Description
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Main Features |
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| Vacuum Chuck |
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| Vacuum Pump |
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Programmable Control ![]() |
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| Input Power |
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Gas Inlet |
6mm diameter gas inlet port allows customers to fill desired gas into the chamber, which can make coating under variable gas flow environment.![]() |
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Liquid Injection![]() |
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| Optional |
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| Application Notes |
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| Compliance |
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| Warnings |
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