{"product_id":"3-rotary-target-plasma-sputtering-coater-including-3-targets-vtc-16-3hd-ld","title":"3 Rotary Target Plasma Sputtering Coater Including 3 Targets - VTC-16-3HD-LD","description":"\u003cp\u003eVTC-16-3HD-LD is a compact three rotary target plasma sputtering coater with a touch screen digital controller, and a substrate heater capable of heating up to 500 °C. It can coat 1- 3 types of metallic materials to sample with a diameter up to 50 mm. Three sputtering targets: gold, silver, and copper are included for immediate use.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eSPECIFICATIONS:\u003c\/strong\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eInput Power\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/IMG_5449-edit.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/IMG_5449-edit.jpg\" width=\"84\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eSingle-phase 220 VAC, 50 \/ 60Hz\u003c\/li\u003e\n\u003cli\u003e700 W (not including vacuum pump)\u003c\/li\u003e\n\u003cli\u003eFor using under 110 VAC, a \u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/tf-220110-1500-ld?_pos=2\u0026amp;_sid=579f69190\u0026amp;_ss=r\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003e1500W transformer\u003c\/a\u003e\u003c\/span\u003e will be needed.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOutput Power\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e1600 VDC\u003c\/li\u003e\n\u003cli\u003e40 mA max\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eVacuum Chamber\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-16-3HD_ChamberDimension.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"49\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-16-3HD_ChamberDimension.jpg\" width=\"74\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eVacuum chamber: 150 mm ID x 165mm OD x 150 mm H, made of high-purity quartz\u003c\/li\u003e\n\u003cli\u003eSealing flange made of stainless steel with flat O-ring\u003c\/li\u003e\n\u003cli style=\"color: rgb(43, 0, 255);\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/vtc-gc?_pos=1\u0026amp;_sid=52d2aeb5a\u0026amp;_ss=r\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003ePlease click here to order the Quartz Chamber replacement.\u003c\/a\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSample Stage\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HD4.1.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"55\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HD4.1.jpg\" title=\"Click to enlarge\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-16-3HD-LD-square.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"55\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-16-3HD-LD-square.jpg\" width=\"73\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eStage size: 50 mm Dia.\u003c\/li\u003e\n\u003cli\u003eSputtering distance range: 25 – 40 mm adjustable\u003c\/li\u003e\n\u003cli\u003eRotatable stage with three sputtering positions (controlled by the touch screen)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOptional Heater for Sample Stage\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eThe Substrate Heater has a maximum heating temperature of 500°C.\u003c\/li\u003e\n\u003cli\u003ePID temperature controller with +\/- 1°C accuracy is integrated into the touchscreen.\u003c\/li\u003e\n\u003cli\u003ePlease select from the options bar.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eControl Panel\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HD1.1.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"55\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HD1.1.jpg\" title=\"Click to enlarge\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e6” color touch screen with PLC integration for easy operation\u003c\/li\u003e\n\u003cli\u003eThe vacuum gauge, sputtering current meter, and substrate temperature control are integrated into the touchscreen panel\u003c\/li\u003e\n\u003cli\u003eAdjustment knobs on the front panel for gas intake and sputtering current control\u003c\/li\u003e\n\u003cli\u003eSputtering position, sputtering timer, and process logging are accessible from the touchscreen\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eShield\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HD3.1.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"55\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HD3.1.jpg\" title=\"Click to enlarge\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eStainless steel \u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/safeguard-cover-for-vtc-16-3hd-mti-vtc-163hd-sc?_pos=1\u0026amp;_sid=512fcb360\u0026amp;_ss=r\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eshield cage\u003c\/a\u003e\u003c\/span\u003e is included for extra protection\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSputtering Targets\u003cbr\u003e\u003cimg alt=\"\" height=\"55\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/autgt.jpg\"\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eTarget size requirements: 47 mm Dia. x 2.5 mm max\u003c\/li\u003e\n\u003cli\u003eIt also can coat\u003ca href=\"https:\/\/mtixtl.com\/collections\/target-a-z\" rel=\"noopener\" target=\"_blank\"\u003e \u003cspan style=\"color: rgb(43, 0, 255);\"\u003eAg, Al, Cr, Ni, Pt, Ti, Sn, Li, Mg\u003c\/span\u003e\u003c\/a\u003e, etc. Almost every kind of metallic material.\u003c\/li\u003e\n\u003cli\u003eWarning\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e \u003ca href=\"https:\/\/docs.google.com\/document\/d\/1wbLS0FebBllKra-0yJs9-dODcn8yZoOe1jjD2LCgCPQ\/pub\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eAluminum, Chromium or Nickel Target\u003c\/a\u003e\u003c\/span\u003e can be coated by this machine, but please review the Recommend Coating Method before using.\u003c\/li\u003e\n\u003cli\u003ePlease RF Plasma Megnetron Sputtering for coating Alumina\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eVacuum Pump\u003cbr\u003e(Optional)\u003cbr\u003e\u003cbr\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eBuilt-in KF25 vacuum port for connecting to a vacuum pump (Pic #1)\u003c\/li\u003e\n\u003cli\u003eA vacuum pump with a KF25 connector is required, but not included. User may choose\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eA \u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"FYP\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003edouble-stage vacuum pump\u003c\/a\u003e\u003c\/span\u003e for vacuum up to 1.0E-2 Torr (Click Pic #2 to order)\u003c\/li\u003e\n\u003cli\u003eOr a \u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/pv-hvs-ld?_pos=3\u0026amp;_sid=c761fd9c3\u0026amp;_ss=r\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eturbopump\u003c\/a\u003e\u003c\/span\u003e for vacuum up to 1.0E-5 Torr (Click Pic #3 to order)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eThe vacuum pump can be plugged into the power outlet on the left of the coater for automatic control\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HDPump.1.jpg\" target=\"_blank\" rel=\"noopener\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HDPump.1.jpg\" width=\"75\" height=\"50\"\u003e\u003c\/a\u003e\u003cbr\u003e\u003ca href=\"FYP\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-FYP-Pump.1.2.jpg\" width=\"90\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/pv-hvs-ld?_pos=3\u0026amp;_sid=c761fd9c3\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"55\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PfeifferVacuumPumpEco_TUV.jpg\" width=\"83\"\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDimensions\u003cbr\u003e \u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HDDimension.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC163HDDimension.jpg\" title=\"Click to enlarge\" width=\"90\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-16-3HD-dim.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-16-3HD-dim.jpg\" width=\"90\"\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eNet Weight\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e50 kg\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCompliance\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eCE approval\u003c\/li\u003e\n\u003cli\u003eNRTL certification is NOT available temporarily.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cdiv\u003eApplication Notes\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eFor the best film-substrate adhesion strength, please clean the substrate surface before coating:\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eUltrasonic cleaning (Click the picture below to order) with the following sequential baths - (1) acetone, (2) isopropyl alcohol - to remove oil and grease. Blow dry the substrate with N2, then hot bake in a vacuum to remove absorbed moisture\u003c\/li\u003e\n\u003cli\u003ePlasma cleaning (Click the picture below to order) may be needed for surface roughening, surface chemical bonds activation, or additional contamination removal\u003c\/li\u003e\n\u003cli\u003eA thin buffer layer (~5 nm), such as Cr, Ti, Mo, Ta, could be applied to improve the adhesion of metals and alloys\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003cul\u003e\n\u003cli\u003eA two-stage pressure regulator (not included) should be installed on the gas cylinder to limit the output pressure of the gas to below 0.02 MPa for safe usage. Please use \u0026gt; 5N purity Ar gas for plasma sputtering\u003c\/li\u003e\n\u003cli\u003eHIGH VOLTAGE! Sputtering heads connect to high voltage. For safety, the operator must shut down the equipment before sample loading and target changing operations\u003c\/li\u003e\n\u003cli style=\"color: rgb(255, 42, 0);\"\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eThis model is not suitable for coating light metallic materials such as Al, Mg, Zn, Ni, etc. due to its low energy. Please consider our magnetron sputtering coater or thermal evaporation coater. Click the pictures below for detail\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cdiv\u003e\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/nrtl-certified-5l-heated-ultrasonic-cleaner-w-digital-timer280x140x150-mm-eq-vgt-1860qtd-ld?_pos=1\u0026amp;_sid=90e1a3d4a\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/UCF.1.jpg\" width=\"90\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003eUltrasonic Cleaner\u003c\/span\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003cdiv\u003e\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/pce-3?_pos=2\u0026amp;_sid=d2b419595\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PDC36Gmain2.1.jpg\" width=\"90\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003ePlasma Cleaner\u003c\/span\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003cdiv\u003e\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/vtc-16-sm?_pos=2\u0026amp;_sid=eabaf69f7\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/MegnetronDC.jpg\" width=\"95\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003eMagnetron Sputtering\u003c\/span\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003cdiv\u003e\n\u003ca href=\"https:\/\/iuy4v7vt9lvh7zk4-63846646008.shopifypreview.com\/products\/gsl-1700x-spc2?_pos=5\u0026amp;_sid=a5197e92f\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"65\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GSL1700XSPC2.3.jpg\" width=\"98\"\u003e\u003cspan style=\"color: rgb(43, 0, 255);\"\u003eThermal Evaporation\u003c\/span\u003e\u003c\/a\u003e\u003cbr\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Non-Heatable","offer_id":44985185697931,"sku":"VTC16HD3S","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Heatable","offer_id":44985185730699,"sku":"VTC16HD3SH","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/VTC163HD.3.1.1.1.1_091d89b7-bd18-47cc-8bbf-e70acf0fab2e.jpg?v=1764855090","url":"https:\/\/mti-indonesia.com\/products\/3-rotary-target-plasma-sputtering-coater-including-3-targets-vtc-16-3hd-ld","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}