Description
VTC-100PA is a tabletop spin coater up to 5" diameter at Max. 10000 rpm. The spin head actuator is a precision DC servo motor with accurate speed and acceleration control. The substrate can be held by vacuum (for thinner objects). The device has a user-friendly keyboard and LCD display for programming various parameters up to 12 programs, 6 segments. Spin duration, spin speed, and acceleration can be programmed from the front panel. All components in the device are corrosion-protected to make it cleanroom-compatible. This spin coaster can be used inside the glovebox with Ar gas.
SPECIFICATIONS:
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Main Features |
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| Vacuum Chuck |
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| Vacuum Pump |
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Programmable Control |
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| Input Power |
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Gas Inlet |
6mm diameter gas inlet port allows customers to fill desired gas into the chamber, which can make coating under variable gas flow environment. |
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Liquid Injection![]() |
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| Optional |
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| Application Notes |
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| Compliance |
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| Warnings |
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