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1100°C Max 8" OD 7.6 L Quartz Chamber Furnace - VBF1200XH8

1100°C Max 8" OD 7.6 L Quartz Chamber Furnace - VBF1200XH8

SKU: vbf1200xh8

Price: RFQ

Specifications

VBF-1200X-H8 is a chamber furnace with a Ø7.5" ID x 13.4"L horizontal quartz chamber. The hermetic chamber allows heat treatment under a controlled atmosphere and vacuum conditions, up to 1100°C. SPECIFICATIONS Power 208 - 240 VAC, single phase, 50/60Hz, 20 A 4.0 kW One power cable is included without a plug. Working Temperature < 1100 °C, up to 30 minutes @ ambient pressure < 1000 °C continuously @ ambient pressure or vacuum GE214 grade quartz tube is available for operation at 1150°C Heating Rate < 20 ° C / min Recommended. 10 ° C / min Heating Elements Ni-Cr-Al wires Heating Chamber ⌀240 * 260 mm Processing Tube Quartz tube : Ø203ר192×340 mm Flanges Multifunctional stainless steel water-cooled flange assembly two 1/4" quick-connect ports Silicone O-rings One bored Al2O3 foam refractory block (190Dia * 50mm) is provided. (Fig. B) Thermocouple or electric Alumina Feedthrough (O.D 6.35mm, I.D 4.0 mm, L 300mm) is available upon request Fig. a Fig. b Gas Inlet and Outlet One gas inlet and outlet ( 8 mm barbed fitting) One KF25 port for vacuum generation Water Chiller Water chiller is required but not included at T > 500 °C MTI recommend using KJ5000 water chiller Two Ø8 mm barbed fitting for water connection Temperature Controller Proportional–integral–derivative (PID) temperature controller Auto-tune for PID parameters 30 segments programmed with ramping, cooling, and dwelling steps Built-in over-temperature alarm and thermocouple failure alarm +/- 1 ºC temperature control accuracy The Default DB9 PC communication port is included for connecting to a PC Eurotherm Temperature Controll er is available at an extra cost with +/-0.1 ° C accuracy. Options Digital Pressure Gauge with a range from 3.8x10 -5 to 1125 Torr. Quartz sample platform Quartz wafer boat Quartz Thermal Block Sample Holder Quartz boat for wafer Quartz Thermal Block Pressure < 3 psig Vacuum Level <5e-2 torr with a mechanical vacuum pump Compliance CE Certified NRTL or CSA certification is available upon request at extra cost. Patten Number: ZL-2011-2-0102249.4 SINCE 2011-5-19

Power

  • 208 - 240 VAC, single phase, 50/60Hz, 20 A
  • 4.0 kW
  • One power cable is included without a plug. 


Working Temperature

  • < 1100 °C, up to 30 minutes @ ambient pressure 
  • < 1000 °C continuously @ ambient pressure or vacuum

  • GE214 grade quartz tube is available for operation at 1150°C

Heating Rate

  • < 20°C/ min
  • Recommended. 10°C/ min

Heating Elements

  • Ni-Cr-Al wires 

Heating Chamber

Processing Tube


Flanges
  • Fig. a Fig. b
Gas Inlet and Outlet
  • One gas inlet and outlet ( 8 mm barbed fitting)
  • One KF25 port for vacuum generation
Water Chiller
  • Water chiller is required but not included at T > 500 °C
  • MTI recommend using KJ5000 water chiller 
  • Two Ø8 mm barbed fitting for water connection 
Temperature Controller
  • Proportional–integral–derivative (PID) temperature controller
  • Auto-tune for PID parameters
  • 30 segments programmed with ramping, cooling, and dwelling steps
  • Built-in over-temperature alarm and thermocouple failure alarm
  • +/- 1 ºC temperature control accuracy
  • The Default DB9 PC communication port is included for connecting to a PC
  • Eurotherm Temperature Controller is available at an extra cost with +/-0.1°C accuracy. 
Options 
Sample Holder
Quartz boat for wafer
Quartz Thermal Block

Pressure

  • < 3 psig

Vacuum Level

Compliance

  • CE Certified
  • NRTL or CSA certification is available upon request at extra cost.
  • Patten Number: ZL-2011-2-0102249.4 SINCE 2011-5-19

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