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Quartz Wafer Boat (Ø1"- 12", 25/boat) - QB-Series
  • Quartz Wafer Boat (Ø1"- 12", 25/boat) - QB-Series
Quartz Wafer Boat (Ø1"- 12", 25/boat) - QB-Series

Quartz Wafer Boat (Ø1"- 12", 25/boat) - QB-Series

SKU: qb-series

Price: RFQ

Specifications

 Features: Wafer boats are made of ultra-high purity quart (4N purity) for diffusion, oxidation, and annealing up to 1200 o C. Each boat can only carry one size of wafers up to 25 pieces from 1" to 12" diameter by 0.5 mm thick separately. Please choose the correct size of the wafer from the product option bar. Size Suitable MTI Tubes 1" OTF-1200X-S50 tube furnace (2" tube furnace) 1" wafer with a quartz boat Mechanical Drawing 1" wafer with quartz boat can be placed into 2" tube Place 1" wafer in the center of the furnace 2" OTF1200-3 tube furnace (3" tube furnace) 2" wafer with a quartz boat 2" Quartz boat cross-section drawing (mm) - Length 180 mm 2" wafer with quartz boat can be placed into 3" tube Place 2" wafer in center of the furnace 3" OTF1200-4 tube furnace 3" wafer with a quartz boat 3" Quartz boat cross-section drawing (mm) - length 180 mm 3" wafer with quartz boat can be placed into 4" tube Place 3" wafer in center of the furnace 4" OTF1200X5L tube furnace 4" wafer with a quartz boat 4" Quartz boat cross-section drawing (mm) - length 180 mm 4" wafer with quartz boat can be placed into 5" tube Place 4" wafer in center of the furnace 4" x 4" OTF-1200X-5L , VBF-1200X-H8 , OTF-1100X-8.5 tube furnaces 4"x4" square wafer with a quartz boat 4" x 4" Square wafer with quartz boat can be placed into 8" tube Place 4" wafer in center of the furnace 6" GSL1100X-8.5-S-UL tube furnace, GSL1100X-8.5-III tube furnace, Compact Vacuum Chamber Furnace EQ-VBF-1200X The dimension of 6" quartz boat 6" Quartz boat cross-section drawing (mm) - length 190 mm 6" wafer with quartz boat can be placed into 7" tube The 6" quart boat can fit in VBF1200 Muffle Furnace 8" GSL1100X-11-III tube furnace The dimension of 8" quartz boat 8" Quartz boat cross-section drawing (mm) - length 173 mm 8" wafer with quartz boat can be placed into 8.5" tube Place 8" wafer in center of the furnace 12" OTF-1100X-III The dimension of 12" quartz boat 12" Quartz boat cross-section drawing (mm) - length 172 mm 12" wafer with quartz boat Place 12" wafer in center of the furnace Inspect your delivery: Please check the package for damages before accepting delivery. Should damages found, please keep all packaging materials, take pictures, and report immediately to carrier/MTI.

Size Suitable MTI Tubes

1"

OTF-1200X-S50 tube furnace 
(2" tube furnace)
1" wafer with a quartz boat
 
Mechanical Drawing

1" wafer with quartz boat
can be placed into 2" tube

Place 1" wafer in the center of the furnace
2"

OTF1200-3 tube furnace 
(3" tube furnace)
2" wafer with a quartz boat

2" Quartz boat cross-section drawing (mm) - Length 180 mm

2" wafer with quartz boat
can be placed into 3" tube

Place 2" wafer in center of the furnace
3"

OTF1200-4 tube furnace
3" wafer with a quartz boat


3" Quartz boat cross-section drawing (mm) - length 180 mm

3" wafer with quartz boat can be placed into 4" tube

Place 3" wafer in center of the furnace
4"

OTF1200X5L tube furnace
4" wafer with a quartz boat
4" Quartz boat cross-section drawing (mm) - length 180 mm
4" wafer with quartz boat can be placed into 5" tube

Place 4" wafer in center of the furnace
4" 
x
4"

OTF-1200X-5L, 
VBF-1200X-H8, 
OTF-1100X-8.5
tube furnaces

4"x4" square wafer with a quartz boat

 

4" x 4" Square wafer with quartz boat can be placed into 8" tube
Place 4" wafer in center of the furnace
6"

 

GSL1100X-8.5-S-UL tube furnace, 
GSL1100X-8.5-III tube furnace,
Compact Vacuum Chamber Furnace EQ-VBF-1200X
The dimension of 6" quartz boat
6" Quartz boat cross-section drawing (mm) - length 190 mm

6" wafer with quartz boat can be placed into 7" tube

The 6" quart boat can fit in VBF1200 Muffle Furnace
8"

 

GSL1100X-11-III tube furnace
The dimension of 8" quartz boat
8" Quartz boat cross-section drawing (mm) - length 173 mm

8" wafer with quartz boat can be placed into 8.5" tube
Place 8" wafer in center of the furnace
12"
OTF-1100X-III
The dimension of 12" quartz boat 		 
12" Quartz boat cross-section drawing (mm) - length 172 mm

12" wafer with quartz boat

Place 12" wafer in center of the furnace

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