Specifications
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Power |
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Heating Rate |
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Heating Elements |
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Heating Chamber |
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Processing Tube |
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Flanges |
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| Gas Inlet and Outlet |
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| Water Chiller |
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| Temperature Controller |
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| Options |
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![]() Sample Holder
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![]() Quartz boat for wafer
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![]() Quartz Thermal Block
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Pressure |
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Vacuum Level |
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Compliance |
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