3 Heads RF/DC Plasma Sputtering Coater for Powders with 1 PPM Gas Purification System - VTC-3HD-VP

• Single-phase 220VAC +/- 10%, 50 / 60 Hz
• 2000 W (including a vacuum pump and water chiller)
• If the voltage is 110 V, a 3000 W transformer can be ordered at MTI (Click the picture to the left for detail)

• Three sputtering power sources are integrated into one control box (Click picture below to see detailed specs)
• DC source: 500 W power for coating metallic materials (Pic 1)
• RF source: 300 W power, 13.56 MHz frequency for coating non-conductive materials (Pic 2)

Magnetron Sputtering Head

Sputtering Target

• Target size requirement: 1" diameter x 1/8" thickness max
• Sputtering distance range: 50 – 80 mm adjustable
• Sputtering angle range: 0 – 25° adjustable 
• 1" diameter Cu target and Al₂O₃ target are included for demo testing
• Various oxide 1” sputtering targets are available upon request at extra cost
• For target bonding, 1 mm and 2 mm copper backing plates are included. Silver epoxy and extra copper backing plates  can be ordered at MTI
  

Vacuum Chamber

Vibration Sample Holder

• The amplification of vibration is adjustable from 400 - 2000 RPM in terms of motor speed
• One 2" powder reservoir (cup shape) is on the vibration motor. Powder bounce and self rotate during the coating process.
• Suggested powder quantity: 5 - 20 ml
• Suggested particle size: 1 ~ 1000 microns ( Powder must be vacuum dry before coting)
• The sample stage of blade mixing is available upon request for the larger amount of powder

Gas Purification System

• MTI innovative technology-- using a gas purification system to replace turbopump to get battery coating.
• Two-columns of Molecular sieves are Built-in in the system. which can remove oxygen and humidity less than < 1 PPM
• Regeneration Temperature Controlleris built-in for automatically regenerating the filters
• Automatically purging function is built-in for quick reducing O2 < 200ppm & H2O < 50 ppm before recycling.
• The automatic pressure control system is built in to keep the pressure at a constant level
• 6" color PLC touch panel is included which can set and display the humidity and pressure level.
• Click the picture left column to see detailed specifications
• After purification with O2 & H2O < 1 PPM, the chamber pressure can be set up a suitable vacuum level ( 50 - 100 m-torr) for sputtering, which is much better than 10-5 torr vacuum.

• Precise quartz Film Thickness Monitor is optional, which can be into the chamber to monitor coating thickness with an accuracy of 0.10 Å

Compliance

• CE approval
• NRTLcertification is available upon request at extra cost, please contact our sales representative for the quote.

Optional

• This coater may be placed into a standard glovebox with modification for air-sensitive materials. (Pic. 1)
• larger 3 head coater with 12" Vac. chamber, 8" dia. sample order, and 3x 2" sputtering guns, is available upon request (Pic. 2)