Computerized Mass Flow Controller (Max. 1000 SCCM) - MFC-COM

Computerized Mass Flow Controller (Max. 1000 SCCM) - MFC-COM

0-100 SCCM
RM0.00 MYR
RM0.00 MYR
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Computerized Mass Flow Controller (Max. 1000 SCCM) - MFC-COM
  • Computerized Mass Flow Controller (Max. 1000 SCCM) - MFC-COM
  • Computerized Mass Flow Controller (Max. 1000 SCCM) - MFC-COM
  • Computerized Mass Flow Controller (Max. 1000 SCCM) - MFC-COM
Computerized Mass Flow Controller (Max. 1000 SCCM) - MFC-COM

Computerized Mass Flow Controller (Max. 1000 SCCM) - MFC-COM

SKU: mfc-com

Price: RFQ

Description

 MFC-A is a digital mass flow controller for MTI's CVD/PECVD/Graphene furnace to control the gas flowing rate for different research purposes. This product did not have a display, it must be controlled by the computer using manufacturer software. Digital Mass Flow Controller for Gas Control Systems Cost effective, High accuracy and fast response, Multi-gas, Auto-zero, Compatible interfaces. Used for accurately controlling and measuring the gas flow rate of high pressure. Ideal for CVD and other gas mixture applications. International standard DB15 pin fitting; connects to MTI Furnaces with Swagelok1/4 fitting. Specification Full scale range (N 2 ) ( 0100,200,500,1000)SCCM Other range can be customized at extra cost, please email to info@mtixtl.com Accuracy ±1.0% S.P. (≥35% F.S.) ±0.35% F.S.(35% F.S.) Repeatability ±0.2% FS Linearity ±0.5% FS Response Time ≤1sec Valve Rest Position Normally Closed or Normally Open Temperature Coefficient Zero: ≤±0.05% F.S./ Span: ≤±0.1% F.S.≤30 SLM Span: ≤±0.2% F.S.30 SLM Zero Drift 0.6%F.S. per year without autozero Surface Finish(Ra) 25Ra Operation Temperature 545 Communication Interface for input Signal Digital: RS485 DeviceNet TM Analog:(05)VDC or (420)mA Communication Interface for Output Signal Digital: RS485 DeviceNet TM Analog:(05)VDC or (420)mA Power Supply ±11 ~ ±16 VDC or +11 ~ +28 VDC(400mA) Electronic Connector D-sub 9 pins male, D-sub 15 pins male, DeviceNet TM male Differential Pressure (0.050.35) Mpa≤ 10000SCCM (0.10.35) Mpa20000SCCM,30000SCCM (0.20.45) Mpa50000SCCM Max Pressure 3MPa Leak integrity 1×10 -9 atm·cc / sec He1×10 -10 Pa·m 3 / sec He Seals Materials Viton ; Neoprene Surface Chemistry (EP only) —— Fittings Swagelok1/4” Weight 1kg

Full scale range (N2)

( 0100,200,500,1000)SCCM

Other range can be customized at extra cost, please email to info@mtixtl.com

Accuracy

±1.0% S.P. (≥35% F.S.)

±0.35% F.S.(35% F.S.)

Repeatability

±0.2% FS

Linearity

±0.5% FS

Response Time

≤1sec

Valve Rest Position

Normally Closed or Normally Open

Temperature Coefficient

Zero: ≤±0.05% F.S./

Span: ≤±0.1% F.S.≤30 SLM

Span: ≤±0.2% F.S.30 SLM

Zero Drift

0.6%F.S. per year without autozero

Surface Finish(Ra)

25Ra

Operation Temperature

545

Communication Interface for input Signal

Digital: RS485

DeviceNetTM

Analog:(05)VDC or (420)mA

Communication Interface for Output Signal

Digital: RS485

DeviceNetTM

Analog:(05)VDC or (420)mA

Power Supply

±11 ~ ±16 VDC or +11 ~ +28 VDC(400mA)

Electronic Connector

D-sub 9 pins male, D-sub 15 pins male,

DeviceNetTM male

Differential Pressure

(0.050.35) Mpa≤10000SCCM

(0.10.35) Mpa20000SCCM,30000SCCM

(0.20.45) Mpa50000SCCM

Max Pressure

3MPa

Leak integrity

1×10-9 atm·cc / sec He1×10-10 Pa·m3 / sec He

Seals Materials

Viton; Neoprene

Surface Chemistry (EP only)

——

Fittings

Swagelok1/4”

Weight

1kg