9f-d318-4da3-aa94-a8ed678b0451.jpg?v=1764850854"},{"product_id":"mfc-7b","title":"N2 equivalent Mass Flow Controller upto 5000sccm (NO display, Product for Replacement only) - MFC-7B","description":"EQ-MFC-7B is a cost effective MFC for MTI's CVD\/PECVD\/Graphene furnace to control the gas flowing rate for different research purposes. MFC are standard calibrated by N2 while it is out of factory, other gas calibration can be approximated by converting of conversion factors of our instruction, Other gas calibration MFC can be ordered upon request, please email us for the price, the lead time is 8 -10weeks after PO. Mass Flow Controller for the use in MTI Multiple Channel Gas Control Systems only Ideal for vacuum coating and other gas mixture applications. International standard DB15 pin fitting; connects to MTI Furnaces with Swagelok1\/4 fitting Note This MFC is for replacement of MTI gas mixing and delivery system at related product below. In order to operate it independently, you need order MFC-COM Specification Full scale range (N 2 ) ( 0100,200, 500, 1000, 2000, 5000)SCCM Other range can be customized at extra cost, please email to info@mtixtl.com Accuracy ±1.5% F.S. Repeatability ±0.2% FS Linearity ±1% FS Response Time ≤10sec Valve Configuration Normally Closed Operation Temperature 545 Input Signal (05) VDC Output Signal (05) VDC Power Supply +15V 50mA; -15V 200mA Electronic Connector D sub 15 pins male Differential Pressure (0.10.5) Mpa Max Pressure 3MPa Leak integrity 1×10 -8 atm·cc \/ sec He Seals Materials Viton ; Neoprene Fittings Swagelok1\/4” Weight 1.1kg\u003cbr\u003e\u003cbr\u003e\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd nowrap rowspan=\"1\"\u003e\n\u003cp\u003e\u003cspan lang=\"EN-US\"\u003eFull scale range (N\u003csub\u003e2\u003c\/sub\u003e)\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e( 0100,200, 500, 1000, 2000, 5000)SCCM\u003c\/p\u003e\n\u003cp\u003eOther range can be customized at extra cost, please email to info@mtixtl.com\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd nowrap rowspan=\"1\"\u003e\n\u003cp\u003e\u003cspan lang=\"EN-US\"\u003eAccuracy\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e±1.5% F.S.\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e\u003cspan lang=\"EN-US\"\u003eRepeatability\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e±0.2% FS\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e\u003cspan lang=\"EN-US\"\u003eLinearity\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e±1% FS\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e\u003cspan lang=\"EN-US\"\u003eResponse Time\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e≤10sec\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e\u003cspan lang=\"EN-US\"\u003eValve Configuration\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003eNormally Closed\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003eOperation Temperature\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e545\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eInput Signal\u003c\/td\u003e\n\u003ctd\u003e(05) VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOutput Signal\u003c\/td\u003e\n\u003ctd\u003e(05) VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003ePower Supply\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e+15V 50mA; -15V 200mA\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003eElectronic Connector\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e D sub 15 pins male\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e\u003cspan lang=\"EN-US\"\u003eDifferential Pressure\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e(0.10.5) Mpa\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003eMax Pressure\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e3MPa\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e\u003cspan lang=\"EN-US\"\u003eLeak integrity\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e1×10\u003csup\u003e-8\u003c\/sup\u003e atm·cc \/ sec He\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e\u003cspan lang=\"EN-US\"\u003eSeals Materials\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003eViton\u003cspan lang=\"EN-US\"\u003e; Neoprene\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e\u003cspan lang=\"EN-US\"\u003eFittings\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003eSwagelok1\/4”\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e\u003cspan lang=\"EN-US\"\u003eWeight\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd nowrap\u003e\n\u003cp\u003e1.1kg\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"0-100 sccm","offer_id":44984815419531,"sku":"MFC7B100","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"0-200 sccm","offer_id":44984815452299,"sku":"MFC7B200","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"0-500 sccm","offer_id":44984815485067,"sku":"MFC7B500","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"0-1000 sccm","offer_id":44984815517835,"sku":"MFC7B1000","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"0-2000 sccm","offer_id":44984815550603,"sku":"EQ-MFC-7B-2000","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"0-5000 sccm","offer_id":44984815583371,"sku":"EQ-MFC-7B-5000","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/D07_db82c592-808e-4934-9f03-a2e567389b8b.jpg?v=1764850855"}],"url":"https:\/\/mti-indonesia.com\/collections\/gas-mixing-systems.oembed","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}