Three Heating Zone Tube Furnace
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- Input power: 220VAC, 50/60Hz, a single phase at Max. 5KW
- Heating element: Fe-Cr-Al Alloy doped by Mo
- 1200oC Max. working temperature for < 60 minutes
- 1100oC Max. working temperature for continuous heating
- Recommended heating rate: ≤ 10ºC/min
- High-purity quartz tube: φ100 x 1400mm
- Total three heating zone lengths: 600mm (150mm + 300mm + 150mm)
- Built-in PID Auto-Tune function with overheating & broken thermocouple protection
- Temperature accuracy: ±1ºC
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R2R Vacuum Chambers  
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- Two vacuum chambers are located at two ends of the furnace and connected to the quartz tube
- The reeling rollers for a substrate in and out are located inside the vacuum chamber
- The reeling speed for the substrate is adjustable from 1- 400mm/min
- The precision tension control mechanism is built in form 0 - 1000g
- One roll of copper foil with 80 mm width and 0.025 mm thick (~2 kg) is included for customer practice
- The max vacuum pressure for the chamber: 5 x 10^-2 torr
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Three-Channel Gas Delivery Station (Optional)
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- Power: 220VAC, 50Hz, single-phase at Max. 23KW
- Gas mixing tank: φ80 x 120mm
- Working Temperature: 5~45ºC
- Max. Pressure: 3 x 106 Pa
- Accuracy: ±1.5% F.S.
- Liner: ±(0.5-1.5)% F.S.
- Duplicate accuracy: ±0.2%F.S.
- Controlling Range:
- Controller 1: 0~50 SCCM (Methane calibration)
- Controller 2: 1~200 SCCM (H2 gas calibration)
- Controller 3: 1~200 SCCM (Ar gas calibration)
- Click Pic on the left for detailed specification
- Warning: H2 and Methane must be installed nearby the furnace to alarm gas leaking
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Vacuum Pump and Valve
(Optional)
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- Heavy-Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two-Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 Torr.
- KFD25 adapter and stainless steel pipe are connected between the pump and tube flange with the ball valve
- Digital vacuum pressure gauge and display are installed with the furnace (Pic. 1)
- The oil-less pump (Pic. 2) and gas mixing & delivery system (Pic. 3) are available and the PID pressure-controlled vacuum system is available upon request at an extra cost
 Pic. 1  Pic. 2Pic. 3
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Anti-corrosive Pressure Gauge
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- 3.8 x 10-5 to 1125 Torr measurement range
- Anti-corrosive, gas-type independent
- High accuracy and reproducibility in the atmosphere for reliable atmospheric pressure detection
- Fast atmospheric detection eliminates waiting time and shortens the process cycle
- Easy to exchange plug & play sensor element
- Click the picture to view detailed specs
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| Temperature Controller |
- Three temperature controllers with 30 programmable segments with +/- 1ºC temperature accuracy
- Built-in PID Auto-Tune function with overheating & broken thermocouple protection
- Over-temperature protection and alarm allow for operation without attendant(s)
- RS485 Communications Port with PC operation software
- You may upgrade the temperature controller to the Eurotherm Controller with 0.1ºC accuracy with software
   
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| Control Panel |
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7" touch screen control panel which will control temperature, gas flow rate, plasma power
- PC control software is available upon request for remote operation by Laptop computer (Must buy a laptop with pre-installed software)
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Dimensions
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- 2400mm L x 600mm W x 1400mm H
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Warranty
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One-year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.) |
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Compliance
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- CE Certified
- NRTL (UL61010) or CSA certification is available at an extra cost
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Application Note
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- The furnace can be modified into a roll-to-roll hydrogen wire annealing furnace by adding an H2 burning and leaking detecting and protection system, as Pic. 1
- This roll-to-roll CVD tube furnace can be engaged to 8.5", 11" or 15" tubes, as Pic. 2
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 Pic. 1  Pic. 2
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| Shipping Weight & Dimensions |
1. 48" x 40" x 32", 180 lbs 2. 48" x 40" x 38", 485 lbs 3. 77" x 40" x 46", 450 lbs 4. 47" x 40" x 42", 195 lbs 5. 52" x 40" x 45", 340 lbs
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