{"product_id":"otf-1200x-iii-hvc-ld","title":"Three Zones Tube Furnace (1200C) with High Vacuum Station (1.0E-4 torr) + 4 Channel MFC Gas Station for CVD - OTF-1200X-III-HVC-LD","description":"The OTF-1200X-III-HVC series furnace workstation consists of an OTF-1200X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station, and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-4 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and inputs the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion, and other thermo-treatments under vacuum status and shielding gas protection. The furnace comes with a 4-channel digital LED display mas flow gas control station.\u003cbr\u003e\u003cbr\u003e\u003ctable style=\"width: 99.9696%; height: 999.079px;\"\u003e\n\u003ctbody\u003e\n\u003ctr style=\"height: 39.1667px;\"\u003e\n\u003ctd rowspan=\"13\" style=\"width: 19.5409%; height: 559.843px;\"\u003eOTF-1200X-III series tube furnace\u003cbr\u003e\u003cbr\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF-1200X-III-HVC-part.jpg?v=1706131654\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/OTF-1200X-III-HVC-part_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 14.7422%; height: 39.1667px;\"\u003eCasing\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 39.1667px;\"\u003eDouble-layer steel casing with air cooling.\u003cbr\u003eBuilt-in thermostat to control Cooling running automatically when case \u0026gt; 55°C.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 58.75px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 58.75px;\"\u003eProcessing Tube\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 58.75px;\"\u003eMaterial: Fused quartz tube\u003cbr\u003eOne processing tube is included with the furnace. \u003cbr\u003ePlease select the tube size in the option bar to update the price.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 101.024px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 101.024px;\"\u003e\n\u003cbr\u003eThermal Block Placement\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 101.024px;\"\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Quartz_tube_block.jpg?v=1706132457\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Quartz_tube_block_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e     \u003c\/span\u003e\u003ca href=\"https:\/\/mtixtl.com\/search?q=quartz+cricubles+boats\u0026amp;options%5Bprefix%5D=last\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/thumb_quartz_crucible_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/span\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e Click here to choose a crucible\u003c\/span\u003e\u003c\/a\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5833px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 19.5833px;\"\u003ePower\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 19.5833px;\"\u003e7KW\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5833px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 19.5833px;\"\u003eRated Voltage\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 19.5833px;\"\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eAC 208-240V Single phase, 50\/60Hz\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5833px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 19.5833px;\"\u003eHeating Element\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 19.5833px;\"\u003eFe-Cr-Al Alloy doped by Mo\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 39.1667px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 39.1667px;\"\u003eWorking Temp.\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 39.1667px;\"\u003eMax. Heating Temp.: 1200°C\u003cbr\u003eContinuous Working Temp.: 1100°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5833px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 19.5833px;\"\u003eHeat-up Rate\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 19.5833px;\"\u003eHeat-up rate: 1~20°C\/min programmable\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5833px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 19.5833px;\"\u003eHeating Zone Length\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 19.5833px;\"\u003eTotal heating zone: 900mm (300mm + 300mm + 300mm)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 106.319px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 106.319px;\"\u003eTemp. Controller\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 106.319px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eThree precision temperature controllers to control three zones separately.\u003c\/li\u003e\n\u003cli\u003ePID automatic control with 30 steps programmable segments.\u003c\/li\u003e\n\u003cli\u003eTemperature accuracy: ±1°C\u003c\/li\u003e\n\u003cli\u003eThermocouple: K type built inside the furnace\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 78.3333px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 78.3333px;\"\u003eVacuum Seal\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 78.3333px;\"\u003eOne pair of stainless steel vacuum flange with:\u003cbr\u003e- one mechanical pressure gauge\u003cbr\u003e- two needle valves \u003cbr\u003e- one KF-40 connector for the high vacuum station.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5833px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 19.5833px;\"\u003eRated Voltage\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 19.5833px;\"\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eAC 208-240V Single Phase, 50\/60Hz\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5833px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 19.5833px;\"\u003eDimension\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 19.5833px;\"\u003e1100(L) x 450(W) x 670(H), mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 97.9167px;\"\u003e\n\u003ctd rowspan=\"5\" style=\"width: 19.5409%; height: 215.417px;\"\u003eHigh Vacuum Station\u003c\/td\u003e\n\u003ctd style=\"width: 14.7422%; height: 97.9167px;\"\u003eStructure\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 97.9167px;\"\u003eMobile cart size: 600 (L) x 600 (W) x 700(H), mm\u003cbr\u003eMax. Loading: 600 Lbs on top\u003cbr\u003eMolecular pump control Panel: LCD digital\u003cbr\u003eInside: Pfeiffer vacuum pump made in Germany\u003cbr\u003eA vacuum sensor is included\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 58.75px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 58.75px;\"\u003eVolume Flow Rate\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 58.75px;\"\u003eNitrogen N2 33 L\/s\u003cbr\u003eHelium He 39 L\/s (2340L\/minute)\u003cbr\u003eHydrogen H2 32 L\/s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5833px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 19.5833px;\"\u003eWorking Range\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 19.5833px;\"\u003eFrom 1000 mbar to \u0026lt;1E-7 mbar\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5833px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 19.5833px;\"\u003eUltimate Pressure\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 19.5833px;\"\u003e\u0026lt;1E-8 mbar (without any leaking )\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5833px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 19.5833px;\"\u003eVoltage \u0026amp; Power\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 19.5833px;\"\u003e110VAC or 220VAC, 110W\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 184.653px;\"\u003e\n\u003ctd rowspan=\"3\" style=\"width: 19.5409%; height: 223.82px;\"\u003eMass Flow Gas Control\u003cbr\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\u003ca href=\"gsl-lcd\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/plcmfc_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 14.7422%; height: 184.653px;\"\u003eStructure\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 184.653px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"gsl-lcd\" rel=\"noopener\" target=\"_blank\"\u003e2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software\u003c\/a\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/FourChannelGasMixingStationwithPLCTouchPanelandMFC-EQ-GSL-4Z-LCD.aspx\"\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003cli\u003eLED display\u003c\/li\u003e\n\u003cli\u003e4 channel MFC Made of 316 stainless steel with gas flow range as below:\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eController 1: 0~100SCCM\u003c\/li\u003e\n\u003cli\u003eController 2: 1~199 SCCM\u003c\/li\u003e\n\u003cli\u003eController 3: 1~199 SCCM\u003c\/li\u003e\n\u003cli\u003eController 4: 1~499 SCCM\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003e4 Channel gas goes through a Gas mixing tank: Φ\u003cspan lang=\"EN-US\"\u003e80X120mm \u003c\/span\u003e\u003cspan lang=\"EN-US\"\u003eDimension: 600(L) x 745(W) x 700\u003c\/span\u003e(H), mm\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5833px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 19.5833px;\"\u003ePower\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 19.5833px;\"\u003e18W\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5833px;\"\u003e\n\u003ctd style=\"width: 14.7422%; height: 19.5833px;\"\u003eRated Voltage\u003c\/td\u003e\n\u003ctd style=\"width: 64.0251%; height: 19.5833px;\"\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eAC 208-240V, Single phase, 50\/60Hz\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e, \u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eOptional\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e\u003ca href=\"gsl-lcd\" rel=\"noopener\" target=\"_blank\"\u003eClick the picture below to order a bubbler or evaporator for CVD\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\u003cstrong\u003e\u003ca href=\"bl-ss\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg border=\"0\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/bl200STRUCTURE_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\" title=\"\"\u003e\u003c\/a\u003e       \u003ca href=\"lvd-f1\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg border=\"0\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/LVD4_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\" title=\"\"\u003e\u003c\/a\u003e\u003c\/strong\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCompliance\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cstrong\u003eCE Certified\u003c\/strong\u003e\u003c\/li\u003e\n\u003cli\u003eNRTL or CSA certification at extra cost.\u003cstrong\u003e (please click marks below to learn details)\u003c\/strong\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eNotes\u003c\/td\u003e\n\u003ctd\u003e- Please click \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Cal-OTF1200-3.pdf?v=1739990375\" rel=\"noopener\" target=\"_blank\"\u003ehere\u003c\/a\u003e to see our typical temperature profile calibration result at various temperatures.\u003cbr\u003e- In order to obtain accurate temperature inside the tube furnace, you need to calibrate temperature by yourself. \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/How-calibrate_8.doc?v=1739555010\" rel=\"noopener\" target=\"_blank\"\u003ePlease click here to learn how.\u003c\/a\u003e\u003cbr\u003e- \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/How-to-tube_flange_1.doc?v=1739578848\" rel=\"noopener\" target=\"_blank\"\u003eHow to set up a ceramic tube and vacuum flange for the MTI Tube furnace.\u003c\/a\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003e\u003cbr\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eWarning\u003c\/span\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cdiv style=\"text-align: start;\"\u003e\u003ca href=\"cga580\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQGRCGA580_100x100.jpg\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003cp\u003e\u003ca href=\"cga580\" rel=\"noopener\" target=\"_blank\"\u003eClick here to learn the installation of a gas regulator\u003c\/a\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eThe tube furnaces with quartz tube are designed for use under vacuum and low pressure \u0026lt; 0.2 bar \/ 3 psi\u003c\/li\u003e\n\u003cli style=\"color: rgb(255, 42, 0);\"\u003e\u003cem\u003e\u003cspan style=\"color: rgb(255, 42, 0);\"\u003eAttention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. \u003c\/span\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/twostagebrass0-100psianalyticalcylinderregulatorcga-580withneedlevalve-fa-y12244d580.aspx\"\u003e\u003cbr\u003e\u003c\/a\u003e\u003c\/em\u003e\u003c\/li\u003e\n\u003cli\u003eThe flow rate for gases should be limited to \u0026lt; 200 SCCM (or 200 ml\/min) for reducing thermal shocks to the tube\u003c\/li\u003e\n\u003cli\u003eVacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44984810340491,"sku":"OTF1200XIIIC4HV80","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/OTF-1200X-III-HVC-LD.jpg?v=1764850845","url":"https:\/\/mti-indonesia.com\/products\/otf-1200x-iii-hvc-ld","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}