{"product_id":"vtc-3hd-vp","title":"3 Heads RF\/DC Plasma Sputtering Coater for Powders with 1 PPM Gas Purification System - VTC-3HD-VP","description":"\u003cp\u003eVTC-3HD-VP is a three-head 1\" RF Plasma magnetron sputtering system designed for powder coating to form various core cells structure. DC and RF power sources are included for coating both metallic and insulation material. The vibration sample holder is built inside the chamber to make powder jumping during the coating, and the gas purification system is used to replace turbopump and provide O2 and H2O less than 1 ppm environmental fro better quality coating.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eSPECIFICATIONS\u003c\/strong\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003ctable border=\"1\" cellpadding=\"1\" cellspacing=\"0\" style=\"font-size: 0.875rem;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eInput Power\u003cbr\u003e\u003ca href=\"TF-220110-3000-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" border=\"0\" height=\"51\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/thumb_300wtransf1.jpg?v=1706297430\" title=\"\" width=\"73\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eSingle-phase 220VAC +\/- 10%, 50 \/ 60 Hz\u003c\/li\u003e\n\u003cli\u003e2000 W (including a vacuum pump and water chiller)\u003c\/li\u003e\n\u003cli\u003eIf the voltage is 110 V, a 3000 W transformer can be ordered at MTI (Click the picture to the left for detail)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eSource Power\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC6002HDdischarging.png?v=1706229092\" rel=\"prettyPhoto[products]\" title=\"\"\u003e\u003cbr\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eThree sputtering power sources are integrated into one control box (Click picture below to see detailed specs)\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eDC source: 500 W power for coating metallic materials (Pic 1)\u003c\/li\u003e\n\u003cli\u003eRF source: 300 W power, 13.56 MHz frequency for coating non-conductive materials (Pic 2)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003ca href=\"DC-500-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"51\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC600.jpg\" width=\"77\"\u003e\u003c\/a\u003e -- Pic 1 \u003ca href=\"RF-300I-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/DSC_6670.1.jpg\" width=\"74\"\u003e\u003c\/a\u003e -- Pic 2\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eMagnetron Sputtering Head\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003eThree 1\" magnetron sputtering heads with water cooling jackets are included and inserted into the quartz chamber via quick clamps\u003c\/li\u003e\n\u003cli\u003eRF cable replacement can be purchased at MTI \u003c\/li\u003e\n\u003cli\u003eOne manually operated shutter is built on the flange \u003c\/li\u003e\n\u003cli\u003e16 L\/min recirculating water chiller is included for cooling sputtering heads \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ca href=\"KJ5000\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" border=\"0\" height=\"59\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/CW5000DIfu2.1.jpg\" title=\"\" width=\"89\"\u003e\u003c\/a\u003ePic. 1\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eSputtering Target\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eTarget size requirement: 1\" diameter x 1\/8\" thickness max\u003c\/li\u003e\n\u003cli\u003eSputtering distance range: 50 – 80 mm adjustable\u003c\/li\u003e\n\u003cli\u003eSputtering angle range: 0 – 25° adjustable \u003c\/li\u003e\n\u003cli\u003e1\" diameter Cu target and Al\u003csub\u003e2\u003c\/sub\u003eO\u003csub\u003e3\u003c\/sub\u003e target are included for demo testing\u003c\/li\u003e\n\u003cli\u003eVarious oxide 1” sputtering targets are available upon request at extra cost\u003c\/li\u003e\n\u003cli\u003eFor target bonding, 1 mm and 2 mm copper backing plates are included. Silver epoxy and extra copper backing plates  can be ordered at MTI\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eVacuum Chamber\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cdiv\u003e\n\u003cul\u003e\n\u003cli\u003eVacuum chamber: 256 mm OD x 238 mm ID x 276 mm Height, made of high purity quartz\u003c\/li\u003e\n\u003cli\u003eSealing flange: 274 mm Dia. made of Aluminum with high-temperature silicone O-ring\u003c\/li\u003e\n\u003cli\u003eStainless steel shield cage is included for 100% shielding of RF radiation from the chamber\u003c\/li\u003e\n\u003cli\u003eMax vacuum level: 1.0E-5 Torr with turbopump and chamber baking \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eVibration Sample Holder\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GIF_1503c24d-91e2-4ca3-aa20-6a97ef2961a4.gif?v=1733438875\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"65\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/GIF.gif\" width=\"69\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/mix.png?v=1706240462\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"58\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/mix.png\" width=\"81\"\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eThe amplification of vibration is adjustable from 400 - 2000 RPM in terms of motor speed\u003c\/li\u003e\n\u003cli\u003eOne 2\" powder reservoir (cup shape) is on the vibration motor. Powder bounce and self rotate during the coating process.\u003c\/li\u003e\n\u003cli\u003eSuggested powder quantity: 5 - 20 ml\u003c\/li\u003e\n\u003cli\u003eSuggested particle size: 1 ~ 1000 microns ( Powder must be vacuum dry before coting)\u003c\/li\u003e\n\u003cli\u003eThe sample stage of blade mixing is available upon request for the larger amount of powder\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eGas Purification System\u003cbr\u003e\u003ca href=\"RMP-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" border=\"0\" height=\"56\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/IMG_2617-02.2.jpg\" title=\"\" width=\"72\"\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eMTI innovative technology-- using a gas purification system to replace turbopump to get battery coating.\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eTwo-columns of Molecular sieves are Built-in in the system. which can remove oxygen and humidity less than \u0026lt; 1 PPM\u003c\/li\u003e\n\u003cli\u003eRegeneration Temperature Controller\u003cspan lang=\"EN-US\"\u003eis built-in for automatically regenerating the filters\u003c\/span\u003e\n\u003c\/li\u003e\n\u003cli\u003eAutomatically purging function is built-in for quick reducing O2 \u0026lt; 200ppm \u0026amp; H2O \u0026lt; 50 ppm before recycling.\u003c\/li\u003e\n\u003cli\u003eThe automatic pressure control system is built in to keep the pressure at a constant level\u003c\/li\u003e\n\u003cli\u003e6\" color PLC touch panel is included which can set and display the humidity and pressure level\u003cstrong\u003e\u003cspan lang=\"EN-US\"\u003e.\u003c\/span\u003e\u003c\/strong\u003e\n\u003c\/li\u003e\n\u003cli\u003e\u003cspan lang=\"EN-US\"\u003eClick the picture left column to see detailed specifications\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003eAfter purification with O2 \u0026amp; H2O \u0026lt; 1 PPM, the chamber pressure can be set up a suitable vacuum level ( 50 - 100 m-torr) for sputtering, which is much better than 10-5 torr vacuum.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOptional\u003cbr\u003e\u003ca href=\"TM106-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"56\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQTM106.5.jpg\" width=\"84\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003ePrecise quartz\u003cspan style=\"color: rgb(43, 0, 255);\"\u003e \u003ca href=\"TM106-LD\" rel=\"noopener\" style=\"color: rgb(43, 0, 255);\" target=\"_blank\"\u003eFilm Thickness Monitor\u003c\/a\u003e\u003c\/span\u003e is optional, which can be into the chamber to monitor coating thickness with an accuracy of 0.10 Å\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eCompliance\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eCE approval\u003c\/li\u003e\n\u003cli\u003eNRTLcertification is available upon request at extra cost, please contact our sales representative for the quote.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003cp\u003eOptional\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cul\u003e\n\u003cli\u003eThis coater may be placed into a standard glovebox with modification for air-sensitive materials. (Pic. 1)\u003c\/li\u003e\n\u003cli\u003elarger 3 head coater with 12\" Vac. chamber, 8\" dia. sample order, and 3x 2\" sputtering guns, is available upon request (Pic. 2)\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ca href=\"VTC-600-3HD-GB\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"54\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VGB-600-2HD-GB.1.jpg\" width=\"81\"\u003e\u003c\/a\u003ePic. 1 \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-3HD-12.png?v=1706228931\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"57\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-3HD-12.png\" width=\"88\"\u003e\u003c\/a\u003ePic. 2\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Three (3) RF Power Supplies","offer_id":44985185206411,"sku":"VTC600HD3-RF3","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"One (1) DC Power Only","offer_id":44985185239179,"sku":"VTC-600-3HD-1DC","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Two (2) RF \u0026 One (1) DC Power Supplies","offer_id":44985185271947,"sku":"VTC600HD3-RF2","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Three (3) DC Power Supplies","offer_id":44985185304715,"sku":"VTC600HD3-DC3","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"Two (2) DC \u0026 One (1) RF Power Supplies","offer_id":44985185337483,"sku":"VTC600HD3-DC2","price":0.0,"currency_code":"MYR","in_stock":false},{"title":"One (1) RF Power Only","offer_id":44985185370251,"sku":"VTC-600-3HD-1RF","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/VTC-3-RF-GP_b984be70-dae6-4d9c-8be0-b6fd53977ec8.jpg?v=1764855087","url":"https:\/\/mti-indonesia.com\/products\/vtc-3hd-vp","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}