{"product_id":"vacuum-pressure-regulating-system-with-mechanical-pump-upto-10-2-torr-gzk-pid-101","title":"Vacuum Pressure Regulating System with Mechanical Pump (upto 10^-2 Torr) - GZK-PID-101","description":"The GZK-PID-101 is a sensitive, compact and PID-controlled vacuum pressure regulating system. The system consists of a mechanical pump which can control the output of gas flow by the mechanical pump and the PID system to keep the pressure at a constant level. This system comes with a pressure measuring transducer for precise pressure monitoring. The system is compatible with MTI furnaces to achieve ideal pressure conditions for PVD, CVD, PECVD and HPCVD processes. This system has been widely used for applications such as diffusion, oxidization, expitaxy, CVD, plasma sputtering, coating and optical fiber melting.\u003cbr\u003e\u003cbr\u003e\u003ctable border=\"1\" cellpadding=\"1\" cellspacing=\"0\" style=\"height: 0px; border-color: #0099cc; border-width: 1px; width: 1000px; border-style: solid;\"\u003e\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 200px;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e    Power Requirement\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 800px;\"\u003e\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e208 ~ 240 VAC, single phase, 50 ~ 60 Hz.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eInput power: 1 kW.\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 200px;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e    Vacuum pump system\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 800px;\"\u003e\n\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003eMechanical pump\u003c\/span\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cul style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003ePumping capacity: 400 liters per minutes.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eAmbient temperature: 5 ~ 40 °C (40 ~ 105 F).\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003eNoise level: 58 dB.\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003eUltimate pressure: 10^-2 Torr.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003ePumps are connected by KF-40 port.\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 200px;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e    Pressure Monitoring System\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 800px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eAnti-Corrosive Capacitance Diaphragm Gauge (\u003ca href=\"http:\/\/www.mtixtl.com\/Anti-CorrosiveCapacitanceDiaphragmGaugewithPowerSupply-EQ-PCG-554.aspx\"\u003eEQ-PGC-554-LD\u003c\/a\u003e). \u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003ePressure range: 3.8 × 10^-5 ~ 1125 Torr.\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e            \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-PGC-554-LD.jpg\"\u003e\u003cimg height=\"68\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-PGC-554-LD.jpg\" style=\"border: 1px solid black;\" width=\"102\"\u003e\u003c\/a\u003e\u003c\/span\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 200px;\" valign=\"top\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e    Pressure Control System\u003cbr\u003e   \u003cbr\u003e    \u003ca class=\"MagicThumb\" href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GZK-PID-103Gcontrol_panel.png\" target=\"\/images\/GZK-PID-103Gcontrol_panel.png\"\u003e\u003cimg height=\"80\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GZK-PID-103Gcontrol_panel.png\" style=\"border: 1px solid black;\" width=\"134\"\u003e\u003c\/a\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 800px;\"\u003e\n\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003ePressure control sensitivity (argon as input gas):\u003c\/span\u003e\u003cbr\u003e\u003cul\u003e\n\u003cli\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e760 mTorr (100 Pa) ~ 225 Torr (30000 Pa) with 500 sccm argon gas;\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e600 mTorr (80 Pa) ~ 200 Torr (26660 Pa) with 300 sccm argon gas;\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e300 mTorr (40 Pa) ~ 185 Torr (24660 Pa) with 100 sccm argon gas;\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003e180 mTorr (24 Pa) ~ 100 Torr (13333 Pa) with 50 sccm argon gas.\u003c\/span\u003e\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\"\u003ePressure control accuracy:\u003cbr\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e180 mTorr ~ 2.5 Torr (\u0026lt;±5% of reading);\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e2.5 Torr ~ 10 Torr (\u0026lt;±4% of reading);\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e10 Torr ~ 200 Torr (\u0026lt;±2% of reading);\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 200px;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e    Product Dimension\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 800px;\"\u003e\u003cul\u003e\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e600 × 745 × 700 mm (L × W × H).\u003c\/span\u003e\u003c\/li\u003e\u003c\/ul\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 200px;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e    Weight \u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 800px;\"\u003e\u003cul\u003e\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e~80 kg (175 lbs.).\u003c\/span\u003e\u003c\/li\u003e\u003c\/ul\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 200px;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e    Warranty\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 800px;\"\u003e\u003cul\u003e\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eOne-year limited warranty with lifetime support.\u003c\/span\u003e\u003c\/li\u003e\u003c\/ul\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 200px;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e    Applications\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 800px;\"\u003e\u003cul\u003e\n\u003cli\u003e\u003cspan style=\"font-size: small; font-family: arial, helvetica, sans-serif;\"\u003eIt is recommended that attach GZK-PID-103G on other MTI products, such as \u003ca href=\"http:\/\/www.mtixtl.com\/search.aspx?find=tube+furnace%2c\"\u003etube furnaces\u003c\/a\u003e, \u003ca href=\"http:\/\/www.mtixtl.com\/search.aspx?find=cvd%2c\"\u003eCVD\u003c\/a\u003e, \u003ca href=\"http:\/\/www.mtixtl.com\/search.aspx?find=PECVD%2c\"\u003ePECVD\u003c\/a\u003e and \u003ca href=\"http:\/\/www.mtixtl.com\/search.aspx?find=HPCVD%2c\"\u003eHPCVD\u003c\/a\u003e systems.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003eThis system is compatible with our \u003ca href=\"http:\/\/www.mtixtl.com\/search.aspx?find=magnetron+sputtering%2c\"\u003emagnetron sputtering deposition system\u003c\/a\u003e.\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 200px;\"\u003e\u003cspan style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e    Operation Instructions\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 800px;\"\u003e\u003cspan face=\"arial, helvetica, sans-serif\" size=\"2\" style=\"font-family: arial, helvetica, sans-serif; font-size: small;\"\u003e         \u003ca href=\"http:\/\/www.mtixtl.com\/request\"\u003e  \u003cimg height=\"26\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/1-Operation_Manual.jpg\" width=\"188\"\u003e\u003c\/a\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44985119211659,"sku":"GZK101","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/GZKPID103G_MAINPIC_1a775ba7-baa6-4c27-8722-51b5a745147d.jpg?v=1764854350","url":"https:\/\/mti-indonesia.com\/products\/vacuum-pressure-regulating-system-with-mechanical-pump-upto-10-2-torr-gzk-pid-101","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}