Description
This is a replacement vacuum chunk for the MTI EQ-ECO-402 dicing saw
For mounting wafers easily and quickly, you may also choose a vacuum chuck (P/N ECO402) with 20-micron flatness.
Put your sample (usually a thin wafer) on the removable adhesive film (ECO 419) (available from MTI upon your request), then place the film with the wafer on the top of the vacuum chuck.
Open the vacuum valve, vacuum chuck will suck the wafer firmly and be ready for cutting.
There is a M6 screw thread underneath for mounting the vacuum chuck.
