Furnace Construction
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- Double shell casing with three cooling fans
- High purity Alumina fibrous insulation for max. energy saving
- Dual heating zone with 1600ºC max. continuous working temperature
- Electric motor to drive the tube at variable speed
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Heating Zone length & Max. Working Temperature
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- Two zones heated separately
- Zone 1: working temperature 800 - 1700ºC (heated by MoSi2)
- Zone 2: working temperature 800 - 1700ºC
- Constant temperature zone length: 10" (250mm) within +/-1
- Max. Heating rate: 10 oC/minute
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| Processing tube & Sealing Flange |
- 99.8% purity Alumina Tube
- 60 mm stainless steel vacuum sealing flange with valve and meter is included
- One ceramic block is installed on each side flange to block thermal radiation during rotation
- 2-3/8" (60mm) O.D. x 2-1/8" (54mm) I.D x 48" (1200 mm) Length with inside block (see picture below)
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| Gas Fittings |
Inlet Fitting: Elbow Push-in connector for 6mm O.D tube; Outlet Fitting: Elbow Push-in connector for 12mm O.D tube
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Temperature Controller
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- Two 30 segments programmable PID digital temperature controller
- Note: To achieve fully temperature computerization please order a set of MTS-02 control modules. If you order the control module with the furnace we will install and test it before we ship out the product. We recommend you order a computer (laptop) from us. For more information, please click here
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| Temperature Uniformity |
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| Tube rotating Speed |
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| Furnace tilt angle |
- This furnace cannot be tilted
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| Max. Vacuum level |
- 4.5x10-2 torr (<0.1mtorr/s leaking rate if close all the valves to airtight the tube chamber)
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| Production Yield |
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| Power |
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| Voltage |
- 208 - 240V single phase (50 A Breaker required)
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| Warranty |
- One year limited warranty with lifetime support
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Laptop, software & WiFi Control (Optional)
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- Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
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Labview Based Temperature Control System (MTS01) enables a user to edit temperature profiles, manage heat-treatment recipes, record and plot data for MTI furnaces.
- A wireless remote control provides up to 300 meters of operating range.
- The above features are available upon request at an extra cost (up to $1,000).
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| Compliance |
- CE Certified
- NRTL (UL61010) or CSA certification is available at extra cost.
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Warning
Click here to learn more about the installation of a gas regulator.
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- The tube furnaces with alumina tube are designed for use under vacuum and low pressure < 0.02 MPa / 0.2 Bar/ 3 PSI
- Attention: A two-stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the heating process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable damages.
- The flow rate for gases should be limited to < 200 SCCM ( or 200ml/min )
- limit definition for all alumina tube furnaces: * Vacuum pressures may only be safely used up to 1500°C
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| Application Notes |
- Tilting and material feeding mechanism is available upon request at the extra cost. Please view the assembling approach diagram and video below
- For CVD coating, you may choose our multi-channel Gas delivery system as Pic below right
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