1100°C High Pressure ( 1.2 MPa) Liquid Phase Epitaxy Crystal Growth Furnace & Glove Box System - HP1100X-LPEGB

Structure

• Three-zone vertical heating furnace, maximum temperature: 1100°C
• Equipped with high-purity graphite crucible and graphite sample holder
• Chamber top cover opens automatically and is located inside the glove box for convenient sample and support replacement
• The glove box interior is equipped with an automatic moving rack and automatic door for the large transfer chamber, facilitating sample replacement and placement

Power

• Single-phase AC 220V 50/60HZ
• 6 kW Max.
  

Heating Element 

• Resistance Wire

Working Temperature

• 1100ºC Max.  (< 1 hr.)
• 1000ºC Continuous Working
• ≤10°C/min Recommended heating rate

Heating Zone

• 150mm+200mm+150mm (three temperature zones with independent control)
• Constant temperature zone length: ≥ 170mm 
  •  Temperature uniformity in constant temperature zone:
    • 400-600°C ±3°C
    • 600-900°C ±0.5°C

Production

• Maximum substrate size: ≤ 60*60mm
• Number of substrates per batch: ≤3 pieces
  
• Pull-up mechanism travel: 100mm
• Pull-up speed range: 0.05mm/h -10mm/h
• Pull-up rod rotation speed range: 1-10rpm 

High Pressure Chamber

• SS304 stainless steel
• Chamber dimensions: φ370mm (outer chamber)*φ350mm (inner chamber)*1200mm
• Maximum pressure: 1.2 MPa (≤700°C)
• Constant pressure control under flowing atmosphere, pressure control accuracy: ±1%
• Gas inlet equipped with mass flow controller, inlet flow meter range: 1000sccm
• Pressure sensor installed on chamber top cover for real-time monitoring of internal pressure changes
• Electromagnetic safety valve and mechanical safety valve dual safety protection (pressure limit range: ≤2MPa)
  
• Automatic raising and lowering Chamber top cover facilitating replacement of samples and graphite supports

Glove Box System

• Power supply: 220VAC, 50Hz, single-phase
• Power: 2KW
• Chamber material: 304 stainless steel
• Front and rear opening tempered safety glass window design
• Effective internal dimensions: 1200*800*1200mm (L*W*H)
• Sliding material tray installed on top of glove box chamber
• Interfaces: 4 KF40 interfaces on the rear side of the box
• 2 Antechamber : 
  • Large antechamber dimensions: Φ360mm ID × length 600mm
  • Small antechamber dimensions:  Φ150mm ID × length 300mm 
  • Sliding tray installed inside the large transfer chamber with automatic door
• Maximum vacuum level: 100Pa
• Butyl rubber glove size: Φ203mm × 813mm
• Circulating working gases: N2, Ar, He
• Circulation capacity: 90m³/h
• Touchscreen PLC control for automatic regeneration
• Regeneration gas: Working gas mixed with hydrogen (hydrogen 5%-10%)
• Standard equipped with 240L/min pumping rate dual-pole rotary vane mechanical pump, oil mist filter installed at pump outlet
  

Temperature and Pressure Control System

• PID automatic temperature control system
• Temperature control accuracy: ±0.1°C
• Thermocouple: Type C
• Touchscreen controlled three independently temperature zone controllers
• Heating curves can be viewed, saved and exported on the touchscreen
• Pressure can be set on the touchscreen
• Real-time display of internal chamber pressure
• Vacuum pump and vacuum valves can be controlled via the touchscreen

Vacuum System

• Pumping rate: 6 L/S
• Ultimate pressure: 4*10-1Pa (without load, mechanical pump only)
• Rated power: 1500 W

Dimension

Weight

Application Note

• This equipment can normally operate up to 1000°C, with a maximum pressure of 1.2MPa (in high-purity argon environment). Please do not exceed temperature or pressure limits during operation
• Do not introduce corrosive gases such as chlorides or sulfides, as they may damage components
• Since the heating element is resistance wire, which easily oxidizes at high temperatures, only high-purity argon, nitrogen, or other inert gases should be introduced. Do not introduce oxygen to prevent heating element damage
• Only open the top cover after the furnace temperature has returned to room temperature. The sample may still be at high temperature, please be cautious and use gloves or other tools for handling