{"product_id":"vtc6003hdld","title":"DC\/RF 3-head High Vacuum 2” Magnetron Plasma Sputtering Coater - VTC-600-3HD-LD","description":"VTC-600-3HD-LD is a combinatorial plasma sputtering system with three 2“ magnetron sputtering sources and three RF\/DC power supplies. Such a sputtering system is capable of co-sputtering up to three different target materials and creates various composition profiles across the substrate (e.g. ternary materials for Li-ion rechargeable battery). This system is also suitable for sequential coating of multiple layer films such as ferroelectric, alloy, semiconductor, ceramic, dielectric, optical, oxide, hard, PTFE, etc. SPECIFICATIONS Power 208-240 VAC, single phase, 50\/60 Hz, 1500 W Source Power Three sputtering power sources Two DC source : 500 W power for coating metallic materials One RF source : 300 W power, 13.56 MHz frequency for coating non-conductive materials Magnetron Sputtering Head Three 2\" Magnetron Sputtering Heads with water cooling jackets and shutters Two are connected to DC sources for metallic materials One is connected to the RF source for non-conductive materials Target size: 2\" diameter with a thickness of 0.1 - 5 mm Sputtering targets are optional Recommended Sputtering Recipe and Useful Tips 2 RF heads model is available Extra 148 cm RF cable can be ordered at extra cost for the replacement Four heads sputtering system is available upon request (Pic. 5) Vacuum Chamber Stainless steel vacuum chamber: Ø300 × 300 mm H One 100 mm glass view port. Hinged type top flange for easy sample access Here is a glance of the vacuum chamber Sample Stage Ø140 mm rotating and heating sample stage up to 500°C Rotation speed: 1 - 20 rpm Single-point programmable temperature controller Gas Flow Control Two mass flow controllers (MFC) Flow rate: 0 – 200 sccm nitrogen calibrated 1\/4\" vent port. Vacuum Pump Station (Optional) For air-sensitive targets, such as Al, Ti, Cr, etc, or base pressure \u0026lt;1e-2 torr, a pumping station (turbo + backing pumps) is recommended Turbo pump . 63 L\/s turbomolecular pump , or 260 L\/s turbomolecular pump Backing pump 240 L\/min rotary vane pump , or 200 L\/min dry scroll pump Water Chiller (Optional) Chilled water is required One digital temperature-controlled recirculating water chiller is recommended Refrigeration range: 5~35 °C Flow rate: 16 L\/min Pump pressure: 14 psi Film Thickness Measurement (Optional) Quartz crystal microbalance for in-situ film thickness measurement is optional. Accuracy up to 1Å Compliance CE approval NRTL certification is available upon request at extra cost, please contact our sales representative for the quote. Application Note This coater may be placed into a standard glovebox with modification for thin-film battery research\u003cbr\u003e\u003cbr\u003e\u003ctable border=\"1\" cellpadding=\"1\" cellspacing=\"0\" style=\"width: 100%;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003ePower\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003e208-240 VAC, single phase, 50\/60 Hz, 1500 W\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003eSource Power\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC6002HDdischarging.png?v=1706229092\" rel=\"prettyPhoto[products]\" title=\"\"\u003e\u003cbr\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eThree sputtering power sources\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eTwo \u003ca href=\"DC-500-LD\" rel=\"noopener\" target=\"_blank\"\u003eDC source\u003c\/a\u003e: 500 W power for coating metallic materials \u003c\/li\u003e\n\u003cli\u003eOne \u003ca href=\"RF-300I-LD\" rel=\"noopener\" target=\"_blank\"\u003eRF source\u003c\/a\u003e: 300 W power, 13.56 MHz frequency for coating non-conductive materials\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eMagnetron Sputtering Head\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"hvmssspc2f\" rel=\"noopener\" target=\"_blank\"\u003eThree 2\" Magnetron Sputtering Heads\u003c\/a\u003e with water cooling jackets and shutters\n\u003cul\u003e\n\u003cli\u003eTwo are connected to DC sources for metallic materials\u003c\/li\u003e\n\u003cli\u003eOne is connected to the RF source for non-conductive materials\u003c\/li\u003e\n\u003cli\u003eTarget size: 2\" diameter with a thickness of 0.1 - 5 mm\u003cbr\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/mtixtl.com\/collections\/target-a-z\" rel=\"noopener\" target=\"_blank\"\u003eSputtering targets\u003c\/a\u003e are optional\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-2HD_Application_Note_1.pdf?v=1733441895\" rel=\"noopener\" target=\"_blank\"\u003eRecommended Sputtering Recipe and Useful Tips\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"vtc6002hdld\" rel=\"noopener\" target=\"_blank\"\u003e2 RF heads model\u003c\/a\u003e is available\u003cbr\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"spc-cable\" rel=\"noopener\" target=\"_blank\"\u003eExtra 148 cm RF cable\u003c\/a\u003e can be ordered at extra cost for the replacement\u003c\/li\u003e\n\u003cli\u003eFour heads sputtering system is available upon request (Pic. 5)\u003c\/li\u003e\n\u003c\/ul\u003e\n \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD-head.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD-head.jpg\" width=\"75\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC6002HDdischarging.png?v=1706229092\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC6002HDdischarging.png?v=1706229092\" title=\"Click to enlarge\" width=\"74\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Plasma.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/Plasma.jpg\" width=\"76\"\u003e\u003c\/a\u003e\u003ca href=\"SPC-Cable\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/SPC-Cable.jpg\" width=\"75\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eVacuum Chamber\u003cbr\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eStainless steel vacuum chamber: Ø300 × 300 mm H\u003c\/li\u003e\n\u003cli\u003eOne 100 mm glass view port. \u003c\/li\u003e\n\u003cli\u003eHinged type top flange for easy sample access\u003c\/li\u003e\n\u003cli\u003eHere is a glance of the vacuum chamber\u003cbr\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/window.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/window.png\" width=\"72\"\u003e\u003c\/a\u003e \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-2HD.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-2HD.jpg\" width=\"75\"\u003e\u003c\/span\u003e\u003c\/a\u003e   \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD_chamber_front.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD_chamber_front.jpg\" width=\"36\"\u003e\u003c\/span\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003e\u003cbr\u003e\u003cbr\u003e\u003cbr\u003eSample Stage\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eØ140 mm rotating and heating sample stage up to 500°C \u003c\/li\u003e\n\u003cli\u003eRotation speed: 1 - 20 rpm\u003c\/li\u003e\n\u003cli\u003eSingle-point programmable temperature controller\u003cbr\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/sampleholder.1.png\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/sampleholder.1.png\" width=\"79\"\u003e\u003c\/span\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD_rotary_sample_holder.jpg\" rel=\"noopener\" target=\"_blank\"\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003e\u003cimg alt=\"\" height=\"50\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC-600-3HD_rotary_sample_holder.jpg\" width=\"58\"\u003e\u003c\/span\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003eGas Flow Control\u003cbr\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eTwo \u003ca href=\"mfc-7b\" rel=\"noopener\" target=\"_blank\"\u003emass flow controllers\u003c\/a\u003e (MFC)\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eFlow rate: 0 – 200 sccm\u003c\/li\u003e\n\u003cli\u003enitrogen calibrated\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cli\u003e1\/4\" vent port.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003eVacuum Pump Station\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003e(Optional)\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eFor air-sensitive targets, such as Al, Ti, Cr, etc, or base pressure \u0026lt;1e-2 torr, a pumping station (turbo + backing pumps) is recommended\u003c\/li\u003e\n\u003cli\u003eTurbo pump . \n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"pv-dn63-ld\" rel=\"noopener\" target=\"_blank\"\u003e63 L\/s turbomolecular pump\u003c\/a\u003e, or\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"pv-dn100-ld\" rel=\"noopener\" target=\"_blank\"\u003e260 L\/s turbomolecular pump\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003cli\u003eBacking pump\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"ytp-550-ld\" rel=\"noopener\" target=\"_blank\"\u003e240 L\/min rotary vane pump\u003c\/a\u003e, or\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"ofsp12-ld\" rel=\"noopener\" target=\"_blank\"\u003e200 L\/min dry scroll pump\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003eWater Chiller\u003c\/p\u003e\n\u003cp\u003e(Optional)\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eChilled water is required\u003c\/li\u003e\n\u003cli\u003eOne digital temperature-controlled \u003ca href=\"KJ5000\" rel=\"noopener\" target=\"_blank\"\u003erecirculating water chiller\u003c\/a\u003e is recommended\u003c\/li\u003e\n\u003cul\u003e\n\u003cli\u003eRefrigeration range: 5~35 °C\u003c\/li\u003e\n\u003cli\u003eFlow rate: 16 L\/min\u003c\/li\u003e\n\u003cli\u003ePump pressure: 14 psi\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003eFilm Thickness Measurement\u003c\/p\u003e\n\u003cp\u003e(Optional)\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003ca href=\"tm106-ld\" rel=\"noopener\" target=\"_blank\"\u003eQuartz crystal microbalance\u003c\/a\u003e for in-situ film thickness measurement is optional. Accuracy up to 1Å\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cul\u003e\u003c\/ul\u003e\n\u003ca href=\"TFMS-LD\" rel=\"noopener\" target=\"_blank\"\u003e\u003c\/a\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003eCompliance\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eCE approval\u003c\/li\u003e\n\u003cli\u003eNRTL certification is available upon request at extra cost, please contact our sales representative for the quote.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 19.8389%;\"\u003e\n\u003cp\u003eApplication Note\u003c\/p\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 80.1611%;\"\u003e\n\u003cul\u003e\n\u003cli\u003eThis coater may be placed into a standard glovebox with modification for thin-film battery research\u003c\/li\u003e\n\u003cli\u003e\n\u003ca href=\"VTC-600-3HD-GB\" rel=\"noopener\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"64\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VGB-600-2HD-GB.1.jpg\" width=\"96\"\u003e\u003c\/a\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC6003HD1.png?v=1706228962\" rel=\"noopener\" style=\"font-size: 0.875rem;\" target=\"_blank\"\u003e\u003cimg alt=\"\" height=\"71\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0638\/4664\/6008\/files\/VTC6003HD1.png\" width=\"105\"\u003e\u003c\/a\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e","brand":"MTI","offers":[{"title":"Default Title","offer_id":44985185632395,"sku":"VTC6003HDLD","price":0.0,"currency_code":"MYR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0716\/4405\/3643\/files\/VTC6003HD_Main_7158577d-abc3-46c5-bae1-b20f4657d812.jpg?v=1764855089","url":"https:\/\/mti-indonesia.com\/products\/vtc6003hdld","provider":"MTI Malaysia \u0026 Indonesia","version":"1.0","type":"link"}