{"product_id":"vtc-1rf-spc","title":"2 in 1 Thin Film Coater: Magnetrons Sputtering \u0026 Thermal Evaporation - VTC-1RF-SPC","description":"\u003cp\u003eVTC-1RF-SPC is a 2 in 1 thin film coater that integrates one 1\" sputtering head and one thermal evaporating crucible inside the stainless steel vacuum chamber. It is an excellent coater to produce multi-layer film for material research. \u003cbr\u003e\u003c\/p\u003e\n\u003ctable border=\"1\" cellpadding=\"1\" cellspacing=\"0\" style=\"width: 100%;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003e\n\u003cbr\u003e Structure\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Sketch-E-S.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"83\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Sketch-E-S.png\" width=\"128\"\u003e\u003c\/a\u003e       \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Index.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"85\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Index.png\" width=\"124\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003e\n\u003cbr\u003eInput Power\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eSingle-phase 220 VAC+\/- 10%, 50 \/ 60 Hz\u003c\/li\u003e\n\u003cli\u003e4200 W (including a vacuum pump and water chiller)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003eMegnetron Sputtering Head \u003cbr\u003eand Power Source\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Bent-head.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"79\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Bent-head.png\" width=\"52\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eOne\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e \u003ca href=\"HVMSS-SPC-1\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003e1\" Magnetron Sputter head with a High Vacuum Quick Connector\u003c\/a\u003e\u003c\/span\u003e is included. The head is made from sputtering from bottom to up ( Please click picture left )\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eThe distance between the sputtering head and the sample stage is adjustable from 60 to 100 mm\u003c\/li\u003e\n\u003cli\u003eA manually rotated baffle plate is built between the sputtering head and the sample stage to avoid contamination\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eOne sputtering power source is included. You may choose either DC or RF source based on target materials:\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cul\u003e\n\u003cul\u003e\n\u003cli\u003eDC source: 500 W power for coating metallic materials (Pic 1)\u003c\/li\u003e\n\u003cli\u003eRF source: 300 W power, 13.56 MHz frequency for coating non-conductive materials (Pic 2)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n             \u003ca href=\"DC-500-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"51\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC600.jpg\" width=\"77\"\u003e\u003c\/a\u003e -- Pic 1 \u003ca href=\"RF-300I-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/DSC_6670.1.jpg\" width=\"74\"\u003e\u003c\/a\u003e -- Pic 2\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003e\n\u003cp\u003eThermal Evaporating \u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/crucible-T.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"76\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/crucible-T.png\" width=\"166\"\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eOne evaporation source is installed on the bottom of the vacuum chamber\u003c\/li\u003e\n\u003cli\u003eThe tungsten heating coil is built in an alumina crucible.\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eSS316 crucible is available upon request for evaporating Li-metal\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eAn S-type thermal couple is the installed bottom of the crucible\u003c\/li\u003e\n\u003cli\u003eMax. evaporation temperature is 1350oC \u003c\/li\u003e\n\u003cli\u003eTemperature is controlled precisely by a programmable temperature controller in a touchscreen panel.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003e\n\u003cp\u003eVacuum Chamber\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Topflang.png?v=1706229260\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Topflang_100x100.png?v=1706229260\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003cdiv style=\"text-align: left;\"\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/lifting.png?v=1706241101\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/lifting_100x100.png?v=1706241101\" style=\"margin-bottom: 16px; float: none;\"\u003e\u003c\/a\u003e\u003c\/div\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eVacuum chamber: 250 mm Dia. x 360 mm Height, made of stainless steel\u003c\/li\u003e\n\u003cli\u003eView window: 100 mm diameter quartz glass with vacuum-sealed\u003c\/li\u003e\n\u003cli\u003eThe top flange of the chamber can move up \u0026amp; down by an electric motor to load the sample\u003c\/li\u003e\n\u003cli\u003eThe rotary and heatable sample holder is installed on the top flange \u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eThe sample holder size: 100 mm\u003c\/li\u003e\n\u003cli\u003eThe heating temperature of the sample holder: 700oC Max ±3. with 30 segments programmable\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eThe turbo-pump ( included) is connected to the chamber directly via a KF60 flange with an electric gate valve\u003c\/li\u003e\n\u003cli\u003eElectrodes of evaporation are through via the KF63 flange\u003c\/li\u003e\n\u003cli\u003eOne KF35 flange is built to install an optional film thickness-measuring device \u003c\/li\u003e\n\u003cli\u003eGas inlet and outlet port and valves are included\u003c\/li\u003e\n\u003cli\u003eMax vacuum level: 8x10-6 torr cold state )\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003eWater Chiller\u003cbr\u003e\u003ca href=\"KJ5000\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/CW5000DIfu2.1.jpg\" title=\"Click to enlarge\" width=\"75\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eOne digital temperature-controlled\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e \u003ca href=\"KJ5000\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003erecirculating water chiller\u003c\/a\u003e\u003c\/span\u003e is included. (Click picture to see details)\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eRefrigeration range: 5~35 °C\u003c\/li\u003e\n\u003cli\u003eFlow rate: 16 L\/min\u003c\/li\u003e\n\u003cli\u003ePump pressure: 14 psi\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003eControl Panel\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003cul\u003e\n\u003cli\u003e7\" color touchscreen panel is installed to control\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eEvaporation temperature\u003c\/li\u003e\n\u003cli\u003eSample stage temperature and rotation speed\u003c\/li\u003e\n\u003cli\u003eVacuum pump on\/ off and display vacuum level\u003c\/li\u003e\n\u003cli\u003eVacuum valve on\/off\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003e\n\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"TM106-LD\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eThickness Monitor\u003c\/a\u003e\u003c\/span\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/Film-thickness-controlle.aspx\"\u003e\u003c\/a\u003e (Optional)\u003cbr\u003e\u003ca href=\"TM106-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"56\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQTM106.5.jpg\" width=\"84\"\u003e\u003c\/a\u003e\u003ca href=\"TFMS-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"54\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQTFCASLD.1.jpg\" width=\"81\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003cul\u003e\n\u003cli\u003ePrecise quartz \u003cspan style=\"color: rgb(43, 0, 255);\"\u003e\u003ca href=\"TM106-LD\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eFilm Thickness Monitor\u003c\/a\u003e \u003c\/span\u003eis optional, which can be into the chamber to monitor coating thickness with an accuracy of 0.10 Å\u003c\/li\u003e\n\u003cli\u003ePrecision\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e \u003ca href=\"TFMS-LD\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eThin Film \u0026amp; Coating Analysis Systems - TFMS-LD\u003c\/a\u003e\u003c\/span\u003e is available at extra cost\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 24.1935%;\"\u003e\n\u003cp\u003eCompliance\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 75.8065%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eCE approval\u003c\/li\u003e\n\u003cli\u003eNRTL certification is available upon request at extra cost, please contact our sales representative for the quote.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Three (3) RF Power Supplies","offer_id":44985185403019,"sku":"VTC600HD3-RF3","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"One (1) DC Power Only","offer_id":44985185435787,"sku":"VTC-600-3HD-1DC","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Two (2) RF \u0026 One (1) DC Power Supplies","offer_id":44985185468555,"sku":"VTC600HD3-RF2","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Three (3) DC Power Supplies","offer_id":44985185501323,"sku":"VTC600HD3-DC3","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Two (2) DC \u0026 One (1) RF Power Supplies","offer_id":44985185534091,"sku":"VTC600HD3-DC2","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"One (1) RF Power Only","offer_id":44985185566859,"sku":"VTC-600-3HD-1RF","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/VTC-1RF-SPC-mian.1_624f1459-5ada-4dc1-a9a2-9bfd97c323be.png?v=1764855088","url":"https:\/\/mti-indonesia.com\/products\/vtc-1rf-spc","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}