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1100°C Max RTP  Atmosphere Controlled Bottom Loading Furnace up to 50°C/S,  VBF1100XRTPASD

1100°C Max RTP Atmosphere Controlled Bottom Loading Furnace up to 50°C/S, VBF1100XRTPASD

SKU: vbf1100xrtpasd

Price: RFQ

Specifications

The VBF-1100X-RTP-ASD is a fully automatic bottom-loading rapid heating and cooling furnace with a Φ200mm quartz tube and an air-tight flange. It uses shortwave infrared lamps as heaters, reaching 50°C/sec heating rates and a maximum temperature of 1100°C. It is an excellent tool for preparing single-atom catalysis, and annealing a wafer up to 6". The system supports multi-unit control via a single PC , communicating with robotic systems for continuous, high-throughput sample sintering. It enables remote and local control of vacuum, gas supply, sintering, and furnace operations. Its automation and broad communication protocol support make it ideal for AI-driven materials laboratories . SPECIFICATIONS Power Supply Three-phase AC 208V, 50/60Hz Maximum Power 18 kW Features Ultra-fast Shortwave Infrared Heating rate of up to 50°C/s. Seamlessly integrates with robotic arms for efficient and automated sample placement. Automated Process Execution –  sample loading/unloading, flange, inert gas purging, automated gas flow control, heating, temperature holding, and cooling via a Laptop Supporting multiple cycle operations High-throughput sintering Capability by deploying multiple units with the help of a single robotic arm. A dual-layer Chamber with an Air Cooling System ensures efficient thermal management and system durability. Integrated Vacuum Control with a resistance vacuum gauge, enabling micro-positive pressure control (103,000–120,000 Pa) to maintain stable furnace pressure. High-purity alumina Fiber Insulation provides superior energy efficiency and thermal insulation. Comprehensive Data Logging software records temperature, pressure, and other critical parameters, with the ability to upload data via communication interfaces. Thermocouple K-type thermocouple Heating Maximum Operating Temperature: 1100℃ (≤ 30 minutes) Long-Term Operating Temperature: 1000℃ Heating Elements: 12 shortwave infrared lamps, 1.5 kW per lamp Heating Zone: Φ210mm × 100mm Heating Rate: Room temperature to 900℃: Recommended 10℃/s, Maximum 50℃/s Cooling Rate (in a sealed furnace environment): 800℃ to 350℃: 55℃/min 350℃ to 200℃: 5℃/min Cooling Rate (in an open furnace environment): 800℃ to 350℃: 200℃/min 350℃ to 50℃: 35℃/min Temperature Control PID Automatic Temperature Control via touch screen om a separated unit Intelligent 50-segment programmable temperature control ±1℃ Temperature Control Accuracy (Optional upgrade: ±0.1℃ with Eurotherm controller) High-precision SCR (Silicon-Controlled Rectifier) intelligent power regulation: Default DB9 PC communication port for remote monitoring and control. Stainless Steel Flange Sealing System A set of water-cooled sealing flanges The upper flange has a resistance vacuum gauge, K-type thermocouple, mechanical pressure gauge, and G1/4 double ferrule gas inlet. The upper flange has a KF25 vacuum port reserved. The quartz tube plug and sample stage are placed on the lower flange. Sample Stage and Tube Block Tube Block: Made of white quartz, with two white quartz baffles fixed by three ceramic rods. Sample Stage: Diameter: 105mm, featuring a rectangular recess (76×58mm) for sample placement (customizable based on customer requirements). Software Operation software is included to connect PC Supports multi-units Set temperature profile, gas flow rate, and sample loading/unloading cycles. With the help of a robotic system(optional at extra cost) can execute the following workflow: Loads the sample and closes the chamber door automatically . Vacuum evacuation and purging, followed by a protective gas introduction (also configurable for air sintering or vacuum sintering). Multi-segment heating, holding, and cooling program execution (up to 50 segments). Stops gas supply, and the chamber door can open at 300°C for sample exchange. Open-source software supports embedded loop process control for robotic integration. The entire process is automatically recorded and uploaded via communication protocols. Software displays the following parameters: Furnace tube pressure values (including vacuum level). Built-in mass flow controller (MFC) with a range of 0-5000sccm. Cleaning Cycles: 0 to 3 cycles Configurable. Automated Robotic Assistance (Optional) Rated Load: 5 kg Working Radius: 900 mm Maximum Arm Reach: 1096 mm Rated Voltage: DC 48V Robot Weight: 25 kg Repeat Positioning Accuracy: ±0.02 mm Communication Protocols: TCP/IP, Modbus, Wireless Network Typical Power Consumption: 150W Water Chiller (Optional) KJ6500 Power: 220-415 VAC, 3 phase Frequency: 50 Hz/60 Hz Nominal Cooling Capacity: 51880 BTU/h,  12897 Kcal/h Compressor Power: 4.6 kW, 6.16 HP(50Hz) 5.12 kW, 6.86 HP(60Hz) Vacuum System (Optional) Mechanical Pump : Achieves a vacuum level of 10⁻² Torr. Molecular Pump : Achieves a vacuum level of 10⁻⁵ Torr. Application Notes The internal pressure of the quartz tube must not exceed 0.02 MPa . A pressure regulator must be installed on the cylinder before introducing gas into the quartz tube. For safety, it is recommended to use a pressure below 0.02 MPa . We recommend purchasing a MTI pressure regulator , which has a range of 0.01 MPa – 0.1 MPa, ensuring greater accuracy and safety. For sample heating experiments, it is not recommended to operate with both the exhaust valve and gas inlet valve on the furnace tube flange closed. If gas valves must be closed during sample heating, the pressure gauge reading must be monitored at all times . If the pressure exceeds 0.02 MPa, the release valve must be opened immediately to prevent potential hazards such as quartz tube rupture or flange detachment. We do not recommend using flammable, explosive, or toxic gases. If the process requires the use of such gases, customers must take appropriate protective and explosion-proof measures. Our company is not responsible for any issues arising from the use of flammable, explosive, or toxic gases.

Power Supply

Three-phase AC 208V, 50/60Hz

Maximum Power

18 kW

Features
  • Ultra-fast Shortwave Infrared Heating rate of up to 50°C/s.
  • Seamlessly integrates with robotic arms for efficient and automated sample placement.
  • Automated Process Execution –  sample loading/unloading, flange, inert gas purging, automated gas flow control, heating, temperature holding, and cooling via a Laptop
  • Supporting multiple cycle operations
  • High-throughput sintering Capability by deploying multiple units with the help of a single robotic arm.
  • A dual-layer Chamber with an Air Cooling System ensures efficient thermal management and system durability.
  • Integrated Vacuum Control with a resistance vacuum gauge, enabling micro-positive pressure control (103,000–120,000 Pa) to maintain stable furnace pressure.
  • High-purity alumina Fiber Insulation provides superior energy efficiency and thermal insulation.
  • Comprehensive Data Logging software records temperature, pressure, and other critical parameters, with the ability to upload data via communication interfaces.
Thermocouple

K-type thermocouple

Heating
  • Maximum Operating Temperature: 1100℃ (≤ 30 minutes)
  • Long-Term Operating Temperature: 1000℃
  • Heating Elements: 12 shortwave infrared lamps, 1.5 kW per lamp
  • Heating Zone: Φ210mm × 100mm
  • Heating Rate: Room temperature to 900℃: Recommended 10℃/s, Maximum 50℃/s
  • Cooling Rate (in a sealed furnace environment):
    • 800℃ to 350℃: 55℃/min
    • 350℃ to 200℃: 5℃/min
  • Cooling Rate (in an open furnace environment):
    • 800℃ to 350℃: 200℃/min
    • 350℃ to 50℃: 35℃/min
Temperature Control
  • PID Automatic Temperature Control via touch screen om a separated unit
  • Intelligent 50-segment programmable temperature control
  • ±1℃ Temperature Control Accuracy (Optional upgrade: ±0.1℃ with Eurotherm controller)
  • High-precision SCR (Silicon-Controlled Rectifier) intelligent power regulation: 
  • Default DB9 PC communication port for remote monitoring and control.
Stainless Steel Flange Sealing System
  • A set of water-cooled sealing flanges
  • The upper flange has a resistance vacuum gauge, K-type thermocouple, mechanical pressure gauge, and G1/4 double ferrule gas inlet.
  • The upper flange has a KF25 vacuum port reserved.
  • The quartz tube plug and sample stage are placed on the lower flange.
Sample Stage and Tube Block
  • Tube Block: Made of white quartz, with two white quartz baffles fixed by three ceramic rods.
  • Sample Stage: Diameter: 105mm, featuring a rectangular recess (76×58mm) for sample placement (customizable based on customer requirements).
Software
  • Operation software is included to connect PC
  • Supports multi-units 
  • Set temperature profile, gas flow rate, and sample loading/unloading cycles.

  • With the help of a robotic system(optional at extra cost) can execute the following workflow:

    1. Loads the sample and closes the chamber door automatically .
    2. Vacuum evacuation and purging, followed by a protective gas introduction (also configurable for air sintering or vacuum sintering).
    3. Multi-segment heating, holding, and cooling program execution (up to 50 segments).
    4. Stops gas supply, and the chamber door can open at 300°C for sample exchange.
    5. Open-source software supports embedded loop process control for robotic integration.
    6. The entire process is automatically recorded and uploaded via communication protocols.

     

  • Software displays the following parameters:

    • Furnace tube pressure values (including vacuum level).
    • Built-in mass flow controller (MFC) with a range of 0-5000sccm.
    • Cleaning Cycles: 0 to 3 cycles Configurable.
Automated Robotic Assistance (Optional)
  • Rated Load: 5 kg
  • Working Radius: 900 mm
  • Maximum Arm Reach: 1096 mm
  • Rated Voltage: DC 48V
  • Robot Weight: 25 kg
  • Repeat Positioning Accuracy: ±0.02 mm
  • Communication Protocols: TCP/IP, Modbus, Wireless Network
  • Typical Power Consumption: 150W

Water Chiller (Optional)

KJ6500

  • Power: 220-415 VAC, 3 phase
  • Frequency: 50 Hz/60 Hz
  • Nominal Cooling Capacity: 51880 BTU/h,  12897 Kcal/h
  • Compressor Power:
    • 4.6 kW, 6.16 HP(50Hz)
    • 5.12 kW, 6.86 HP(60Hz)
Vacuum System (Optional)
NRTL certified 240 L/m Heavy Duty Double Stage Rotary Vane Vacuum Pump with Exhaust Filter - EQ-YTP-550-LD

Application Notes

Inert Gas Regulator , Two Stage Brass 0-100 psi Analytical Cylinder Regulator - CGA-580-LD
  • The internal pressure of the quartz tube must not exceed 0.02 MPa.
  • A pressure regulator must be installed on the cylinder before introducing gas into the quartz tube.
    • For safety, it is recommended to use a pressure below 0.02 MPa.
    • We recommend purchasing a MTI pressure regulator , which has a range of 0.01 MPa – 0.1 MPa, ensuring greater accuracy and safety.
  • For sample heating experiments, it is not recommended to operate with both the exhaust valve and gas inlet valve on the furnace tube flange closed.
    • If gas valves must be closed during sample heating, the pressure gauge reading must be monitored at all times.
    • If the pressure exceeds 0.02 MPa, the release valve must be opened immediately to prevent potential hazards such as quartz tube rupture or flange detachment.
  • We do not recommend using flammable, explosive, or toxic gases.
    • If the process requires the use of such gases, customers must take appropriate protective and explosion-proof measures.
    • Our company is not responsible for any issues arising from the use of flammable, explosive, or toxic gases.

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