{"product_id":"8-5-rf-plasma-cleaner-etcher-with-vacuum-pump-12-liter-13-56-mhz-80w-max-eq-pce-8","title":"8.5\" RF Plasma Cleaner \/ Etcher with Vacuum Pump. (12 Liter, 13.56 Mhz, 80W max.) - EQ-PCE-8","description":"PCE-8 is a plasma cleaner or etching unit with 8.5 \"Dia x 14“\"Length quartz chamber and 0 - 80W variable RF power. It is designed to clean and remove nano-scale organic contamination on the substrate or wafer up to 8\" using air, oxygen, or argon plasma.  The rate of organic removal is about 20 nm\/min Maximum at high RF power. It is an excellent tool to pre-clean single crystal substrate before epitaxial film deposition to achieve better quality.  If you do not have experience for plasma surface cleaning, please refer to the articles as follows. It also can be used as a plasma etcher at higher RF power. McIntire, Theresa M., S. Rachelle Smalley, John T. Newberg, A. Scott Lea, John C. Hemminger, Barbara J. Finlayson-Pitts. \"Substrate Changes Associated with the Chemistry of Self-Assembled Monolayers on Silicon.\" Langmuir (2006) 22(13): 5617-5624. Sumner, Ann Louise, Erik J. Menke, Yael Dubowski, John T. Newberg,  etc. \"The Nature of Water on Surfaces of Laboratory Systems and Implications for Heterogeneous Chemistry in the Troposphere.\" Phys. Chem. Chem. Phys. (2004) 6: 604-613. Mennicke, Ulrike, Tim Salditt. \"Preparation of Solid-Supported Lipid Bilayers by Spin-Coating.\" Langmuir (2002) 18: 8172-8177 . SPECIFICATIONS Input Power AC 220V, 50\/60 Hz, RF Power:    80 W Max.    ( standard for cleaning) Vacuum Pump:   normal 550W, start 750W Total Power:    830W max. Working current  \u0026lt;= 3A RF Power RF power is adjustable within 0 - 80W RF frequency:   13,56 MH Plasma Chamber 8.5 \" O.D x 8.2\" I.D x 14\" L high purity quartz chamber Volume: 12 L Hinged-type front flange made of aluminum 2.3\" Dia. ( 60mm) quartz window for easy observation Totally RF radiation shield with zero RF leaking Control Panel 6\" color touch screen to control all parameters automatically for plasma cleaning, such as vacuum level, gas flow rate, RF power level, and cleaning time. Built in one channel Mass flow meter ( 0 - 500ml\/minute) to control gas flow within +\/- 0.5 ml\/m Vacuum Pump and Valve 240 L\/m Heavy Duty Rotary Vane Vacuum Pump with Exhaust Filter, KF25D Adaptor and Clamp are included for immediate use The ultimate total pressure of 50 mTorr Inert Gas Many inert gases can be chosen for plasma cleaning such as N2, Ar, Air, and mixed gas depending on what kind of material will be treated. ( not included in the package) No flammable gas shall be used for the plasma cleaner Optional May use 2\" - 6\" wafer quartz boat , as round wafer sample holder.( click underlined to order at extra cost ) May use a 2 - 4 channel gas delivery system to fill mixing gases ( click underlined to order ) May order quartz boat for clean standard wafer 1- 6 \" Overall Dimensions 620 L ×600 W ×600 H, mm 24\" x 23.5\" x 23.5\"  ( inch ) Shipping Weight \u0026amp; Dimension 350 lbs with a vacuum pump 48\"x40\"x37\" Warranty One year limited warranty with lifetime support ( no warranty for Pyrex glass chamber ) Operation Manual Application Note Please test the best plasma power based on your application by yourselves For plasma cleaning,  usually keep RF power between 10 - 30W depending on the sample material to be cleaner. For Plasma etching,   usually keep RF power between 35 - 80 W depending on the sample material to be cleaner. High power RF power supply for etching is available upon request up to 300W at extra cost.\u003cbr\u003e\u003cbr\u003e\u003ctable border=\"1\" cellpadding=\"1\" cellspacing=\"0\" id=\"AutoNumber1\" style=\"width: 913px; height: 843px; border: 1px solid #0099cc;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eInput Power \u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003eAC 220V, 50\/60 Hz, \u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003eRF Power:    80 W Max.    ( standard for cleaning)   \u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003eVacuum Pump:   normal 550W, start 750W\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003eTotal Power:    830W max. \u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003eWorking current  \u0026lt;= 3A\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e \u003c\/span\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003eRF Power\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003eRF power is adjustable within 0 - 80W\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003eRF frequency:   13,56 MH\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cstrong\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003c\/span\u003e\u003c\/strong\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cbr\u003ePlasma Chamber\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\n\u003cul style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; text-indent: 3px; word-spacing: 0pt;\"\u003e\u003cspan\u003e8.5\u003c\/span\u003e\u003cspan\u003e\" O.D x 8.2\" I.D\u003c\/span\u003e\u003cspan\u003e x 14\" L \u003c\/span\u003e high purity quartz chamber\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003eVolume: 12 L\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt; text-indent: 3px; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eHinged-type front flange made of aluminum\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt; text-indent: 3px; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e2.3\" Dia. ( 60mm) quartz window for easy observation\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt; text-indent: 3px; font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eTotally RF radiation shield with zero RF leaking\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eControl Panel\u003cbr\u003e\u003ca class=\"img\" href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-PCE-8-rs.jpg%20\" rel=\"lightbox\"\u003e\u003cimg height=\"56\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-PCE-8-rs.jpg\" style=\"border: 1px solid black;\" width=\"84\"\u003e\u003c\/a\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e6\" color touch screen to control all parameters automatically for plasma cleaning, such as vacuum level, gas flow rate, RF power level, and cleaning time.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003eBuilt in one \u003cstrong\u003echannel Mass flow meter\u003c\/strong\u003e ( 0 - 500ml\/minute) to control gas flow within +\/- 0.5 ml\/m\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eVacuum Pump and Valve\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"http:\/\/www.mtixtl.com\/EQ-YTP-550.aspx\" style=\"letter-spacing: 0pt; word-spacing: 0pt; font-family: Arial, Helvetica, sans-serif; font-size: 9pt; font-weight: bold;\"\u003e240 L\/m Heavy Duty Rotary Vane Vacuum Pump with Exhaust Filter, KF25D Adaptor and Clamp\u003c\/a\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt; color: #996600; font-family: Arial, Helvetica, sans-serif; font-size: 9pt; font-weight: bold;\"\u003e are included for immediate use\u003c\/span\u003e\n\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003eThe ultimate total pressure of 50 mTorr\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eInert Gas \u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cdiv\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eMany inert gases can be chosen for plasma cleaning such as N2, Ar, Air, and mixed gas depending on what kind of material will be treated. ( not included in the package)\u003c\/span\u003e\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cdiv\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eNo flammable gas shall be used for the plasma cleaner\u003c\/span\u003e\u003c\/div\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eOptional\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cdiv\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eMay use\u003cstrong\u003e\u003ca href=\"..\/..\/..\/quartzboatfordiffusionof4waferprocessing25waferboat.aspx\"\u003e \u003c\/a\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/quartzcricublesboats.aspx\"\u003e2\" - 6\" wafer quartz boat\u003c\/a\u003e\u003c\/strong\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/quartzcricublesboats.aspx\"\u003e,\u003c\/a\u003e as round wafer sample holder.( click underlined to order at extra cost )\u003c\/span\u003e\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eMay use a 2 - 4 channel gas delivery system to fill mixing gases (\u003c\/span\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003e click underlined to order )\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\n\u003c\/li\u003e\n\u003cli\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eMay order \u003ca href=\"http:\/\/www.mtixtl.com\/quartzcricublesboats.aspx\"\u003e\u003cspan style=\"text-decoration: underline;\"\u003equartz boat for clean standard wafer 1- 6 \"\u003c\/span\u003e\u003c\/a\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cspan\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/gasmixinganddeliverysysytem.aspx\" style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cimg height=\"51\" id=\"ctl00_masterContent_productImageGallery_detailPreview\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/11112.jpg?ts=129881653573407267\" width=\"179\"\u003e\u003c\/a\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan style=\"letter-spacing: 0pt; word-spacing: 0pt;\"\u003e  \u003c\/span\u003e\u003c\/span\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PCE802-3.jpg\" style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cimg height=\"61\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PCE802-3.jpg\" title=\"Click to enlarge\" width=\"76\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PCE802-4.jpg\" style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e\u003cimg height=\"61\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PCE802-4.jpg\" title=\"Click to enlarge\" width=\"80\"\u003e\u003c\/a\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/quartzcricublesboats.aspx\"\u003e\u003cimg alt=\"\" border=\"0\" class=\"product-list-img\" height=\"55\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/DSCN9032.2.jpg\" title=\"\" width=\"83\"\u003e\u003c\/a\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/TrifieldBroadBandMicrowaveDetector0.1MHz50MHz-EQ-MD-100XE.aspx\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/PCE805.jpg\" rel=\"prettyPhoto[products]\" style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\" title=\"\"\u003e\u003c\/a\u003e\u003c\/span\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eOverall Dimensions\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e620 L ×600 W ×600 H, mm\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e24\" x 23.5\" x 23.5\"  ( inch )\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cstrong\u003eShipping Weight \u0026amp; Dimension\u003c\/strong\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cstrong\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e350 lbs with a vacuum pump\u003c\/span\u003e\u003c\/strong\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cstrong\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003e48\"x40\"x37\"\u003c\/span\u003e\u003c\/strong\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eWarranty\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eOne year limited warranty with lifetime support ( no warranty for Pyrex glass chamber ) \u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eOperation Manual\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\n\u003cp style=\"margin-top: 4px; margin-bottom: 4px;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/EQ-PCE-8-video.aspx\"\u003e\u003cimg height=\"87\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-PCE-8-vp.jpg?v=1710908800\" style=\"border: 1px solid black;\" width=\"130\"\u003e\u003c\/a\u003e    \u003c\/span\u003e\u003ca href=\"machine-manual\/EQ-PCE-8-033115.pdf\" style=\"letter-spacing: 0pt; word-spacing: 0pt; font-size: 10pt; font-family: Verdana, Arial, Helvetica, sans-serif;\"\u003e\u003cimg alt=\"\" border=\"0\" height=\"26\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/1-Operation_Manual.jpg\" width=\"180\"\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; width: 200px; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eApplication Note\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"border-image: initial; text-align: left; letter-spacing: 0pt; font-family: Arial; word-spacing: 0pt; vertical-align: top; padding: 1px 15px 1px 15px; border: 1px solid #0099cc;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan face=\"Arial\" style=\"font-family: Arial; font-size: small;\"\u003ePlease test the best plasma power based on your application by yourselves\u003c\/span\u003e\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; letter-spacing: 0pt; word-spacing: 0pt;\"\u003eFor plasma cleaning,  usually keep RF power between 10 - 30W depending on the sample material to be cleaner.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan face=\"Arial\" style=\"font-family: Arial; font-size: small;\"\u003eFor Plasma etching,   usually keep RF power between 35 - 80 W depending on the sample material to be cleaner.\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003e\u003cspan face=\"Arial\" style=\"font-family: Arial; font-size: small;\"\u003eHigh power RF power supply for etching is available upon request up to 300W at extra cost.\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44984932368523,"sku":"PCE8","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/EQPCE8mian_136ae7ac-f8a2-4b2d-b49e-98291599b505.jpg?v=1764852128","url":"https:\/\/mti-indonesia.com\/products\/8-5-rf-plasma-cleaner-etcher-with-vacuum-pump-12-liter-13-56-mhz-80w-max-eq-pce-8","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}