{"title":"Vapor Phase Coating","description":"","products":[{"product_id":"ald800x4pe","title":"800°C Plasma Enhanced Atomic Layer Deposition (PEALD) System W\/ 4\" Rotary Stage - ALD-800X-4-PE","description":"ALD-800X-4-PE is a compact plasma-enhanced atomic layer deposition (PE-ALD) system with five high-frequency valves, 4\" shower head, and rotary heatable sample stage, and a 300 W RF generator. The PE-ALD processes can be realized by the screen panel control system and laptop software control system. This PE-ALD has several advantages, such as a wide range of precursor selection and operation temperature windows (especially good for heat-sensitive material at low temperatures), uniform coating with rotary stage, and low cost. SPECIFICATIONS: Power 208 - 240VAC, single phase, 50\/60 Hz 9.5 kW total (required for all heating parts and plasma to work properly) Control Panel All processing parameters of ALD are controlled by PLC via a 6\" touch screen panel, including vapor pulse time, inert gas flow rate, temperature for heating bubbler and belt, and rotation speed of sample stage 13.56MHZ, 100W max. RF plasma power and auto-matching High-frequency ALD valves were used to control pulse duration interval with micro-second precision Control two channels of gas delivery with ±0.2%F.S via MFC Adjust vacuum pressure by controlling the gas flow rate Other parameters upon request of the customer Please click the picture left to see the control interface ALD valve One frequency ALD valve Max. frequency on\/off: 283 HZ Min. Pulse time: 10 ms Can deliver drying gas or liquid-vapor Shower Head Material: Aluminium or Stainless steel 4\" shower head with 0.5 mm holes 1\/4\" dia. tube for gas or vapor inlet which connects to ALD valve Special design for uniform distribution of gas or vaper Sample Stage 4\" diameter rotary and heatable sample stage Speed: 0 - 5 RPM adjustable via the control panel Temperature: Although the operating temperature can be up to as high as 800 , please limit the working temperature \u0026lt; 550 (+\/- 5 accuracy) due to precursor deposition issue. Substrate size to be coated: 100 mm in diameter. Chamber Quartz glass tube, 165 mm OD. X 150 mm ID x 250 mm Height Please click here to order the Quartz Chamber replacement. SS 304 flanges to ensure the vacuum level: 10-5 torr by turbopump and 10-2 by the mechanical pump KF 25 vacuum port is built-in Heatable Bubbler Two 150 ml Heatable bubblers with temperature controllers are included for carrying precursors To precisely control the precursor pressure in the bubbler, the gauge of PGC-554-LD is highly recommended. Vacuum Pump ( optional) A vacuum pump is not included, suggest you order a dry pump for the CVD process by click the picture below Compliance CE certified and NRTLor CSA certification is available upon request at an extra cost.\u003cbr\u003e\u003cbr\u003e\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003ePower\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e208 - 240VAC, single phase, 50\/60 Hz\u003c\/li\u003e\n\u003cli\u003e9.5 kW total (required for all heating parts and plasma to work properly)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eControl Panel\u003c\/p\u003e\n\u003cp\u003e \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ALD-800X-4-PE-interface.jpg?v=1706209677\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ALD-800X-4-PE-interface_100x100.jpg\" style=\"float: none;\"\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eAll processing parameters of ALD are controlled by PLC via a 6\" touch screen panel, including vapor pulse time, inert gas flow rate, temperature for heating bubbler and belt, and rotation speed of sample stage \u003c\/li\u003e\n\u003cli\u003e13.56MHZ, 100W max. RF plasma power and auto-matching\u003c\/li\u003e\n\u003cli\u003eHigh-frequency ALD valves were used to control pulse duration interval with micro-second precision\u003c\/li\u003e\n\u003cli\u003eControl two channels of gas delivery with ±0.2%F.S via MFC\u003c\/li\u003e\n\u003cli\u003eAdjust vacuum pressure by controlling the gas flow rate \u003c\/li\u003e\n\u003cli\u003eOther parameters upon request of the customer\u003c\/li\u003e\n\u003cli\u003ePlease click the picture left to see the control interface\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv style=\"text-align: start;\"\u003eALD valve\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ALDValve.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ALDValve_100x100.png\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ALDValve.png\" rel=\"lightbox\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eOne frequency ALD valve\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eMax. frequency on\/off: 283 HZ\u003c\/li\u003e\n\u003cli\u003eMin. Pulse time: 10 ms\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eCan deliver drying gas or liquid-vapor\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv style=\"text-align: start;\"\u003eShower Head\u003cbr\u003e\u003ca href=\"SH-4\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg border=\"0\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/4showerhead_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\" title=\"\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/shower-headsketch.png?v=1706238372\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/shower-headsketch_100x100.png\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eMaterial: Aluminium or Stainless steel\u003c\/li\u003e\n\u003cli\u003e4\" shower head with 0.5 mm holes\u003c\/li\u003e\n\u003cli\u003e1\/4\" dia. tube for gas or vapor inlet which connects to ALD valve\u003c\/li\u003e\n\u003cli\u003eSpecial design for uniform distribution of gas or vaper\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/shower_head_adjustment.png?v=1746047746\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/shower_head_adjustment_160x160.png?v=1746047746\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003ca class=\"MagicThumb\" href=\"https:\/\/mti-kjgroup.com\/images\/shower%20head%20adjustment.png\" id=\"mt-1243116466434\"\u003e\u003c\/a\u003e \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv style=\"text-align: start;\"\u003eSample Stage\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PEALD.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PEALD_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e4\" diameter rotary and heatable sample stage\u003c\/li\u003e\n\u003cli\u003eSpeed: 0 - 5 RPM adjustable via the control panel\u003c\/li\u003e\n\u003cli\u003eTemperature: Although the operating temperature can be up to as high as 800 , please limit the working temperature \u0026lt; 550 (+\/- 5 accuracy) due to precursor deposition issue.  \u003c\/li\u003e\n\u003cli\u003eSubstrate size to be coated: 100 mm in diameter.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eChamber\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GSL-1700X-SPC-2_ChamberDimension.jpg\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GSL-1700X-SPC-2_ChamberDimension_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eQuartz glass tube, 165 mm OD. X 150 mm ID x 250 mm Height\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003ePlease \u003ca href=\"vtc-gc\" rel=\"noopener\" target=\"_blank\"\u003eclick here\u003c\/a\u003e to order the Quartz Chamber replacement.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eSS 304 flanges to ensure the vacuum level: 10-5 torr by turbopump and 10-2 by the mechanical pump\u003c\/li\u003e\n\u003cli\u003eKF 25 vacuum port is built-in\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeatable Bubbler\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eTwo 150 ml Heatable bubblers with temperature controllers are included for carrying precursors\u003c\/li\u003e\n\u003cli\u003e\u003cstrong\u003e\u003ca href=\"bl-ss\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/bubbler082014_100x100.jpg?v=1706056869\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e      \u003ca href=\"hc-bl\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg border=\"0\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQHCBL.4_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\" title=\"\"\u003e\u003c\/a\u003e\u003c\/strong\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003eTo precisely control the precursor pressure in the bubbler, the gauge of \u003ca href=\"pgc554ld\" rel=\"noopener\" target=\"_blank\"\u003ePGC-554-LD\u003c\/a\u003e is highly recommended.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cstrong\u003e\u003cspan\u003e              \u003c\/span\u003e\u003ca href=\"pgc554ld\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/1.25_100x100.jpg?v=1740422737\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/mti-kjgroup.com\/Anti-CorrosiveCapacitanceDiaphragmGaugewithPowerSupply-EQ-PCG-554.aspx\"\u003e\u003c\/a\u003e\u003c\/strong\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eVacuum Pump \u003cbr\u003e( optional)\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eA vacuum pump is not included, suggest you order a dry pump for the CVD process by click the picture below\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eCompliance\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003eCE certified and NRTLor CSA certification is available upon request at an extra cost.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44984806178955,"sku":"ALD800X4PE","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/IMG_2201_fc74ca9f-0132-4b76-a8bc-8b464f43e343.jpg?v=1764850831"},{"product_id":"vtc-3rf","title":"3 Heads 1\" RF Plasma Magnetron Sputtering Coater, with DC Magnetron Sputtering Option - VTC-3RF","description":"\u003cp\u003eVTC-3RF is a three head 1\" RF Plasma magnetron sputtering system designed for non-metallic thin film coating, mainly for multilayer oxide thin films. It is the most cost-effective coater for researching in the new generation of oxide thin films. DC magnetron sputtering option is available upon request for metallic film deposition, enabling three DC, one RF \/ two DC, and two RF \/ one DC sputtering head configurations.\u003c\/p\u003e\n\u003cp\u003e \u003cstrong\u003eSPECIFICATIONS\u003c\/strong\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003ctable cellspacing=\"0\" cellpadding=\"1\" border=\"1\" style=\"font-size: 0.875rem;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eInput Power\u003cbr\u003e\u003ca rel=\"noopener\" href=\"TF-220110-1000-LD\" target=\"_blank\"\u003e\u003cimg width=\"68\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/NEW.AC3000Title.jpg\" height=\"45\" alt=\"\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eSingle-phase 220VAC +\/- 10%, 50 \/ 60 Hz\u003c\/li\u003e\n\u003cli\u003e1000 W (including a vacuum pump and water chiller)\u003c\/li\u003e\n\u003cli\u003eIf the voltage is 110 V, a 1500 W transformer can be ordered at MTI (Click the picture to the left for detail)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePower Source\u003cbr\u003e\u003ca rel=\"noopener\" href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Power_Source.jpg?v=1706240110\" target=\"_blank\"\u003e\u003cimg width=\"120\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Power_Source.jpg?v=1706240110\" alt=\"\"\u003e\u003c\/a\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e13.5 MHz, 100 W RF generator with manual matching is included and connected to the sputtering heads\u003c\/li\u003e\n\u003cli\u003eContinuous working time:\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003e100W: ≤ 1 hour\u003c\/li\u003e\n\u003cli\u003e80W: ≤ 1.5 hours\u003c\/li\u003e\n\u003cli\u003e70W: ≤ 2 hours\u003c\/li\u003e\n\u003cli\u003e60W: ≤ 4 hours\u003c\/li\u003e\n\u003cli\u003e50W: ≤ 8 hours\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eLoad range: 0 – 80 adjustable. Tuning range: -200j – 200j adjustable\u003c\/li\u003e\n\u003cli\u003eThe rotatable switch can activate one sputtering head at a time. Sputtering heads can be switched “in the plasma” (no breaking of vacuum and plasma during a multilayer process)\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWith a DC power supply, the coater can be easily modified into 1” DC sputtering sources for metallic film deposition, enabling three DC, one RF \/ two DC, and two RF \/ one DC sputtering head configurations\u003c\/strong\u003e (Bottom left picture. Please select from the Product Options)\u003c\/li\u003e\n\u003cli\u003eOptional 300 W auto-match RF generator is available at extra cost (Click the bottom right picture for detail )\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003ca rel=\"noopener\" href=\"DC-500-LD\" target=\"_blank\"\u003e\u003cimg width=\"90\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC600.jpg\" height=\"60\" alt=\"\"\u003e\u003c\/a\u003e 500 W DC Power Supply  \u003c\/p\u003e\n\u003cp\u003e   \u003ca href=\"https:\/\/mtimalaysia.com\/products\/RF-300I-LD\" target=\"_blank\" rel=\"noopener\"\u003e\u003cimg src=\"https:\/\/mtimalaysia.com\/cdn\/shop\/files\/DSC_6670.1_62f05e2e-79b2-4c2d-a04e-b8f86cc99ede.jpg?v=1764850746\u0026amp;width=3840\" alt=\"Compact RF Generator 13.56 MHz 300W with Auto Matching Network for DIY RF Sputtering - RF-300I-LD\" width=\"89\" height=\"60\"\u003e\u003c\/a\u003e\u003cbr\u003e300 W RF Power Supply   \u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eMagnetron Sputtering Head\u003cbr\u003e\u003ca rel=\"noopener\" href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC3RF13.jpg\" target=\"_blank\"\u003e\u003cimg width=\"90\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC3RF13.jpg\" height=\"60\" alt=\"\"\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eThree 1\" magnetron sputtering heads with water cooling jackets (Click Pic #1 for detail information) are included and inserted into quartz chamber via quick clamps\u003c\/li\u003e\n\u003cli\u003eRF cable replacement can be purchased at MTI (Click Pic #2 for detail information)\u003c\/li\u003e\n\u003cli\u003eOne manually operated shutter is built on the flange (See Pic #3)\u003c\/li\u003e\n\u003cli\u003e10 L\/min recirculating water chiller is included for cooling sputtering heads (Click Pic #4 for detail )\u003c\/li\u003e\n\u003c\/ul\u003e\n \u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eSputtering Target\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eTarget size requirement: 1\" diameter x 1\/8\" thickness max\u003c\/li\u003e\n\u003cli\u003eSputtering distance range: 50 – 80 mm adjustable\u003c\/li\u003e\n\u003cli\u003eSputtering angle range: 0 – 25° adjustable \u003c\/li\u003e\n\u003cli\u003e1\" diameter Cu target and Al\u003csub\u003e2\u003c\/sub\u003eO\u003csub\u003e3\u003c\/sub\u003e target are included for demo testing\u003c\/li\u003e\n\u003cli\u003eVarious oxide 1” sputtering targets are available upon request at extra cost\u003c\/li\u003e\n\u003cli\u003eFor target bonding, 1 mm and 2 mm copper backing plates are included. Silver epoxy (Pic #1) and extra copper backing plates (Pic #2) can be ordered at MTI\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eVacuum Chamber\u003cbr\u003e\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eVacuum chamber: 256 mm OD x 238 mm ID x 276 mm Height, made of high purity quartz\u003c\/li\u003e\n\u003cli\u003eSealing flange: 274 mm Dia. made of Aluminum with high-temperature silicone O-ring\u003c\/li\u003e\n\u003cli\u003eStainless steel shield cage is included for 100% shielding of RF radiation from the chamber\u003c\/li\u003e\n\u003cli\u003eMax vacuum level: 1.0E-5 Torr with optional turbopump and chamber baking \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eSample Holder\u003cbr\u003e\u003ca rel=\"noopener\" href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/sampleholder.1.png\" target=\"_blank\"\u003e\u003cimg width=\"95\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/sampleholder.1.png\" height=\"60\" alt=\"\"\u003e\u003c\/a\u003e\u003ca rel=\"noopener\" href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/123.2.jpg\" target=\"_blank\"\u003e\u003cimg width=\"72\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/123.2.jpg\" height=\"60\" alt=\"\"\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eThe sample holder is a rotatable and heatable stage made of the ceramic heater with stainless steel cover\u003c\/li\u003e\n\u003cli\u003eSample holder size: 50 mm Dia. for. 2\" wafer max (See picture below)\u003c\/li\u003e\n\u003cli\u003eRotation speed: 1 - 10 rpm adjustable for uniform coating\u003c\/li\u003e\n\u003cli\u003eThe holder temperature is adjustable from RT to 600 °C max (5 min max at 600 °C; 2 hr max at 500 °C) with accuracy +\/- 1.0 °C via a digital temperature controller\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eVacuum Pump \u003cbr\u003e\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eKF40 vacuum port is built-in for connecting to a vacuum pump.\u003c\/li\u003e\n\u003cli\u003eVacuum level: 1.0E-2 Torr with included dual-stage mechanical pump (Click the picture on the left)\u003c\/li\u003e\n\u003cli\u003e1.0E-5 Torr with optional turbopump (Click the picture 1-2)\u003c\/li\u003e\n\u003cli\u003eVacuum level: 1.0E-2 Torr with dual-stage mechanical pump and 1.0E-5 Torr with the turbopump\u003c\/li\u003e\n\u003cli\u003eThe 1 PPm ga purification system may be used to replace turbopump to get a more clean chamber (Pic.3)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ca rel=\"noopener\" href=\"FYP-Pump\" target=\"_blank\"\u003e\u003cimg width=\"81\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQFYPmain.1.1.jpg\" height=\"54\" alt=\"\"\u003e\u003c\/a\u003e    \u003ca rel=\"noopener\" href=\"PV-HVS-LD\" target=\"_blank\"\u003e\u003cimg width=\"74\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PfeifferVacuumPumpEco_TUV.jpg\" height=\"49\" alt=\"\"\u003e\u003c\/a\u003e \u003ca rel=\"noopener\" href=\"RMP-LD\" target=\"_blank\"\u003e\u003cimg width=\"72\" title=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/IMG_2617-02.2.jpg\" height=\"48\" border=\"0\" alt=\"\"\u003e\u003c\/a\u003e Pic. 3\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOptional\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003ePrecision quartz thickness sensor is optional. It can be built into the chamber to monitor coating thickness with an accuracy of 0.1 Å (water cooling required) \u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eEasy USB connection to PC for remote thickness and coating speed monitoring\u003c\/li\u003e\n\u003cli\u003e5 pcs quartz sensors (consumable) are included \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eRemote PC control of the temperature controller is optional \u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eEasy USB connection to PC for remote temperature control\u003c\/li\u003e\n\u003cli\u003eTemperature control software is included. The module is compatible with LabView\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eFor DC magnetron sputtering, turbopump is recommended \u003c\/li\u003e\n\u003cli\u003eReactive sputtering with N\u003csub\u003e2\u003c\/sub\u003e or O\u003csub\u003e2\u003c\/sub\u003e is available with optional gas mixing control station\u003c\/li\u003e\n\u003cli\u003eThe coater can be modified into a powder coating \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ca rel=\"noopener\" href=\"TM106-LD\" target=\"_blank\"\u003e\u003cimg width=\"90\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQTM106.5.jpg\" height=\"60\" alt=\"\"\u003e\u003c\/a\u003e\u003ca href=\"..\/..\/..\/Film-thickness-controller.aspx\"\u003e \u003c\/a\u003ePic. 1 \u003cspan style=\"font-size: 0.875rem;\"\u003e \u003ca rel=\"noopener\" href=\"VTC-3HD-VP\" target=\"_blank\"\u003e\u003cimg width=\"94\" title=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-3-RF-GP.jpg\" height=\"62\" border=\"0\" alt=\"\"\u003e\u003c\/a\u003ePic. 2\u003c\/span\u003e\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eCompliance\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eCE approval\u003c\/li\u003e\n\u003cli\u003eNRTL or CSA is NOT available temporarily.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eApplication Notes\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eThis compact 1\" RF magnetron sputtering coater is designed for coating oxide thin films on oxide single crystal substrates, which usually does not need high vacuum set-up\u003c\/li\u003e\n\u003cli\u003eA two-stage pressure regulator (not included) should be installed on the gas cylinder to limit the output pressure of the gas to below 0.02 MPa for safe usage. Please use \u0026gt; 5N purity Ar gas for plasma sputtering\u003c\/li\u003e\n\u003cli\u003eFor the best film-substrate adhesion strength, please clean the substrate surface before coating:\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eUltrasonic cleaning with the following sequential baths - (1) acetone, (2) isopropyl alcohol - to remove oil and grease. Blow-dry the substrate with N2, then hot bake in vacuum to remove absorbed moisture\u003c\/li\u003e\n\u003cli\u003ePlasma cleaning may be needed for surface roughening, surface chemical bonds activation, or additional contamination removal\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003cul\u003e\n\u003cli\u003eFor best performance, the non-conductive targets must be installed with a copper backing plate. Please refer to the instruction video below (#3) for target bonding\u003c\/li\u003e\n\u003cli\u003eMTI supplies single crystal substrate from A to Z \u003c\/li\u003e\n\u003cli\u003eMTI RF Plasma Sputtering Coaters have successfully coated ZnO on Al\u003csub\u003e2\u003c\/sub\u003eO\u003csub\u003e3\u003c\/sub\u003e substrate at 500 °C \u003c\/li\u003e\n\u003cli style=\"color: rgb(255, 42, 0);\"\u003e\n\u003cspan\u003eHIGH VOLTAGE! Sputtering heads connect to high voltage. For safety, the operator must shut down the RF generator before sample loading and target changing operations\u003c\/span\u003e\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"RF \/ DC Sputtering","offer_id":44985185042571,"sku":"VTC1RFDC","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"RF Sputtering ONLY","offer_id":44985185075339,"sku":"VTC1RF3","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"DC Sputtering ONLY","offer_id":44985185108107,"sku":"VTC1DC3","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/VTC3RF11.1.1_10acfac0-cbdb-48ef-ab51-799c9f6b5747.jpg?v=1764855086"},{"product_id":"vtc-3hd-vp","title":"3 Heads RF\/DC Plasma Sputtering Coater for Powders with 1 PPM Gas Purification System - VTC-3HD-VP","description":"\u003cp\u003eVTC-3HD-VP is a three-head 1\" RF Plasma magnetron sputtering system designed for powder coating to form various core cells structure. DC and RF power sources are included for coating both metallic and insulation material. The vibration sample holder is built inside the chamber to make powder jumping during the coating, and the gas purification system is used to replace turbopump and provide O2 and H2O less than 1 ppm environmental fro better quality coating.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eSPECIFICATIONS\u003c\/strong\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003ctable border=\"1\" cellpadding=\"1\" cellspacing=\"0\" style=\"font-size: 0.875rem;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eInput Power\u003cbr\u003e\u003ca href=\"TF-220110-3000-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" border=\"0\" height=\"51\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/thumb_300wtransf1.jpg?v=1706297430\" title=\"\" width=\"73\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eSingle-phase 220VAC +\/- 10%, 50 \/ 60 Hz\u003c\/li\u003e\n\u003cli\u003e2000 W (including a vacuum pump and water chiller)\u003c\/li\u003e\n\u003cli\u003eIf the voltage is 110 V, a 3000 W transformer can be ordered at MTI (Click the picture to the left for detail)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eSource Power\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC6002HDdischarging.png?v=1706229092\" rel=\"prettyPhoto[products]\" title=\"\"\u003e\u003cbr\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eThree sputtering power sources are integrated into one control box (Click picture below to see detailed specs)\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eDC source: 500 W power for coating metallic materials (Pic 1)\u003c\/li\u003e\n\u003cli\u003eRF source: 300 W power, 13.56 MHz frequency for coating non-conductive materials (Pic 2)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003ca href=\"DC-500-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"51\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC600.jpg\" width=\"77\"\u003e\u003c\/a\u003e -- Pic 1 \u003ca href=\"RF-300I-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/DSC_6670.1.jpg\" width=\"74\"\u003e\u003c\/a\u003e -- Pic 2\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eMagnetron Sputtering Head\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003eThree 1\" magnetron sputtering heads with water cooling jackets are included and inserted into the quartz chamber via quick clamps\u003c\/li\u003e\n\u003cli\u003eRF cable replacement can be purchased at MTI \u003c\/li\u003e\n\u003cli\u003eOne manually operated shutter is built on the flange \u003c\/li\u003e\n\u003cli\u003e16 L\/min recirculating water chiller is included for cooling sputtering heads \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ca href=\"KJ5000\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" border=\"0\" height=\"59\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/CW5000DIfu2.1.jpg\" title=\"\" width=\"89\"\u003e\u003c\/a\u003ePic. 1\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eSputtering Target\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eTarget size requirement: 1\" diameter x 1\/8\" thickness max\u003c\/li\u003e\n\u003cli\u003eSputtering distance range: 50 – 80 mm adjustable\u003c\/li\u003e\n\u003cli\u003eSputtering angle range: 0 – 25° adjustable \u003c\/li\u003e\n\u003cli\u003e1\" diameter Cu target and Al\u003csub\u003e2\u003c\/sub\u003eO\u003csub\u003e3\u003c\/sub\u003e target are included for demo testing\u003c\/li\u003e\n\u003cli\u003eVarious oxide 1” sputtering targets are available upon request at extra cost\u003c\/li\u003e\n\u003cli\u003eFor target bonding, 1 mm and 2 mm copper backing plates are included. Silver epoxy and extra copper backing plates  can be ordered at MTI\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eVacuum Chamber\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003eVacuum chamber: 256 mm OD x 238 mm ID x 276 mm Height, made of high purity quartz\u003c\/li\u003e\n\u003cli\u003eSealing flange: 274 mm Dia. made of Aluminum with high-temperature silicone O-ring\u003c\/li\u003e\n\u003cli\u003eStainless steel shield cage is included for 100% shielding of RF radiation from the chamber\u003c\/li\u003e\n\u003cli\u003eMax vacuum level: 1.0E-5 Torr with turbopump and chamber baking \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eVibration Sample Holder\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GIF_1503c24d-91e2-4ca3-aa20-6a97ef2961a4.gif?v=1733438875\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"65\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GIF.gif\" width=\"69\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/mix.png?v=1706240462\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"58\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/mix.png\" width=\"81\"\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eThe amplification of vibration is adjustable from 400 - 2000 RPM in terms of motor speed\u003c\/li\u003e\n\u003cli\u003eOne 2\" powder reservoir (cup shape) is on the vibration motor. Powder bounce and self rotate during the coating process.\u003c\/li\u003e\n\u003cli\u003eSuggested powder quantity: 5 - 20 ml\u003c\/li\u003e\n\u003cli\u003eSuggested particle size: 1 ~ 1000 microns ( Powder must be vacuum dry before coting)\u003c\/li\u003e\n\u003cli\u003eThe sample stage of blade mixing is available upon request for the larger amount of powder\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eGas Purification System\u003cbr\u003e\u003ca href=\"RMP-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" border=\"0\" height=\"56\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/IMG_2617-02.2.jpg\" title=\"\" width=\"72\"\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eMTI innovative technology-- using a gas purification system to replace turbopump to get battery coating.\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eTwo-columns of Molecular sieves are Built-in in the system. which can remove oxygen and humidity less than \u0026lt; 1 PPM\u003c\/li\u003e\n\u003cli\u003eRegeneration Temperature Controller\u003cspan lang=\"EN-US\"\u003eis built-in for automatically regenerating the filters\u003c\/span\u003e\n\u003c\/li\u003e\n\u003cli\u003eAutomatically purging function is built-in for quick reducing O2 \u0026lt; 200ppm \u0026amp; H2O \u0026lt; 50 ppm before recycling.\u003c\/li\u003e\n\u003cli\u003eThe automatic pressure control system is built in to keep the pressure at a constant level\u003c\/li\u003e\n\u003cli\u003e6\" color PLC touch panel is included which can set and display the humidity and pressure level\u003cstrong\u003e\u003cspan lang=\"EN-US\"\u003e.\u003c\/span\u003e\u003c\/strong\u003e\n\u003c\/li\u003e\n\u003cli\u003e\u003cspan lang=\"EN-US\"\u003eClick the picture left column to see detailed specifications\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eAfter purification with O2 \u0026amp; H2O \u0026lt; 1 PPM, the chamber pressure can be set up a suitable vacuum level ( 50 - 100 m-torr) for sputtering, which is much better than 10-5 torr vacuum.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOptional\u003cbr\u003e\u003ca href=\"TM106-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"56\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQTM106.5.jpg\" width=\"84\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003ePrecise quartz\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e \u003ca href=\"TM106-LD\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eFilm Thickness Monitor\u003c\/a\u003e\u003c\/span\u003e is optional, which can be into the chamber to monitor coating thickness with an accuracy of 0.10 Å\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eCompliance\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eCE approval\u003c\/li\u003e\n\u003cli\u003eNRTLcertification is available upon request at extra cost, please contact our sales representative for the quote.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eOptional\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eThis coater may be placed into a standard glovebox with modification for air-sensitive materials. (Pic. 1)\u003c\/li\u003e\n\u003cli\u003elarger 3 head coater with 12\" Vac. chamber, 8\" dia. sample order, and 3x 2\" sputtering guns, is available upon request (Pic. 2)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ca href=\"VTC-600-3HD-GB\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"54\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VGB-600-2HD-GB.1.jpg\" width=\"81\"\u003e\u003c\/a\u003ePic. 1 \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-3HD-12.png?v=1706228931\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"57\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-3HD-12.png\" width=\"88\"\u003e\u003c\/a\u003ePic. 2\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Three (3) RF Power Supplies","offer_id":44985185206411,"sku":"VTC600HD3-RF3","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"One (1) DC Power Only","offer_id":44985185239179,"sku":"VTC-600-3HD-1DC","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Two (2) RF \u0026 One (1) DC Power Supplies","offer_id":44985185271947,"sku":"VTC600HD3-RF2","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Three (3) DC Power Supplies","offer_id":44985185304715,"sku":"VTC600HD3-DC3","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Two (2) DC \u0026 One (1) RF Power Supplies","offer_id":44985185337483,"sku":"VTC600HD3-DC2","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"One (1) RF Power Only","offer_id":44985185370251,"sku":"VTC-600-3HD-1RF","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/VTC-3-RF-GP_b984be70-dae6-4d9c-8be0-b6fd53977ec8.jpg?v=1764855087"},{"product_id":"vtc-1rf-spc","title":"2 in 1 Thin Film Coater: Magnetrons Sputtering \u0026 Thermal Evaporation - VTC-1RF-SPC","description":"\u003cp\u003eVTC-1RF-SPC is a 2 in 1 thin film coater that integrates one 1\" sputtering head and one thermal evaporating crucible inside the stainless steel vacuum chamber. It is an excellent coater to produce multi-layer film for material research. \u003cbr\u003e\u003c\/p\u003e\n\u003ctable border=\"1\" cellpadding=\"1\" cellspacing=\"0\" style=\"width: 100%;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003e\n\u003cbr\u003e Structure\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Sketch-E-S.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"83\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Sketch-E-S.png\" width=\"128\"\u003e\u003c\/a\u003e       \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Index.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"85\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Index.png\" width=\"124\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003e\n\u003cbr\u003eInput Power\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eSingle-phase 220 VAC+\/- 10%, 50 \/ 60 Hz\u003c\/li\u003e\n\u003cli\u003e4200 W (including a vacuum pump and water chiller)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003eMegnetron Sputtering Head \u003cbr\u003eand Power Source\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Bent-head.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"79\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Bent-head.png\" width=\"52\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eOne\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e \u003ca href=\"HVMSS-SPC-1\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003e1\" Magnetron Sputter head with a High Vacuum Quick Connector\u003c\/a\u003e\u003c\/span\u003e is included. The head is made from sputtering from bottom to up ( Please click picture left )\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eThe distance between the sputtering head and the sample stage is adjustable from 60 to 100 mm\u003c\/li\u003e\n\u003cli\u003eA manually rotated baffle plate is built between the sputtering head and the sample stage to avoid contamination\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eOne sputtering power source is included. You may choose either DC or RF source based on target materials:\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cul\u003e\n\u003cul\u003e\n\u003cli\u003eDC source: 500 W power for coating metallic materials (Pic 1)\u003c\/li\u003e\n\u003cli\u003eRF source: 300 W power, 13.56 MHz frequency for coating non-conductive materials (Pic 2)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n             \u003ca href=\"DC-500-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"51\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC600.jpg\" width=\"77\"\u003e\u003c\/a\u003e -- Pic 1 \u003ca href=\"RF-300I-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/DSC_6670.1.jpg\" width=\"74\"\u003e\u003c\/a\u003e -- Pic 2\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003e\n\u003cp\u003eThermal Evaporating \u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/crucible-T.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"76\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/crucible-T.png\" width=\"166\"\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eOne evaporation source is installed on the bottom of the vacuum chamber\u003c\/li\u003e\n\u003cli\u003eThe tungsten heating coil is built in an alumina crucible.\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eSS316 crucible is available upon request for evaporating Li-metal\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eAn S-type thermal couple is the installed bottom of the crucible\u003c\/li\u003e\n\u003cli\u003eMax. evaporation temperature is 1350oC \u003c\/li\u003e\n\u003cli\u003eTemperature is controlled precisely by a programmable temperature controller in a touchscreen panel.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003e\n\u003cp\u003eVacuum Chamber\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Topflang.png?v=1706229260\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Topflang_100x100.png?v=1706229260\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/lifting.png?v=1706241101\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/lifting_100x100.png?v=1706241101\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eVacuum chamber: 250 mm Dia. x 360 mm Height, made of stainless steel\u003c\/li\u003e\n\u003cli\u003eView window: 100 mm diameter quartz glass with vacuum-sealed\u003c\/li\u003e\n\u003cli\u003eThe top flange of the chamber can move up \u0026amp; down by an electric motor to load the sample\u003c\/li\u003e\n\u003cli\u003eThe rotary and heatable sample holder is installed on the top flange \u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eThe sample holder size: 100 mm\u003c\/li\u003e\n\u003cli\u003eThe heating temperature of the sample holder: 700oC Max ±3. with 30 segments programmable\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eThe turbo-pump ( included) is connected to the chamber directly via a KF60 flange with an electric gate valve\u003c\/li\u003e\n\u003cli\u003eElectrodes of evaporation are through via the KF63 flange\u003c\/li\u003e\n\u003cli\u003eOne KF35 flange is built to install an optional film thickness-measuring device \u003c\/li\u003e\n\u003cli\u003eGas inlet and outlet port and valves are included\u003c\/li\u003e\n\u003cli\u003eMax vacuum level: 8x10-6 torr cold state )\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003eWater Chiller\u003cbr\u003e\u003ca href=\"KJ5000\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/CW5000DIfu2.1.jpg\" title=\"Click to enlarge\" width=\"75\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eOne digital temperature-controlled\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e \u003ca href=\"KJ5000\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003erecirculating water chiller\u003c\/a\u003e\u003c\/span\u003e is included. (Click picture to see details)\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eRefrigeration range: 5~35 °C\u003c\/li\u003e\n\u003cli\u003eFlow rate: 16 L\/min\u003c\/li\u003e\n\u003cli\u003ePump pressure: 14 psi\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003eControl Panel\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003cul\u003e\n\u003cli\u003e7\" color touchscreen panel is installed to control\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eEvaporation temperature\u003c\/li\u003e\n\u003cli\u003eSample stage temperature and rotation speed\u003c\/li\u003e\n\u003cli\u003eVacuum pump on\/ off and display vacuum level\u003c\/li\u003e\n\u003cli\u003eVacuum valve on\/off\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003e\n\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"TM106-LD\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eThickness Monitor\u003c\/a\u003e\u003c\/span\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/Film-thickness-controlle.aspx\"\u003e\u003c\/a\u003e (Optional)\u003cbr\u003e\u003ca href=\"TM106-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"56\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQTM106.5.jpg\" width=\"84\"\u003e\u003c\/a\u003e\u003ca href=\"TFMS-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"54\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQTFCASLD.1.jpg\" width=\"81\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003cul\u003e\n\u003cli\u003ePrecise quartz \u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"TM106-LD\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eFilm Thickness Monitor\u003c\/a\u003e \u003c\/span\u003eis optional, which can be into the chamber to monitor coating thickness with an accuracy of 0.10 Å\u003c\/li\u003e\n\u003cli\u003ePrecision\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e \u003ca href=\"TFMS-LD\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eThin Film \u0026amp; Coating Analysis Systems - TFMS-LD\u003c\/a\u003e\u003c\/span\u003e is available at extra cost\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003e\n\u003cp\u003eCompliance\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eCE approval\u003c\/li\u003e\n\u003cli\u003eNRTL certification is available upon request at extra cost, please contact our sales representative for the quote.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Three (3) RF Power Supplies","offer_id":44985185403019,"sku":"VTC600HD3-RF3","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"One (1) DC Power Only","offer_id":44985185435787,"sku":"VTC-600-3HD-1DC","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Two (2) RF \u0026 One (1) DC Power Supplies","offer_id":44985185468555,"sku":"VTC600HD3-RF2","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Three (3) DC Power Supplies","offer_id":44985185501323,"sku":"VTC600HD3-DC3","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Two (2) DC \u0026 One (1) RF Power Supplies","offer_id":44985185534091,"sku":"VTC600HD3-DC2","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"One (1) RF Power Only","offer_id":44985185566859,"sku":"VTC-600-3HD-1RF","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/VTC-1RF-SPC-mian.1_624f1459-5ada-4dc1-a9a2-9bfd97c323be.png?v=1764855088"},{"product_id":"vtc6003hdld","title":"DC\/RF 3-head High Vacuum 2” Magnetron Plasma Sputtering Coater - VTC-600-3HD-LD","description":"VTC-600-3HD-LD is a combinatorial plasma sputtering system with three 2“ magnetron sputtering sources and three RF\/DC power supplies. Such a sputtering system is capable of co-sputtering up to three different target materials and creates various composition profiles across the substrate (e.g. ternary materials for Li-ion rechargeable battery). This system is also suitable for sequential coating of multiple layer films such as ferroelectric, alloy, semiconductor, ceramic, dielectric, optical, oxide, hard, PTFE, etc. SPECIFICATIONS Power 208-240 VAC, single phase, 50\/60 Hz, 1500 W Source Power Three sputtering power sources Two DC source : 500 W power for coating metallic materials One RF source : 300 W power, 13.56 MHz frequency for coating non-conductive materials Magnetron Sputtering Head Three 2\" Magnetron Sputtering Heads with water cooling jackets and shutters Two are connected to DC sources for metallic materials One is connected to the RF source for non-conductive materials Target size: 2\" diameter with a thickness of 0.1 - 5 mm Sputtering targets are optional Recommended Sputtering Recipe and Useful Tips 2 RF heads model is available Extra 148 cm RF cable can be ordered at extra cost for the replacement Four heads sputtering system is available upon request (Pic. 5) Vacuum Chamber Stainless steel vacuum chamber: Ø300 × 300 mm H One 100 mm glass view port. Hinged type top flange for easy sample access Here is a glance of the vacuum chamber Sample Stage Ø140 mm rotating and heating sample stage up to 500°C Rotation speed: 1 - 20 rpm Single-point programmable temperature controller Gas Flow Control Two mass flow controllers (MFC) Flow rate: 0 – 200 sccm nitrogen calibrated 1\/4\" vent port. Vacuum Pump Station (Optional) For air-sensitive targets, such as Al, Ti, Cr, etc, or base pressure \u0026lt;1e-2 torr, a pumping station (turbo + backing pumps) is recommended Turbo pump . 63 L\/s turbomolecular pump , or 260 L\/s turbomolecular pump Backing pump 240 L\/min rotary vane pump , or 200 L\/min dry scroll pump Water Chiller (Optional) Chilled water is required One digital temperature-controlled recirculating water chiller is recommended Refrigeration range: 5~35 °C Flow rate: 16 L\/min Pump pressure: 14 psi Film Thickness Measurement (Optional) Quartz crystal microbalance for in-situ film thickness measurement is optional. Accuracy up to 1Å Compliance CE approval NRTL certification is available upon request at extra cost, please contact our sales representative for the quote. Application Note This coater may be placed into a standard glovebox with modification for thin-film battery research\u003cbr\u003e\u003cbr\u003e\u003ctable border=\"1\" cellpadding=\"1\" cellspacing=\"0\" style=\"width: 100%;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003ePower\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003e208-240 VAC, single phase, 50\/60 Hz, 1500 W\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003eSource Power\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC6002HDdischarging.png?v=1706229092\" rel=\"prettyPhoto[products]\" title=\"\"\u003e\u003cbr\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eThree sputtering power sources\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eTwo \u003ca href=\"DC-500-LD\" rel=\"noopener\" target=\"_blank\"\u003eDC source\u003c\/a\u003e: 500 W power for coating metallic materials \u003c\/li\u003e\n\u003cli\u003eOne \u003ca href=\"RF-300I-LD\" rel=\"noopener\" target=\"_blank\"\u003eRF source\u003c\/a\u003e: 300 W power, 13.56 MHz frequency for coating non-conductive materials\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eMagnetron Sputtering Head\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"hvmssspc2f\" rel=\"noopener\" target=\"_blank\"\u003eThree 2\" Magnetron Sputtering Heads\u003c\/a\u003e with water cooling jackets and shutters\n\u003cul\u003e\n\u003cli\u003eTwo are connected to DC sources for metallic materials\u003c\/li\u003e\n\u003cli\u003eOne is connected to the RF source for non-conductive materials\u003c\/li\u003e\n\u003cli\u003eTarget size: 2\" diameter with a thickness of 0.1 - 5 mm\u003cbr\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/mtixtl.com\/collections\/target-a-z\" rel=\"noopener\" target=\"_blank\"\u003eSputtering targets\u003c\/a\u003e are optional\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-2HD_Application_Note_1.pdf?v=1733441895\" rel=\"noopener\" target=\"_blank\"\u003eRecommended Sputtering Recipe and Useful Tips\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"vtc6002hdld\" rel=\"noopener\" target=\"_blank\"\u003e2 RF heads model\u003c\/a\u003e is available\u003cbr\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"spc-cable\" rel=\"noopener\" target=\"_blank\"\u003eExtra 148 cm RF cable\u003c\/a\u003e can be ordered at extra cost for the replacement\u003c\/li\u003e\n\u003cli\u003eFour heads sputtering system is available upon request (Pic. 5)\u003c\/li\u003e\n\u003c\/ul\u003e\n \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD-head.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD-head.jpg\" width=\"75\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC6002HDdischarging.png?v=1706229092\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC6002HDdischarging.png?v=1706229092\" title=\"Click to enlarge\" width=\"74\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Plasma.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Plasma.jpg\" width=\"76\"\u003e\u003c\/a\u003e\u003ca href=\"SPC-Cable\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/SPC-Cable.jpg\" width=\"75\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eVacuum Chamber\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eStainless steel vacuum chamber: Ø300 × 300 mm H\u003c\/li\u003e\n\u003cli\u003eOne 100 mm glass view port. \u003c\/li\u003e\n\u003cli\u003eHinged type top flange for easy sample access\u003c\/li\u003e\n\u003cli\u003eHere is a glance of the vacuum chamber\u003cbr\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/window.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/window.png\" width=\"72\"\u003e\u003c\/a\u003e \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-2HD.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-2HD.jpg\" width=\"75\"\u003e\u003c\/span\u003e\u003c\/a\u003e   \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD_chamber_front.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD_chamber_front.jpg\" width=\"36\"\u003e\u003c\/span\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eSample Stage\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eØ140 mm rotating and heating sample stage up to 500°C \u003c\/li\u003e\n\u003cli\u003eRotation speed: 1 - 20 rpm\u003c\/li\u003e\n\u003cli\u003eSingle-point programmable temperature controller\u003cbr\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/sampleholder.1.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/sampleholder.1.png\" width=\"79\"\u003e\u003c\/span\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD_rotary_sample_holder.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD_rotary_sample_holder.jpg\" width=\"58\"\u003e\u003c\/span\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003eGas Flow Control\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eTwo \u003ca href=\"mfc-7b\" rel=\"noopener\" target=\"_blank\"\u003emass flow controllers\u003c\/a\u003e (MFC)\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eFlow rate: 0 – 200 sccm\u003c\/li\u003e\n\u003cli\u003enitrogen calibrated\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003e1\/4\" vent port.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003eVacuum Pump Station\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003e(Optional)\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eFor air-sensitive targets, such as Al, Ti, Cr, etc, or base pressure \u0026lt;1e-2 torr, a pumping station (turbo + backing pumps) is recommended\u003c\/li\u003e\n\u003cli\u003eTurbo pump . \n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"pv-dn63-ld\" rel=\"noopener\" target=\"_blank\"\u003e63 L\/s turbomolecular pump\u003c\/a\u003e, or\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"pv-dn100-ld\" rel=\"noopener\" target=\"_blank\"\u003e260 L\/s turbomolecular pump\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003cli\u003eBacking pump\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"ytp-550-ld\" rel=\"noopener\" target=\"_blank\"\u003e240 L\/min rotary vane pump\u003c\/a\u003e, or\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"ofsp12-ld\" rel=\"noopener\" target=\"_blank\"\u003e200 L\/min dry scroll pump\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003eWater Chiller\u003c\/p\u003e\n\u003cp\u003e(Optional)\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eChilled water is required\u003c\/li\u003e\n\u003cli\u003eOne digital temperature-controlled \u003ca href=\"KJ5000\" rel=\"noopener\" target=\"_blank\"\u003erecirculating water chiller\u003c\/a\u003e is recommended\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eRefrigeration range: 5~35 °C\u003c\/li\u003e\n\u003cli\u003eFlow rate: 16 L\/min\u003c\/li\u003e\n\u003cli\u003ePump pressure: 14 psi\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003eFilm Thickness Measurement\u003c\/p\u003e\n\u003cp\u003e(Optional)\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"tm106-ld\" rel=\"noopener\" target=\"_blank\"\u003eQuartz crystal microbalance\u003c\/a\u003e for in-situ film thickness measurement is optional. Accuracy up to 1Å\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cul\u003e\u003c\/ul\u003e\n\u003ca href=\"TFMS-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003eCompliance\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eCE approval\u003c\/li\u003e\n\u003cli\u003eNRTL certification is available upon request at extra cost, please contact our sales representative for the quote.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003eApplication Note\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eThis coater may be placed into a standard glovebox with modification for thin-film battery research\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"VTC-600-3HD-GB\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"64\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VGB-600-2HD-GB.1.jpg\" width=\"96\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC6003HD1.png?v=1706228962\" rel=\"noopener\" style=\"font-size: 0.875rem;\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"71\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC6003HD1.png\" width=\"105\"\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44985185632395,"sku":"VTC6003HDLD","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/VTC6003HD_Main_7158577d-abc3-46c5-bae1-b20f4657d812.jpg?v=1764855089"},{"product_id":"3-rotary-target-plasma-sputtering-coater-including-3-targets-vtc-16-3hd-ld","title":"3 Rotary Target Plasma Sputtering Coater Including 3 Targets - VTC-16-3HD-LD","description":"\u003cp\u003eVTC-16-3HD-LD is a compact three rotary target plasma sputtering coater with a touch screen digital controller, and a substrate heater capable of heating up to 500 °C. It can coat 1- 3 types of metallic materials to sample with a diameter up to 50 mm. Three sputtering targets: gold, silver, and copper are included for immediate use.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eSPECIFICATIONS:\u003c\/strong\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eInput Power\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/IMG_5449-edit.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/IMG_5449-edit.jpg\" width=\"84\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eSingle-phase 220 VAC, 50 \/ 60Hz\u003c\/li\u003e\n\u003cli\u003e700 W (not including vacuum pump)\u003c\/li\u003e\n\u003cli\u003eFor using under 110 VAC, a \u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/tf-220110-1500-ld?_pos=2\u0026amp;_sid=579f69190\u0026amp;_ss=r\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003e1500W transformer\u003c\/a\u003e\u003c\/span\u003e will be needed.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOutput Power\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e1600 VDC\u003c\/li\u003e\n\u003cli\u003e40 mA max\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eVacuum Chamber\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-16-3HD_ChamberDimension.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"49\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-16-3HD_ChamberDimension.jpg\" width=\"74\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eVacuum chamber: 150 mm ID x 165mm OD x 150 mm H, made of high-purity quartz\u003c\/li\u003e\n\u003cli\u003eSealing flange made of stainless steel with flat O-ring\u003c\/li\u003e\n\u003cli style=\"color: rgb(43, 0, 255);\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/vtc-gc?_pos=1\u0026amp;_sid=52d2aeb5a\u0026amp;_ss=r\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003ePlease click here to order the Quartz Chamber replacement.\u003c\/a\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSample Stage\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HD4.1.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"55\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HD4.1.jpg\" title=\"Click to enlarge\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-16-3HD-LD-square.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"55\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-16-3HD-LD-square.jpg\" width=\"73\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eStage size: 50 mm Dia.\u003c\/li\u003e\n\u003cli\u003eSputtering distance range: 25 – 40 mm adjustable\u003c\/li\u003e\n\u003cli\u003eRotatable stage with three sputtering positions (controlled by the touch screen)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOptional Heater for Sample Stage\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eThe Substrate Heater has a maximum heating temperature of 500°C.\u003c\/li\u003e\n\u003cli\u003ePID temperature controller with +\/- 1°C accuracy is integrated into the touchscreen.\u003c\/li\u003e\n\u003cli\u003ePlease select from the options bar.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eControl Panel\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HD1.1.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"55\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HD1.1.jpg\" title=\"Click to enlarge\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e6” color touch screen with PLC integration for easy operation\u003c\/li\u003e\n\u003cli\u003eThe vacuum gauge, sputtering current meter, and substrate temperature control are integrated into the touchscreen panel\u003c\/li\u003e\n\u003cli\u003eAdjustment knobs on the front panel for gas intake and sputtering current control\u003c\/li\u003e\n\u003cli\u003eSputtering position, sputtering timer, and process logging are accessible from the touchscreen\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eShield\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HD3.1.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"55\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HD3.1.jpg\" title=\"Click to enlarge\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eStainless steel \u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/safeguard-cover-for-vtc-16-3hd-mti-vtc-163hd-sc?_pos=1\u0026amp;_sid=512fcb360\u0026amp;_ss=r\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eshield cage\u003c\/a\u003e\u003c\/span\u003e is included for extra protection\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSputtering Targets\u003cbr\u003e\u003cimg alt=\"\" height=\"55\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/autgt.jpg\"\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eTarget size requirements: 47 mm Dia. x 2.5 mm max\u003c\/li\u003e\n\u003cli\u003eIt also can coat\u003ca href=\"https:\/\/mtixtl.com\/collections\/target-a-z\" rel=\"noopener\" target=\"_blank\"\u003e \u003cspan style=\"color: rgb(43, 0, 255);\"\u003eAg, Al, Cr, Ni, Pt, Ti, Sn, Li, Mg\u003c\/span\u003e\u003c\/a\u003e, etc. Almost every kind of metallic material.\u003c\/li\u003e\n\u003cli\u003eWarning\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e \u003ca href=\"https:\/\/docs.google.com\/document\/d\/1wbLS0FebBllKra-0yJs9-dODcn8yZoOe1jjD2LCgCPQ\/pub\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eAluminum, Chromium or Nickel Target\u003c\/a\u003e\u003c\/span\u003e can be coated by this machine, but please review the Recommend Coating Method before using.\u003c\/li\u003e\n\u003cli\u003ePlease RF Plasma Megnetron Sputtering for coating Alumina\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eVacuum Pump\u003cbr\u003e(Optional)\u003cbr\u003e\u003cbr\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eBuilt-in KF25 vacuum port for connecting to a vacuum pump (Pic #1)\u003c\/li\u003e\n\u003cli\u003eA vacuum pump with a KF25 connector is required, but not included. User may choose\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eA \u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"FYP\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003edouble-stage vacuum pump\u003c\/a\u003e\u003c\/span\u003e for vacuum up to 1.0E-2 Torr (Click Pic #2 to order)\u003c\/li\u003e\n\u003cli\u003eOr a \u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/pv-hvs-ld?_pos=3\u0026amp;_sid=c761fd9c3\u0026amp;_ss=r\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eturbopump\u003c\/a\u003e\u003c\/span\u003e for vacuum up to 1.0E-5 Torr (Click Pic #3 to order)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eThe vacuum pump can be plugged into the power outlet on the left of the coater for automatic control\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HDPump.1.jpg\" target=\"_blank\" rel=\"noopener\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HDPump.1.jpg\" width=\"75\" height=\"50\"\u003e\u003c\/a\u003e\u003cbr\u003e\u003ca href=\"FYP\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-FYP-Pump.1.2.jpg\" width=\"90\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/pv-hvs-ld?_pos=3\u0026amp;_sid=c761fd9c3\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"55\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PfeifferVacuumPumpEco_TUV.jpg\" width=\"83\"\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDimensions\u003cbr\u003e \u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HDDimension.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HDDimension.jpg\" title=\"Click to enlarge\" width=\"90\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-16-3HD-dim.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-16-3HD-dim.jpg\" width=\"90\"\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eNet Weight\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e50 kg\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCompliance\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eCE approval\u003c\/li\u003e\n\u003cli\u003eNRTL certification is NOT available temporarily.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eApplication Notes\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eFor the best film-substrate adhesion strength, please clean the substrate surface before coating:\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eUltrasonic cleaning (Click the picture below to order) with the following sequential baths - (1) acetone, (2) isopropyl alcohol - to remove oil and grease. Blow dry the substrate with N2, then hot bake in a vacuum to remove absorbed moisture\u003c\/li\u003e\n\u003cli\u003ePlasma cleaning (Click the picture below to order) may be needed for surface roughening, surface chemical bonds activation, or additional contamination removal\u003c\/li\u003e\n\u003cli\u003eA thin buffer layer (~5 nm), such as Cr, Ti, Mo, Ta, could be applied to improve the adhesion of metals and alloys\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003cul\u003e\n\u003cli\u003eA two-stage pressure regulator (not included) should be installed on the gas cylinder to limit the output pressure of the gas to below 0.02 MPa for safe usage. Please use \u0026gt; 5N purity Ar gas for plasma sputtering\u003c\/li\u003e\n\u003cli\u003eHIGH VOLTAGE! Sputtering heads connect to high voltage. For safety, the operator must shut down the equipment before sample loading and target changing operations\u003c\/li\u003e\n\u003cli style=\"color: rgb(255, 42, 0);\"\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eThis model is not suitable for coating light metallic materials such as Al, Mg, Zn, Ni, etc. due to its low energy. Please consider our magnetron sputtering coater or thermal evaporation coater. Click the pictures below for detail\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cdiv\u003e\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/nrtl-certified-5l-heated-ultrasonic-cleaner-w-digital-timer280x140x150-mm-eq-vgt-1860qtd-ld?_pos=1\u0026amp;_sid=90e1a3d4a\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/UCF.1.jpg\" width=\"90\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003eUltrasonic Cleaner\u003c\/span\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003cdiv\u003e\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/pce-3?_pos=2\u0026amp;_sid=d2b419595\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PDC36Gmain2.1.jpg\" width=\"90\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003ePlasma Cleaner\u003c\/span\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003cdiv\u003e\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/vtc-16-sm?_pos=2\u0026amp;_sid=eabaf69f7\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/MegnetronDC.jpg\" width=\"95\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003eMagnetron Sputtering\u003c\/span\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003cdiv\u003e\n\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/gsl-1700x-spc2?_pos=5\u0026amp;_sid=a5197e92f\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"65\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GSL1700XSPC2.3.jpg\" width=\"98\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003eThermal Evaporation\u003c\/span\u003e\u003c\/a\u003e\u003cbr\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Non-Heatable","offer_id":44985185697931,"sku":"VTC16HD3S","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Heatable","offer_id":44985185730699,"sku":"VTC16HD3SH","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/VTC163HD.3.1.1.1.1_091d89b7-bd18-47cc-8bbf-e70acf0fab2e.jpg?v=1764855090"},{"product_id":"vtc6002hdld","title":"DC\/RF Dual-Head High Vacuum 2” Magnetron Plasma Sputtering Coater - VTC-600-2HD-LD","description":"VTC-600-2HD-LD is a compact magnetron sputtering system with dual 2\" target sources, e.g., one DC source for coating metallic film, and the other RF source for coating non-metallic material. This coating system is capable for co-sputtering or deposition of multiple layer films for a wide range of materials, such as alloy, ferroelectric, semiconductor, ceramic, dielectric, optical, PTFE, etc. (Revised since 9\/25\/2015. Film Thickness Monitor is not included.) SPECIFICATIONS Power 208-240 VAC, single phase, 50\/60 Hz, 500 W Source Power DC source : 500 W power for coating metallic materials RF source : 300 W power, 13.56 MHz frequency for coating non-conductive materials Magnetron Sputtering Head Two 2\" Magnetron Sputtering Heads with water cooling jackets and shutters One is connected to a DC source for metallic materials The other is connected to the RF source for non-conductive materials Target size: 2\" diameter with a thickness of 0.1 - 5 mm Sputtering targets are optional Recommended Sputtering Recipe and Useful Tips 3 RF heads model is available Extra 148 cm RF cable can be ordered at extra cost for the replacement Four heads sputtering system is available upon request (Pic. 5) Pic. 5 Vacuum Chamber Stainless steel vacuum chamber: Ø300 × 300 mm H One 100 mm glass view port. Hinged type top flange for easy sample access Here is a glance of the vacuum chamber Sample Stage Ø140 mm rotating and heating sample stage up to 500°C Rotation speed: 1 - 20 rpm Single-point programmable temperature controller Gas Flow Control Two mass flow controllers (MFC) Flow rate: 0 – 200 sccm nitrogen calibrated 1\/4\" vent port. Vacuum Pump Station (Optional) For air-sensitive targets, such as Al, Ti, Cr, etc, or base pressure \u0026lt;1e-2 torr, a pumping station is recommended Turbo pump . 63 L\/s turbomolecular pump , or 260 L\/s turbomolecular pump Backing pump 240 L\/min rotary vane pump , or 200 L\/min dry scroll pump Water Chiller (Optional) Chilled water is required One digital temperature-controlled recirculating water chiller is recommended Refrigeration range: 5~35 °C Flow rate: 16 L\/min Pump pressure: 14 psi Film Thickness Measurement (Optional ) Quartz crystal microbalance for in-situ film thickness measurement is optional. Accuracy up to 1Å Overall Dimensions Lid closed: 48\" × 28\" × 32\" Lid open: 48\" × 28\" × 37\" Net Weight of Coater 160 kg Shipping Weight \u0026amp; Dimensions Total 2 Pallets #1: 520 lbs, 52\" x 40\" x 50\" #2: 420 lbs, 48\" x 40\" x 45\" Compliance CE approval NRTL Certification (UL 1450) is available upon request at extra cost Application Notes Please use 5N purity Argon gas for plasma sputtering. For best performance, the non-conductive targets must be installed with a copper backing plate. Please refer to the instruction video below for target bonding (Click Pic #3 below) MTI supplies single crystal substrate from A to Z (Click Pic #4 below to order) MTI Sputtering Coaters have successfully coated ZnO on Al 2 O 3 substrate at 500 °C (XRD profile in Pic #5 below) HIGH VOLTAGE! Sputtering heads connect to high voltage. For safety, the operator must shut down the RF \/ DC generator before sample loading and target changing operations DO NOT use DI water in a water chiller. Use distilled water The coater can be placed into glovebox as the Pic. 6 at extra cost ( must order glovebox together) Pic 3 Pic 5 Pic. 6\u003cbr\u003e\u003cbr\u003e\u003ctable border=\"1\" cellpadding=\"1\" cellspacing=\"0\" style=\"width: 100%; height: 1957.34px;\"\u003e\n\u003ctbody\u003e\n\u003ctr style=\"height: 47.5938px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 47.5938px;\"\u003ePower\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 47.5938px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e208-240 VAC, single phase, 50\/60 Hz, 500 W\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 67.1875px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 67.1875px;\"\u003eSource Power\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 67.1875px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"DC-500-LD\" target=\"_blank\"\u003eDC source\u003c\/a\u003e: 500 W power for coating metallic materials \u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"RF-300I-LD\" target=\"_blank\"\u003eRF source\u003c\/a\u003e: 300 W power, 13.56 MHz frequency for coating non-conductive materials\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 279.938px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 279.938px;\"\u003e\n\u003cp\u003eMagnetron Sputtering Head\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 279.938px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"hvmssspc2f\" rel=\"noopener\" target=\"_blank\"\u003eTwo 2\" Magnetron Sputtering Heads\u003c\/a\u003e with water cooling jackets and shutters\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eOne is connected to a DC source for metallic materials\u003c\/li\u003e\n\u003cli\u003eThe other is connected to the RF source for non-conductive materials\u003c\/li\u003e\n\u003cli\u003eTarget size: 2\" diameter with a thickness of 0.1 - 5 mm\u003cbr\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/mtixtl.com\/collections\/target-a-z\" rel=\"noopener\" target=\"_blank\"\u003eSputtering targets\u003c\/a\u003e are optional\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-2HD_Application_Note_1.pdf?v=1733441895\" rel=\"noopener\" target=\"_blank\"\u003eRecommended Sputtering Recipe and Useful Tips\u003c\/a\u003e\u003cbr\u003e\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003e\n\u003ca href=\"vtc6003hdld\" rel=\"noopener\" target=\"_blank\"\u003e3 RF heads model\u003c\/a\u003e is available\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"spc-cable\" rel=\"noopener\" target=\"_blank\"\u003eExtra 148 cm RF cable\u003c\/a\u003e can be ordered at extra cost for the replacement\u003c\/li\u003e\n\u003cli\u003eFour heads sputtering system is available upon request (Pic. 5)\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"hvmssspc2f\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/1.26.jpg\" width=\"75\"\u003e\u003c\/a\u003e    \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC6002HDdischarging.png?v=1706229092\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC6002HDdischarging.png?v=1706229092\" title=\"Click to enlarge\" width=\"74\"\u003e\u003c\/span\u003e\u003c\/a\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e     \u003c\/span\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Plasma.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Plasma.jpg\" width=\"76\"\u003e\u003c\/span\u003e\u003c\/a\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e      \u003c\/span\u003e\u003ca href=\"spc-cable\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/SPC-Cable.jpg\" width=\"75\"\u003e\u003c\/span\u003e\u003c\/a\u003e   \u003cspan style=\"font-size: 0.875rem;\"\u003e \u003c\/span\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/4head.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"55\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/4head.jpg\" width=\"64\"\u003e\u003c\/span\u003e\u003c\/a\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e Pic. 5\u003c\/span\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 176.969px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 176.969px;\"\u003e\n\u003cp\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eVacuum Chamber\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 176.969px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eStainless steel vacuum chamber: Ø300 × 300 mm H\u003c\/li\u003e\n\u003cli\u003eOne 100 mm glass view port. \u003c\/li\u003e\n\u003cli\u003eHinged type top flange for easy sample access\u003c\/li\u003e\n\u003cli\u003eHere is a glance of the vacuum chamber\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/window.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/window.png\" width=\"72\"\u003e\u003c\/a\u003e  \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-2HD.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-2HD.jpg\" width=\"75\"\u003e\u003c\/span\u003e\u003c\/a\u003e     \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD_chamber_front.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD_chamber_front.jpg\" width=\"36\"\u003e\u003c\/span\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 157.375px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 157.375px;\"\u003e\n\u003cp\u003e\u003cbr\u003e\u003cbr\u003eSample Stage\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 157.375px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eØ140 mm rotating and heating sample stage up to 500°C \u003c\/li\u003e\n\u003cli\u003eRotation speed: 1 - 20 rpm\u003c\/li\u003e\n\u003cli\u003eSingle-point programmable temperature controller\u003cbr\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/sampleholder.1.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/sampleholder.1.png\" width=\"79\"\u003e\u003c\/a\u003e  \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD_rotary_sample_holder.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD_rotary_sample_holder.jpg\" width=\"58\"\u003e\u003c\/span\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 106.375px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 106.375px;\"\u003e\n\u003cp\u003eGas Flow Control\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 106.375px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eTwo \u003ca href=\"mfc-7b\" rel=\"noopener\" target=\"_blank\"\u003emass flow controllers\u003c\/a\u003e (MFC)\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eFlow rate: 0 – 200 sccm\u003c\/li\u003e\n\u003cli\u003enitrogen calibrated\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003e1\/4\" vent port.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 165.156px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 165.156px;\"\u003e\n\u003cp\u003eVacuum Pump Station\u003c\/p\u003e\n\u003cp\u003e(Optional)\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 165.156px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eFor air-sensitive targets, such as Al, Ti, Cr, etc, or base pressure \u0026lt;1e-2 torr, a pumping station is recommended\u003c\/li\u003e\n\u003cli\u003eTurbo pump . \n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"pv-dn63-ld\" rel=\"noopener\" target=\"_blank\"\u003e63 L\/s turbomolecular pump\u003c\/a\u003e, or\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"pv-dn100-ld\" rel=\"noopener\" target=\"_blank\"\u003e260 L\/s turbomolecular pump\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003cli\u003eBacking pump\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"ytp-550-ld\" rel=\"noopener\" target=\"_blank\"\u003e240 L\/min rotary vane pump\u003c\/a\u003e, or\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"ofsp12-ld\" rel=\"noopener\" target=\"_blank\"\u003e200 L\/min dry scroll pump\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 106.375px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 106.375px;\"\u003e\n\u003cp\u003eWater Chiller\u003c\/p\u003e\n\u003cp\u003e(Optional)\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 106.375px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eChilled water is required\u003c\/li\u003e\n\u003cli\u003eOne digital temperature-controlled \u003ca href=\"KJ5000\" rel=\"noopener\" target=\"_blank\"\u003erecirculating water chiller\u003c\/a\u003e is recommended\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eRefrigeration range: 5~35 °C\u003c\/li\u003e\n\u003cli\u003eFlow rate: 16 L\/min\u003c\/li\u003e\n\u003cli\u003ePump pressure: 14 psi\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 58.7812px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 58.7812px;\"\u003eFilm Thickness Measurement\u003cbr\u003e(Optional )\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 58.7812px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"tm106-ld\" rel=\"noopener\" target=\"_blank\"\u003eQuartz crystal microbalance\u003c\/a\u003e for in-situ film thickness measurement is optional. Accuracy up to 1Å\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 86.5938px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 86.5938px;\"\u003e\n\u003cp\u003e\u003cbr\u003eOverall Dimensions\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 86.5938px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/vtc-600-2HD_dimension-1.jpg\"\u003eLid closed: 48\" × 28\" × 32\"\u003c\/a\u003e\u003cbr\u003e\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/vtc-600-2HD_dimension-1.jpg\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/vtc-600-2HD_dimension-1.jpg\" width=\"70\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/vtc-600-2HD_dimension-2.jpg\"\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/vtc-600-2HD_dimension-2.jpg\"\u003eLid open: 48\" × 28\" × 37\"\u003c\/a\u003e\u003cbr\u003e\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/vtc-600-2HD_dimension-2.jpg\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/vtc-600-2HD_dimension-2.jpg\" width=\"72\"\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 47.5938px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 47.5938px;\"\u003e\n\u003cp\u003eNet Weight of Coater\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 47.5938px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e160 kg\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 86.7812px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 86.7812px;\"\u003e\n\u003cp\u003eShipping Weight \u0026amp; Dimensions\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 86.7812px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cstrong\u003eTotal 2 Pallets\u003c\/strong\u003e\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cstrong\u003e#1: 520 lbs, 52\" x 40\" x 50\"\u003c\/strong\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cstrong\u003e#2: 420 lbs, 48\" x 40\" x 45\"\u003c\/strong\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 87.1875px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 87.1875px;\"\u003e\n\u003cp\u003eCompliance\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 87.1875px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eCE approval\u003c\/li\u003e\n\u003cli\u003eNRTL Certification (UL 1450) is available upon request at extra cost\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 317.062px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 317.062px;\"\u003e\n\u003cp\u003e Application Notes\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 317.062px;\"\u003e\n\u003cul\u003e\n\u003cli\u003ePlease use 5N purity Argon gas for plasma sputtering. \u003c\/li\u003e\n\u003cli\u003eFor best performance, the non-conductive targets must be installed with a copper backing plate. Please refer to the instruction video below for target bonding (Click Pic #3 below)\u003c\/li\u003e\n\u003cli\u003eMTI supplies single crystal substrate from A to Z (Click Pic #4 below to order) \u003c\/li\u003e\n\u003cli\u003eMTI Sputtering Coaters have successfully coated ZnO on Al\u003csub\u003e2\u003c\/sub\u003eO\u003csub\u003e3\u003c\/sub\u003e substrate at 500 °C (XRD profile in Pic #5 below)\u003c\/li\u003e\n\u003cli\u003eHIGH VOLTAGE! Sputtering heads connect to high voltage. For safety, the operator must shut down the RF \/ DC generator before sample loading and target changing operations\u003c\/li\u003e\n\u003cli\u003eDO NOT use DI water in a water chiller. Use distilled water\u003c\/li\u003e\n\u003cli\u003eThe coater can be placed into glovebox as the Pic. 6 at extra cost ( must order glovebox together)\u003c\/li\u003e\n\u003cli\u003e\n\u003ctable border=\"0\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003ca href=\"https:\/\/www.youtube.com\/watch?v=1kDRlkKfjQo\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-SP-05000-AB-vp.jpg\" width=\"90\"\u003e\u003c\/a\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/EQ-SP-05000-AB-video.aspx\"\u003e Pic 3\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ZnO_Al2O3_XRD.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ZnO_Al2O3_XRD.jpg\" width=\"91\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ZnO_Al2O3_XRD.jpg\"\u003e Pic 5\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003ca href=\"https:\/\/mtixtl.com\/products\/dual-head-2-magnetron-plasma-sputtering-coater-in-glovebox-vtc-600-2hd-gb-ld?_pos=1\u0026amp;_sid=cc71db11b\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VGB-600-2HD-GB.jpg\" width=\"90\"\u003e\u003c\/a\u003e\u003ca href=\"..\/..\/..\/VTC-600-2HD-GB.aspx\"\u003ePic. \u003c\/a\u003e6\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e, \u003ctable border=\"0\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003ca href=\"https:\/\/www.youtube.com\/watch?v=1kDRlkKfjQo\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-SP-05000-AB-vp.jpg\" width=\"90\"\u003e\u003c\/a\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/EQ-SP-05000-AB-video.aspx\"\u003e Pic 3\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ZnO_Al2O3_XRD.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ZnO_Al2O3_XRD.jpg\" width=\"91\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ZnO_Al2O3_XRD.jpg\"\u003e Pic 5\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003ca href=\"https:\/\/mtixtl.com\/products\/dual-head-2-magnetron-plasma-sputtering-coater-in-glovebox-vtc-600-2hd-gb-ld?_pos=1\u0026amp;_sid=cc71db11b\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VGB-600-2HD-GB.jpg\" width=\"90\"\u003e\u003c\/a\u003e\u003ca href=\"..\/..\/..\/VTC-600-2HD-GB.aspx\"\u003ePic. \u003c\/a\u003e6\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44985185861771,"sku":"VTC600HD2","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/VTC6002HDmain.3.1.1.1_918f448e-b339-4dcc-8449-913f88186c9d.jpg?v=1764855091"},{"product_id":"high-vacuum-thermal-evaporation-coater-with-six-sources-for-perovskite-solar-cells-gsl-1800x-zf6-psc","title":"High Vacuum Thermal Evaporation Coater With Six Sources for Perovskite Solar Cells - GSL-1800X-ZF6-PSC","description":"GSL-1800X-ZF6 is a high-vacuum thermal evaporation coater designed for deposition of perovskite solar cells, such as Cu, Ag, PbI2, CsBr, and others. Two types of sources can be evaporated at the same time at a high vacuum up to 10-6 torr. It is an excellent and cost-effective coating machine for various material fabrications and modification. SPECIFICATIONS Input Power Input: AC220V±10%, three-phases, 50\/60 Hz Total Power required: 8 KW (~32A) Vacuum Chamber Stainless steel (SS304) chamber: 400mm ID. x 400 mm D x 450 mm H, polished finish. 100 mm observation window Hinged-type door for easy sample loading Motorized shutters for each evaporation boat, One ISO-100K port for connection with a turbo pump and a gate valve. Vacuum Pump ( optional ) 260 L\/s turbo molecular pump Vacuum level: 5.0x10 -6 Torr ( after 40 minutes of pumping ) Limit vacuum: 5.0x10 -7 Torr ( after baking at 100 -150°C) Leaking rate: 5.0x10 -7 Pa. Vacuum Port: DN 100 ISO-K A mechanical pump ( YTP-550-LD ) is required as a backing pump to initially achieve the vacuum level of \u0026lt;1e-2 torr Evaporation Source \u0026amp; Sample Holder Four tungsten heating boats with water-cooled shrouds Tungsten heating boat, 70L x 12W x 3H (mm). Sample holder can accept a maximum sample of 150*150mm. Rotation speed: 0-30 rpm Evaporation distance from source to sample holder is up to 60 mm The sample stage with a heating function up to 700 °C In-situ thickness monitor (optional) Quartz crystal microbalance is optional for thickness measurements The accuracy of thickness control is 1.0 Angstrom. Control Unit Vacuum, thickness, and power control are integrated into one control box The Control Unit is separated from the vacuum chamber for easy moving Dual-Chamber Glovebox ( Optional ) A dual chamber glovebox with a dimension of L2440mm * W780mm * H900mm Four gloves will be included 10 KF40 ports at the backside 0.1 ppm O2\/H2O More details can be found here VGB-6-II-LD Facility Requirement Space: 250 SF with height \u0026gt; 6 feet Chilled Water: \u0026gt; 16L\/minute flowing water required for electrode cooling or using a recirculating water chiller Certificate CE certified NRTL or CSA certification is available upon request at the extra cost\u003cbr\u003e\u003cbr\u003e\u003ctable border=\"1\" cellpadding=\"1\" cellspacing=\"0\" style=\"width: 100.059%; height: 1168.89px;\"\u003e\n\u003ctbody\u003e\n\u003ctr style=\"height: 67.1875px;\"\u003e\n\u003ctd style=\"width: 28.2216%; height: 67.1875px;\"\u003e\n\u003cp\u003eInput Power\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 70.293%; height: 67.1875px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eInput: AC220V±10%, three-phases, 50\/60 Hz\u003c\/li\u003e\n\u003cli\u003eTotal Power required: 8 KW (~32A)\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 165.156px;\"\u003e\n\u003ctd style=\"width: 28.2216%; height: 165.156px;\"\u003e\n\u003cp\u003eVacuum Chamber\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cdiv\u003e \u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 70.293%; height: 165.156px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eStainless steel (SS304) chamber: \u003cspan style=\"color: rgb(255, 42, 0);\"\u003e \u003cspan style=\"color: rgb(0, 0, 0);\"\u003e400mm ID. x 400 mm D x 450 mm H, polished finish.\u003c\/span\u003e\u003c\/span\u003e \u003c\/li\u003e\n\u003cli\u003e100 mm observation window\u003c\/li\u003e\n\u003cli\u003eHinged-type door for easy sample loading\u003c\/li\u003e\n\u003cli\u003eMotorized shutters for each evaporation boat, \u003c\/li\u003e\n\u003cli\u003eOne ISO-100K port for connection with a turbo pump and a gate valve.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 231.938px;\"\u003e\n\u003ctd style=\"width: 28.2216%; height: 231.938px;\"\u003eVacuum Pump (\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eoptional\u003c\/span\u003e)\u003cbr\u003e\u003ca href=\"PV-DN100-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" border=\"0\" height=\"61\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/DN100CFF-Suite.1.png\" title=\"\" width=\"92\"\u003e\u003c\/a\u003e\u003ca href=\"YTP-550-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"59\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-YTP-550-LD-01.jpg?v=1711673089\" width=\"89\"\u003e\u003c\/a\u003e\u003ca href=\"..\/..\/..\/PfeifferVacuumPump260L.aspx\"\u003e\u003cbr\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 70.293%; height: 231.938px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e260 L\/s turbo molecular pump\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eVacuum level: 5.0x10\u003csup\u003e-6\u003c\/sup\u003e Torr ( after 40 minutes of pumping )\u003c\/li\u003e\n\u003cli\u003eLimit vacuum: 5.0x10\u003csup\u003e-7 \u003c\/sup\u003e Torr ( after baking at 100 -150°C)\u003c\/li\u003e\n\u003cli\u003eLeaking rate: 5.0x10\u003csup\u003e-7 \u003c\/sup\u003ePa.\u003c\/li\u003e\n\u003cli\u003eVacuum Port: DN 100 ISO-K\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eA mechanical pump (\u003ca href=\"YTP-550-LD\" rel=\"noopener\" target=\"_blank\"\u003eYTP-550-LD\u003c\/a\u003e\u003ca href=\"..\/..\/..\/EQ-YTP-550.aspx\"\u003e\u003c\/a\u003e) is required as a backing pump to initially achieve the vacuum level of \u0026lt;1e-2 torr\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 302.74px;\"\u003e\n\u003ctd style=\"width: 28.2216%; height: 302.74px;\"\u003e\n\u003cbr\u003eEvaporation Source\u003cbr\u003e\u0026amp;\u003cbr\u003eSample Holder\u003cbr\u003e\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 70.293%; height: 302.74px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eFour tungsten heating boats with water-cooled shrouds\u003c\/li\u003e\n\u003cli\u003eTungsten heating boat, 70L x 12W x 3H (mm). \u003c\/li\u003e\n\u003cli\u003eSample holder can accept a maximum sample of 150*150mm. Rotation speed: 0-30 rpm\u003c\/li\u003e\n\u003cli\u003eEvaporation distance from source to sample holder is up to 60 mm\u003c\/li\u003e\n\u003cli\u003eThe sample stage with a heating function up to 700 °C\u003c\/li\u003e\n\u003c\/ul\u003e\n  \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GSL-1800X-ZF6-05.jpg?v=1747178101\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"107\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GSL-1800X-ZF6-05.jpg?v=1747178101\" width=\"190\"\u003e\u003c\/a\u003e   \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GSL-1800X-ZF6-04.jpg?v=1747178101\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"117\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GSL-1800X-ZF6-04.jpg?v=1747178101\" width=\"159\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 104.802px;\"\u003e\n\u003ctd style=\"width: 28.2216%; height: 104.802px;\"\u003e\n\u003cspan style=\"color: rgb(255, 42, 0);\"\u003e\u003cspan style=\"color: rgb(0, 0, 0);\"\u003eIn-situ thickness monitor\u003c\/span\u003e (optional)\u003c\/span\u003e\u003cbr\u003e\u003ca href=\"TM106-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" border=\"0\" height=\"45\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQTM106.5.jpg\" title=\"\" width=\"68\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 70.293%; height: 104.802px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eQuartz crystal microbalance is optional for thickness measurements\u003c\/li\u003e\n\u003cli\u003eThe accuracy of thickness control is 1.0 Angstrom.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 106.375px;\"\u003e\n\u003ctd style=\"width: 28.2216%; height: 106.375px;\"\u003e\n\u003cdiv\u003eControl Unit\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 70.293%; height: 106.375px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eVacuum, thickness, and power control are integrated into one control box\u003c\/li\u003e\n\u003cli\u003eThe Control Unit is separated from the vacuum chamber for easy moving\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 28.2216%;\"\u003e\n\u003cdiv\u003eDual-Chamber Glovebox (\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eOptional\u003c\/span\u003e)\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 70.293%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eA dual chamber glovebox with a dimension of L2440mm * W780mm * H900mm\u003c\/li\u003e\n\u003cli\u003eFour gloves will be included\u003c\/li\u003e\n\u003cli\u003e10 KF40 ports at the backside\u003c\/li\u003e\n\u003cli\u003e0.1 ppm O2\/H2O\u003c\/li\u003e\n\u003cli\u003eMore details can be found here \u003ca href=\"https:\/\/mtixtl.com\/products\/vgb-6-ii-ld\"\u003eVGB-6-II-LD\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 103.906px;\"\u003e\n\u003ctd style=\"width: 28.2216%; height: 103.906px;\"\u003e\n\u003cp\u003eFacility Requirement \u003cbr\u003e\u003ca href=\"KJ5000\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"48\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/CW5000DIfu2.jpg\" width=\"72\"\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 70.293%; height: 103.906px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eSpace: 250 SF with height \u0026gt; 6 feet\u003cbr\u003e\n\u003c\/li\u003e\n\u003cli\u003eChilled Water: \u0026gt; 16L\/minute flowing water required for electrode cooling or using a recirculating water chiller\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 86.7812px;\"\u003e\n\u003ctd style=\"width: 28.2216%; height: 86.7812px;\"\u003e\n\u003cp\u003e\u003cspan\u003eCertificate\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 70.293%; height: 86.7812px;\"\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cdiv\u003e\u003cspan\u003eCE certified\u003cbr\u003e\u003c\/span\u003e\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cdiv\u003e\u003cspan\u003eNRTL or CSA certification is available upon request at the extra cost\u003c\/span\u003e\u003c\/div\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44985186091147,"sku":"GSL-1800X-ZF6-PSC","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/GSL-1800X-ZF6-01.jpg?v=1764855094"},{"product_id":"compact-vacuum-carbon-metal-evaporating-coater-with-touch-screen-control-spc-1","title":"Compact Vacuum Carbon \u0026 Metal Evaporating Coater With Touch Screen Control - SPC-1","description":"SPC-1  is a  compact evaporating coater with a rotary sample stage and a separate power supply unit.  It is designed for coating carbon and metallic film on SEM samples up to 2\" in diameter. SPECIFICATIONS: Power Unit A separate evaporation power unit is located at the bottom of the machine for easy maintenance Input Voltage: AC 208 - 240V 50\/60 Hz    (AC 110 - 120V is available via a transformer ) ) Output Power: 10VAC and 50A Max. Power consumption: 700W Touch screen panel to control vacuum, evaporating current, and time Chamber \u0026amp; Specimen stage Quartz vacuum chamber:  size 6\" OD x 10” H The sample stage is located at the bottom: 50 mm Dia, The rotation function of the sample stage is optional at an extra cost. ( Rotating speed: 5 rpm ) The height of the sample stage is adjustable Vacuum pump port KF25 The valves of the gas inlet and outlet are built in. Touch screen panel to control vacuum, evaporating current, and time Evaporation Heater The tungsten heater is at the top of the flange with a manual shutter 3 pcs tungsten heating coils, a carbon fiber string (2 ft long) for use as the source of carbon evaporation, Extra spare tungsten heater is available at extra cost ( $10\/ea ) If you need other evaporation materials, please contact us, we may supply or recommend a source for you Vacuum Vacuum level10-2 Torr by Double Step Rotary Vane Vacuum Pump , and 10-5 torr by a turbo pump, The vacuum pump is not included, please click the link below to choose a pump Overall dimension L360mm x W300mm x H380mm Application Notes For long-term usage, the working current should be kept below 40A For evaporating materials with a low vapor rate, a 30A working current is good enough In order to get a better vacuum and less oxygen, suggest using 5%H2+ 95% N2 to the purging chamber 2-3 times before coating. Please view \" Nat_Nano_Interconnected hollow carbon nanospheres \" published by Nature, on July 27, 2014, in which the carbon evaporator was referred to for making the thin carbon nanosphere layers in Cu substrate. Net Weight 50 kg Reference Video Warranty \u0026amp; Certificate One year limited with lifetime support CE certified\u003cbr\u003e\u003cbr\u003e\u003ctable border=\"1\" cellpadding=\"1\" cellspacing=\"0\" id=\"AutoNumber1\" style=\"width: 918px; border: 1px solid #0099cc; height: 586px;\"\u003e\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"padding-top: 1px; padding-right: 15px; padding-bottom: 1px; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc; width: 200px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003ePower Unit\u003cbr\u003e\u003ca class=\"img\" href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/SPC-12.jpg\" rel=\"lightbox\"\u003e\u003cimg height=\"72\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/SPC-12.jpg\" width=\"111\"\u003e\u003c\/a\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"padding: 1px 15px; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc;\"\u003e\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan\u003eA separate evaporation power unit is located at the bottom of the machine for easy maintenance\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan\u003eInput Voltage:            \u003c\/span\u003eAC 208 - 240V 50\/60 Hz    (AC 110 - 120V is available via a transformer ) )\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan\u003eOutput Power:           \u003cspan\u003e10VAC and 50A Max.\u003cbr\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003ePower consumption:  \u003cspan\u003e 700W\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eTouch screen panel to control vacuum, evaporating current, and time\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"padding-top: 1px; padding-right: 15px; padding-bottom: 1px; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc; width: 200px;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eChamber \u0026amp; Specimen stage\u003cbr\u003e\u003ca class=\"img\" href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/SPC-11.jpg\" rel=\"lightbox\"\u003e\u003cimg height=\"93\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/SPC-11.jpg\" width=\"88\"\u003e\u003c\/a\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"padding: 1px 15px; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc;\"\u003e\u003cul style=\"font-family: Arial; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\n\u003cli\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt; font-family: arial, helvetica, sans-serif; font-size: small; text-indent: 3px;\"\u003eQuartz vacuum chamber:  size  \u003cspan\u003e6\" OD x 10” H \u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt; font-family: arial, helvetica, sans-serif; font-size: small; text-indent: 3px;\"\u003eThe sample stage is located at the bottom: \u003cspan\u003e50 mm Dia, \u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\n\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt; font-family: arial, helvetica, sans-serif; font-size: small; text-indent: 3px;\"\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt; font-family: arial, helvetica, sans-serif; font-size: small; text-indent: 3px;\"\u003e\u003cspan\u003eThe rotation function of the sample stage is optional at an extra cost. ( \u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eRotating speed:  \u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003e5 rpm\u003c\/span\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003e )\u003c\/span\u003e\u003c\/span\u003e\n\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; text-indent: 3px; word-spacing: 0pt;\"\u003eThe height of the sample stage is adjustable         \u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eVacuum pump port KF25\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eThe valves of the gas inlet and outlet are built in.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eTouch screen panel to control vacuum, evaporating current, and time\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"padding: 1px 15px; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc; width: 200px;\"\u003e\u003cdiv style=\"margin-top: 4px; text-indent: 3px; margin-bottom: 4px;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan style=\"letter-spacing: 0pt; text-indent: 3px; word-spacing: 0pt;\"\u003eEvaporation Heater \u003cbr\u003e\u003ca class=\"img\" href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/SPC-1.1.jpg\" rel=\"lightbox\"\u003e\u003cimg height=\"61\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/SPC-1.1.jpg\" width=\"66\"\u003e\u003c\/a\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/div\u003e\u003c\/td\u003e\n\u003ctd style=\"padding: 1px 15px; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc;\"\u003e\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003eThe tungsten heater is at the top of the flange with a manual shutter\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e3 pcs tungsten heating coils, a carbon fiber string (2 ft long) for use as the source of carbon evaporation, \u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003eExtra spare tungsten heater is available at extra cost ( $10\/ea ) \u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003eIf you need other evaporation materials, please contact us, we may supply or recommend a source for you\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"padding: 1px 15px; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc; width: 200px;\"\u003e\u003cdiv style=\"margin-top: 4px; text-indent: 3px; margin-bottom: 4px;\"\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eVacuum \u003cbr\u003e\u003cspan style=\"letter-spacing: 0pt; text-indent: 3px; word-spacing: 0pt;\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/div\u003e\u003c\/td\u003e\n\u003ctd style=\"padding: 1px 15px; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc;\"\u003e\n\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eVacuum level10-2 Torr by \u003ca href=\"http:\/\/mtixtl.com\/vacuumpumptwostepsrotaryvanehighspeedvacuumpump220v226lmwithoil.aspx\"\u003eDouble Step Rotary Vane Vacuum Pump\u003c\/a\u003e, and 10-5 torr by a turbo pump,\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eThe vacuum pump is not included, please click the link below to choose a pump\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003cspan face=\"Arial\"\u003e\u003ca class=\"MagicThumb-swap\" href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-FYP-Pump.1.1.jpg\" id=\"mt-51875631733\" rel=\"zoom-id:Zoomer; caption-source:#2\" rev=\"\/images\/EQ-FYP-Pump.1.1.jpg\"\u003e\u003cimg alt=\"\" height=\"55px\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-FYP-Pump.1.1.jpg\" title=\"\"\u003e\u003c\/a\u003e\u003c\/span\u003e\u003cspan\u003e   \u003c\/span\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/PfeifferVacuumPump10E-3to10E-7mbarwithKF40VacuumTubeKF25Vac.aspx\"\u003e\u003cimg height=\"54\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PfeifferVacuumPump1.jpg\" width=\"81\"\u003e\u003c\/a\u003e\u003cspan\u003e  \u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"padding-top: 1px; padding-right: 15px; padding-bottom: 1px; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc; width: 200px;\"\u003e\u003cspan style=\"font-size: small; letter-spacing: 0pt; word-spacing: 0pt; font-family: arial, helvetica, sans-serif;\"\u003eOverall dimension\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"padding: 1px 15px; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc;\"\u003e\u003cp\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003ca class=\"img\" href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/SPC-1-size.jpg\" rel=\"lightbox\"\u003e\u003cimg height=\"86\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/SPC-1-size.jpg\" width=\"71\"\u003e\u003c\/a\u003eL360mm x W300mm x H380mm\u003c\/span\u003e\u003c\/p\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"padding-top: 1px; padding-right: 15px; padding-bottom: 1px; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc; width: 200px;\"\u003e\u003cspan style=\"font-size: small; letter-spacing: 0pt; word-spacing: 0pt; font-family: arial, helvetica, sans-serif;\"\u003eApplication Notes\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"padding-top: 1px; padding-right: 15px; padding-bottom: 1px; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc;\"\u003e\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eFor long-term usage, the working current should be kept below 40A\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eFor evaporating materials with a low vapor rate, a 30A working current is good enough\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eIn order to get a better vacuum and less oxygen, suggest using 5%H2+ 95% N2 to the purging chamber 2-3 times before coating.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\n\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003ePlease view \"\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003ca href=\"..\/..\/..\/publishpaper\/Nat_Nano_Interconnected_hollow_carbon_nanospheres.pdf\"\u003eNat_Nano_Interconnected hollow carbon nanospheres\u003c\/a\u003e\" published by Nature, on July 27, 2014, in which the carbon evaporator was referred to for making the thin carbon nanosphere layers in Cu substrate.\u003c\/span\u003e\u003c\/span\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003e \u003c\/span\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"padding-top: 1px; padding-right: 15px; padding-bottom: 1px; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc; width: 200px;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eNet Weight\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"padding: 1px 15px; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e50 kg\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"padding-top: 1px; padding-right: 15px; padding-bottom: 1px; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc; width: 200px;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eReference Video\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"padding: 1px 15px; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc;\"\u003e\n\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/machine-manual\/GSL-1100X-SPC-16-3.pdf\"\u003e\u003c\/a\u003e\u003c\/span\u003e\u003cdiv\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003e \u003ca href=\"https:\/\/youtu.be\/4Wr2CcKaIHI\" target=\"_blank\"\u003e\u003cimg height=\"79\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/SPC-1_click.jpg\" style=\"border: 1px solid black;\" width=\"140\"\u003e\u003c\/a\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"padding-top: 1px; padding-right: 15px; padding-bottom: 1px; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc; width: 200px;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cbr\u003eWarranty \u0026amp; Certificate\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"padding: 1px 15px; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; border: 1px solid #0099cc;\"\u003e\u003cul\u003e\n\u003cli\u003e\u003cdiv style=\"margin-top: 4px; margin-bottom: 4px;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eOne year limited with lifetime support\u003c\/span\u003e\u003c\/div\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cdiv style=\"margin-top: 4px; margin-bottom: 4px;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eCE certified\u003c\/span\u003e\u003c\/div\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\u003c\/table\u003e","brand":"MTI","offers":[{"title":"No rotation","offer_id":44985186156683,"sku":"SPC-1","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Rotating at 5 RPM","offer_id":44985186189451,"sku":"SPC-1-R","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/SPC-1_babd91e6-eccc-4486-9190-893cf5ac1779.jpg?v=1764855094"}],"url":"https:\/\/mti-indonesia.com\/collections\/vapor-phase-coating.oembed","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}