{"product_id":"vtc6002hdld","title":"DC\/RF Dual-Head High Vacuum 2” Magnetron Plasma Sputtering Coater - VTC-600-2HD-LD","description":"VTC-600-2HD-LD is a compact magnetron sputtering system with dual 2\" target sources, e.g., one DC source for coating metallic film, and the other RF source for coating non-metallic material. This coating system is capable for co-sputtering or deposition of multiple layer films for a wide range of materials, such as alloy, ferroelectric, semiconductor, ceramic, dielectric, optical, PTFE, etc. (Revised since 9\/25\/2015. Film Thickness Monitor is not included.) SPECIFICATIONS Power 208-240 VAC, single phase, 50\/60 Hz, 500 W Source Power DC source : 500 W power for coating metallic materials RF source : 300 W power, 13.56 MHz frequency for coating non-conductive materials Magnetron Sputtering Head Two 2\" Magnetron Sputtering Heads with water cooling jackets and shutters One is connected to a DC source for metallic materials The other is connected to the RF source for non-conductive materials Target size: 2\" diameter with a thickness of 0.1 - 5 mm Sputtering targets are optional Recommended Sputtering Recipe and Useful Tips 3 RF heads model is available Extra 148 cm RF cable can be ordered at extra cost for the replacement Four heads sputtering system is available upon request (Pic. 5) Pic. 5 Vacuum Chamber Stainless steel vacuum chamber: Ø300 × 300 mm H One 100 mm glass view port. Hinged type top flange for easy sample access Here is a glance of the vacuum chamber Sample Stage Ø140 mm rotating and heating sample stage up to 500°C Rotation speed: 1 - 20 rpm Single-point programmable temperature controller Gas Flow Control Two mass flow controllers (MFC) Flow rate: 0 – 200 sccm nitrogen calibrated 1\/4\" vent port. Vacuum Pump Station (Optional) For air-sensitive targets, such as Al, Ti, Cr, etc, or base pressure \u0026lt;1e-2 torr, a pumping station is recommended Turbo pump . 63 L\/s turbomolecular pump , or 260 L\/s turbomolecular pump Backing pump 240 L\/min rotary vane pump , or 200 L\/min dry scroll pump Water Chiller (Optional) Chilled water is required One digital temperature-controlled recirculating water chiller is recommended Refrigeration range: 5~35 °C Flow rate: 16 L\/min Pump pressure: 14 psi Film Thickness Measurement (Optional ) Quartz crystal microbalance for in-situ film thickness measurement is optional. Accuracy up to 1Å Overall Dimensions Lid closed: 48\" × 28\" × 32\" Lid open: 48\" × 28\" × 37\" Net Weight of Coater 160 kg Shipping Weight \u0026amp; Dimensions Total 2 Pallets #1: 520 lbs, 52\" x 40\" x 50\" #2: 420 lbs, 48\" x 40\" x 45\" Compliance CE approval NRTL Certification (UL 1450) is available upon request at extra cost Application Notes Please use 5N purity Argon gas for plasma sputtering. For best performance, the non-conductive targets must be installed with a copper backing plate. Please refer to the instruction video below for target bonding (Click Pic #3 below) MTI supplies single crystal substrate from A to Z (Click Pic #4 below to order) MTI Sputtering Coaters have successfully coated ZnO on Al 2 O 3 substrate at 500 °C (XRD profile in Pic #5 below) HIGH VOLTAGE! Sputtering heads connect to high voltage. For safety, the operator must shut down the RF \/ DC generator before sample loading and target changing operations DO NOT use DI water in a water chiller. Use distilled water The coater can be placed into glovebox as the Pic. 6 at extra cost ( must order glovebox together) Pic 3 Pic 5 Pic. 6\u003cbr\u003e\u003cbr\u003e\u003ctable border=\"1\" cellpadding=\"1\" cellspacing=\"0\" style=\"width: 100%; height: 1957.34px;\"\u003e\n\u003ctbody\u003e\n\u003ctr style=\"height: 47.5938px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 47.5938px;\"\u003ePower\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 47.5938px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e208-240 VAC, single phase, 50\/60 Hz, 500 W\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 67.1875px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 67.1875px;\"\u003eSource Power\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 67.1875px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"DC-500-LD\" target=\"_blank\"\u003eDC source\u003c\/a\u003e: 500 W power for coating metallic materials \u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"RF-300I-LD\" target=\"_blank\"\u003eRF source\u003c\/a\u003e: 300 W power, 13.56 MHz frequency for coating non-conductive materials\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 279.938px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 279.938px;\"\u003e\n\u003cp\u003eMagnetron Sputtering Head\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 279.938px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"hvmssspc2f\" rel=\"noopener\" target=\"_blank\"\u003eTwo 2\" Magnetron Sputtering Heads\u003c\/a\u003e with water cooling jackets and shutters\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eOne is connected to a DC source for metallic materials\u003c\/li\u003e\n\u003cli\u003eThe other is connected to the RF source for non-conductive materials\u003c\/li\u003e\n\u003cli\u003eTarget size: 2\" diameter with a thickness of 0.1 - 5 mm\u003cbr\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/mtixtl.com\/collections\/target-a-z\" rel=\"noopener\" target=\"_blank\"\u003eSputtering targets\u003c\/a\u003e are optional\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-2HD_Application_Note_1.pdf?v=1733441895\" rel=\"noopener\" target=\"_blank\"\u003eRecommended Sputtering Recipe and Useful Tips\u003c\/a\u003e\u003cbr\u003e\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003e\n\u003ca href=\"vtc6003hdld\" rel=\"noopener\" target=\"_blank\"\u003e3 RF heads model\u003c\/a\u003e is available\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"spc-cable\" rel=\"noopener\" target=\"_blank\"\u003eExtra 148 cm RF cable\u003c\/a\u003e can be ordered at extra cost for the replacement\u003c\/li\u003e\n\u003cli\u003eFour heads sputtering system is available upon request (Pic. 5)\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"hvmssspc2f\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/1.26.jpg\" width=\"75\"\u003e\u003c\/a\u003e    \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC6002HDdischarging.png?v=1706229092\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC6002HDdischarging.png?v=1706229092\" title=\"Click to enlarge\" width=\"74\"\u003e\u003c\/span\u003e\u003c\/a\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e     \u003c\/span\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Plasma.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Plasma.jpg\" width=\"76\"\u003e\u003c\/span\u003e\u003c\/a\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e      \u003c\/span\u003e\u003ca href=\"spc-cable\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/SPC-Cable.jpg\" width=\"75\"\u003e\u003c\/span\u003e\u003c\/a\u003e   \u003cspan style=\"font-size: 0.875rem;\"\u003e \u003c\/span\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/4head.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"55\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/4head.jpg\" width=\"64\"\u003e\u003c\/span\u003e\u003c\/a\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e Pic. 5\u003c\/span\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 176.969px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 176.969px;\"\u003e\n\u003cp\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eVacuum Chamber\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 176.969px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eStainless steel vacuum chamber: Ø300 × 300 mm H\u003c\/li\u003e\n\u003cli\u003eOne 100 mm glass view port. \u003c\/li\u003e\n\u003cli\u003eHinged type top flange for easy sample access\u003c\/li\u003e\n\u003cli\u003eHere is a glance of the vacuum chamber\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/window.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/window.png\" width=\"72\"\u003e\u003c\/a\u003e  \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-2HD.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-2HD.jpg\" width=\"75\"\u003e\u003c\/span\u003e\u003c\/a\u003e     \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD_chamber_front.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD_chamber_front.jpg\" width=\"36\"\u003e\u003c\/span\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 157.375px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 157.375px;\"\u003e\n\u003cp\u003e\u003cbr\u003e\u003cbr\u003eSample Stage\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 157.375px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eØ140 mm rotating and heating sample stage up to 500°C \u003c\/li\u003e\n\u003cli\u003eRotation speed: 1 - 20 rpm\u003c\/li\u003e\n\u003cli\u003eSingle-point programmable temperature controller\u003cbr\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/sampleholder.1.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/sampleholder.1.png\" width=\"79\"\u003e\u003c\/a\u003e  \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD_rotary_sample_holder.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD_rotary_sample_holder.jpg\" width=\"58\"\u003e\u003c\/span\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 106.375px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 106.375px;\"\u003e\n\u003cp\u003eGas Flow Control\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 106.375px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eTwo \u003ca href=\"mfc-7b\" rel=\"noopener\" target=\"_blank\"\u003emass flow controllers\u003c\/a\u003e (MFC)\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eFlow rate: 0 – 200 sccm\u003c\/li\u003e\n\u003cli\u003enitrogen calibrated\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003e1\/4\" vent port.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 165.156px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 165.156px;\"\u003e\n\u003cp\u003eVacuum Pump Station\u003c\/p\u003e\n\u003cp\u003e(Optional)\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 165.156px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eFor air-sensitive targets, such as Al, Ti, Cr, etc, or base pressure \u0026lt;1e-2 torr, a pumping station is recommended\u003c\/li\u003e\n\u003cli\u003eTurbo pump . \n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"pv-dn63-ld\" rel=\"noopener\" target=\"_blank\"\u003e63 L\/s turbomolecular pump\u003c\/a\u003e, or\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"pv-dn100-ld\" rel=\"noopener\" target=\"_blank\"\u003e260 L\/s turbomolecular pump\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003cli\u003eBacking pump\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"ytp-550-ld\" rel=\"noopener\" target=\"_blank\"\u003e240 L\/min rotary vane pump\u003c\/a\u003e, or\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"ofsp12-ld\" rel=\"noopener\" target=\"_blank\"\u003e200 L\/min dry scroll pump\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 106.375px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 106.375px;\"\u003e\n\u003cp\u003eWater Chiller\u003c\/p\u003e\n\u003cp\u003e(Optional)\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 106.375px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eChilled water is required\u003c\/li\u003e\n\u003cli\u003eOne digital temperature-controlled \u003ca href=\"KJ5000\" rel=\"noopener\" target=\"_blank\"\u003erecirculating water chiller\u003c\/a\u003e is recommended\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eRefrigeration range: 5~35 °C\u003c\/li\u003e\n\u003cli\u003eFlow rate: 16 L\/min\u003c\/li\u003e\n\u003cli\u003ePump pressure: 14 psi\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 58.7812px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 58.7812px;\"\u003eFilm Thickness Measurement\u003cbr\u003e(Optional )\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 58.7812px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"tm106-ld\" rel=\"noopener\" target=\"_blank\"\u003eQuartz crystal microbalance\u003c\/a\u003e for in-situ film thickness measurement is optional. Accuracy up to 1Å\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 86.5938px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 86.5938px;\"\u003e\n\u003cp\u003e\u003cbr\u003eOverall Dimensions\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 86.5938px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/vtc-600-2HD_dimension-1.jpg\"\u003eLid closed: 48\" × 28\" × 32\"\u003c\/a\u003e\u003cbr\u003e\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/vtc-600-2HD_dimension-1.jpg\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/vtc-600-2HD_dimension-1.jpg\" width=\"70\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/vtc-600-2HD_dimension-2.jpg\"\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/vtc-600-2HD_dimension-2.jpg\"\u003eLid open: 48\" × 28\" × 37\"\u003c\/a\u003e\u003cbr\u003e\u003cbr\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/vtc-600-2HD_dimension-2.jpg\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/vtc-600-2HD_dimension-2.jpg\" width=\"72\"\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 47.5938px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 47.5938px;\"\u003e\n\u003cp\u003eNet Weight of Coater\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 47.5938px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e160 kg\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 86.7812px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 86.7812px;\"\u003e\n\u003cp\u003eShipping Weight \u0026amp; Dimensions\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 86.7812px;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cstrong\u003eTotal 2 Pallets\u003c\/strong\u003e\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cstrong\u003e#1: 520 lbs, 52\" x 40\" x 50\"\u003c\/strong\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cstrong\u003e#2: 420 lbs, 48\" x 40\" x 45\"\u003c\/strong\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 87.1875px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 87.1875px;\"\u003e\n\u003cp\u003eCompliance\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 87.1875px;\"\u003e\n\u003cul\u003e\n\u003cli\u003eCE approval\u003c\/li\u003e\n\u003cli\u003eNRTL Certification (UL 1450) is available upon request at extra cost\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 317.062px;\"\u003e\n\u003ctd style=\"width: 14.9043%; height: 317.062px;\"\u003e\n\u003cp\u003e Application Notes\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 85.0957%; height: 317.062px;\"\u003e\n\u003cul\u003e\n\u003cli\u003ePlease use 5N purity Argon gas for plasma sputtering. \u003c\/li\u003e\n\u003cli\u003eFor best performance, the non-conductive targets must be installed with a copper backing plate. Please refer to the instruction video below for target bonding (Click Pic #3 below)\u003c\/li\u003e\n\u003cli\u003eMTI supplies single crystal substrate from A to Z (Click Pic #4 below to order) \u003c\/li\u003e\n\u003cli\u003eMTI Sputtering Coaters have successfully coated ZnO on Al\u003csub\u003e2\u003c\/sub\u003eO\u003csub\u003e3\u003c\/sub\u003e substrate at 500 °C (XRD profile in Pic #5 below)\u003c\/li\u003e\n\u003cli\u003eHIGH VOLTAGE! Sputtering heads connect to high voltage. For safety, the operator must shut down the RF \/ DC generator before sample loading and target changing operations\u003c\/li\u003e\n\u003cli\u003eDO NOT use DI water in a water chiller. Use distilled water\u003c\/li\u003e\n\u003cli\u003eThe coater can be placed into glovebox as the Pic. 6 at extra cost ( must order glovebox together)\u003c\/li\u003e\n\u003cli\u003e\n\u003ctable border=\"0\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003ca href=\"https:\/\/www.youtube.com\/watch?v=1kDRlkKfjQo\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-SP-05000-AB-vp.jpg\" width=\"90\"\u003e\u003c\/a\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/EQ-SP-05000-AB-video.aspx\"\u003e Pic 3\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ZnO_Al2O3_XRD.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ZnO_Al2O3_XRD.jpg\" width=\"91\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ZnO_Al2O3_XRD.jpg\"\u003e Pic 5\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003ca href=\"https:\/\/mtixtl.com\/products\/dual-head-2-magnetron-plasma-sputtering-coater-in-glovebox-vtc-600-2hd-gb-ld?_pos=1\u0026amp;_sid=cc71db11b\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VGB-600-2HD-GB.jpg\" width=\"90\"\u003e\u003c\/a\u003e\u003ca href=\"..\/..\/..\/VTC-600-2HD-GB.aspx\"\u003ePic. \u003c\/a\u003e6\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e, \u003ctable border=\"0\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\n\u003ca href=\"https:\/\/www.youtube.com\/watch?v=1kDRlkKfjQo\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/EQ-SP-05000-AB-vp.jpg\" width=\"90\"\u003e\u003c\/a\u003e\u003ca href=\"http:\/\/www.mtixtl.com\/EQ-SP-05000-AB-video.aspx\"\u003e Pic 3\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ZnO_Al2O3_XRD.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ZnO_Al2O3_XRD.jpg\" width=\"91\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/ZnO_Al2O3_XRD.jpg\"\u003e Pic 5\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003ca href=\"https:\/\/mtixtl.com\/products\/dual-head-2-magnetron-plasma-sputtering-coater-in-glovebox-vtc-600-2hd-gb-ld?_pos=1\u0026amp;_sid=cc71db11b\u0026amp;_ss=r\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"60\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VGB-600-2HD-GB.jpg\" width=\"90\"\u003e\u003c\/a\u003e\u003ca href=\"..\/..\/..\/VTC-600-2HD-GB.aspx\"\u003ePic. \u003c\/a\u003e6\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44985185861771,"sku":"VTC600HD2","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/VTC6002HDmain.3.1.1.1_918f448e-b339-4dcc-8449-913f88186c9d.jpg?v=1764855091","url":"https:\/\/mti-indonesia.com\/products\/vtc6002hdld","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}