Description
Thermal oxide Layer
-
Research Grade , about 80 % useful area
- SiO2 layer on 3" Silicon wafer
- Oxide layer thickness: 300 nm ( 3000A) +/-10%
- Refractive index - 1.455
Silicon Wafer Specifications:
- Conductive type: N-type/ P-dped
- Resistivity: 5-15 ohm.cm (If you would like to measure the resistivity accurately,
please order our Portable 4 Probe Resistivity Testing Instrument.) - Size: 3" +/- 0.5 mm in diameter x 0.5 mm +/- 0.05 mm th
- Orientation: (111) +/- 1o
- Polish: one side polished
- Surface roughness, Ra: < 5A (RMS)
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Optional: you may need tool below to handle the wafer ( click picture to order )
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