Description
Thermal oxide Layer
-
Research Grade, about 80 % useful area
- SiO2 layer on 2" Silicon wafer
- Oxide layer thickness: 300 nm ( 3000A) +/-10%
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Refractive index: 1.455
Silicon Wafer Specifications:
- Conductive type: N type/ As- doped
- Resistivity: 0.001-0.005 ohm-cm
- Size: 50.8 diameter +/- 0.5 mm x 0.50 +/- 0.025 mm
- Orientation: (100) +/- 1o
- Polish: one side polished
- Surface roughness, Ra: < 5A (RMS)
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